H1 CRD 2 2021 1 11 15 H2 HERL 7840 35 1 4 ILRS H3 gracefo2 1804702 0124 43477 0 1 1 H4 0 2020 5 15 5 37 49 2020 5 15 5 40 7 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 2.398 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 19984.320000 1020.03 276.20 93.7 0 20 20338.560000 1020.08 276.30 93.2 0 20 20520.000000 1020.17 276.30 92.7 0 41 17936.640000 0 KS 1772 1772 122.977 104282.1 0.0 24.0 0.260 -0.200 -1.0 2 0 0 1 na 41 20511.360000 0 KS 3537 3537 122.977 104280.8 0.0 26.0 0.230 -0.290 -3.0 2 0 0 2 na 40 20338.560000 0 KS 5309 5309 122.977 104280.9 1.3 25.0 0.245 -0.245 -2.0 2 2 0 3 na 50 KS 30.6 0.105 -0.257 2.0 0 10 20268.019347933248 0.004107272554 KS 2 2 0 0 0 0 10 20268.022573526116 0.004107196678 KS 2 2 0 0 0 0 10 20268.023648728458 0.004107171394 KS 2 2 0 0 0 0 10 20268.033325535436 0.004106944119 KS 2 2 0 0 0 0 10 20268.395667934424 0.004098459086 KS 2 2 0 0 0 0 10 20268.401043932027 0.004098333673 KS 2 2 0 0 0 0 10 20268.404269524895 0.004098258441 KS 2 2 0 0 0 0 10 20268.419322329544 0.004097907237 KS 2 2 0 0 0 0 10 20268.420397531865 0.004097882170 KS 2 2 0 0 0 0 10 20268.421472734221 0.004097857067 KS 2 2 0 0 0 0 10 20268.424698327094 0.004097781912 KS 2 2 0 0 0 0 10 20268.748333527088 0.004090257352 KS 2 2 0 0 0 0 10 20268.763386331703 0.004089908472 KS 2 2 0 0 0 0 10 20268.765536722236 0.004089858723 KS 2 2 0 0 0 0 10 20268.785965524470 0.004089385513 KS 2 2 0 0 0 0 10 20268.789191131519 0.004089310778 KS 2 2 0 0 0 0 10 20268.791341522070 0.004089261036 KS 2 2 0 0 0 0 10 20268.795642331476 0.004089161323 KS 2 2 0 0 0 0 10 20268.801018329105 0.004089036896 KS 2 2 0 0 0 0 10 20268.805319124343 0.004088937269 KS 2 2 0 0 0 0 10 20268.806394326719 0.004088912360 KS 2 2 0 0 0 0 10 20268.810695121951 0.004088812834 KS 2 2 0 0 0 0 10 20268.819296726651 0.004088613752 KS 2 2 0 0 0 0 10 20268.823597521876 0.004088514149 KS 2 2 0 0 0 0 10 20268.830048721836 0.004088364925 KS 2 2 0 0 0 0 10 20268.833274328905 0.004088290227 KS 2 2 0 0 0 0 10 20268.834349531259 0.004088265449 KS 2 2 0 0 0 0 10 20268.836499921807 0.004088215576 KS 2 2 0 0 0 0 10 20268.838650326519 0.004088165882 KS 2 2 0 0 0 0 10 20268.845101526483 0.004088016629 KS 2 2 0 0 0 0 10 20268.864455126376 0.004087568962 KS 2 2 0 0 0 0 10 20268.867680733436 0.004087494356 KS 2 2 0 0 0 0 10 20268.879507930995 0.004087220989 KS 2 2 0 0 0 0 10 20268.881658335701 0.004087171240 KS 2 2 0 0 0 0 10 20268.883808726265 0.004087121506 KS 2 2 0 0 0 0 10 20268.887034333334 0.004087046940 KS 2 2 0 0 0 0 10 20268.912839133181 0.004086450686 KS 2 2 0 0 0 0 10 20268.918215130777 0.004086326472 KS 2 2 0 0 0 0 10 20268.919290333146 0.004086301622 KS 2 2 0 0 0 0 10 20268.933267935407 0.004085978754 KS 2 2 0 0 0 0 10 20268.938643933045 0.004085854654 KS 2 2 0 0 0 0 10 20268.942944728270 0.004085755323 KS 2 2 0 0 0 0 10 20268.944019930626 0.004085730483 KS 2 2 0 0 0 0 10 20268.977351132821 0.004084961197 KS 2 2 0 0 0 0 10 20268.985952723322 0.004084762814 KS 2 2 0 0 0 0 10 20268.987027925692 0.004084737938 KS 2 2 0 0 0 0 10 20268.991328735104 0.004084638709 KS 2 2 0 0 0 0 10 20269.134330322608 0.004081344700 KS 2 2 0 0 0 0 10 20269.147232722549 0.004081047894 KS 2 2 0 0 0 0 10 20269.157984731969 0.004080800643 KS 2 2 0 0 0 0 10 20269.160135122498 0.004080751276 KS 2 2 0 0 0 0 10 20269.162285527201 0.004080701746 KS 2 2 0 0 0 0 10 20269.166586322475 0.004080602954 KS 2 2 0 0 0 0 10 20269.167661524849 0.004080578228 KS 2 2 0 0 0 0 10 20269.176263129507 0.004080380518 KS 2 2 0 0 0 0 10 20269.177338331886 0.004080355761 KS 2 2 0 0 0 0 10 20269.180563924799 0.004080281690 KS 2 2 0 0 0 0 10 20269.182714329483 0.004080232269 KS 2 2 0 0 0 0 10 20269.194541527066 0.004079960541 KS 2 2 0 0 0 0 10 20269.202067929408 0.004079787578 KS 2 2 0 0 0 0 10 20269.204218334118 0.004079738200 KS 2 2 0 0 0 0 10 20269.208519129386 0.004079639433 KS 2 2 0 0 0 0 10 20269.210669534091 0.004079590046 KS 2 2 0 0 0 0 10 20269.212819924667 0.004079540585 KS 2 2 0 0 0 0 10 20269.214970329350 0.004079491215 KS 2 2 0 0 0 0 10 20269.217120734079 0.004079441900 KS 2 2 0 0 0 0 10 20269.218195922240 0.004079417120 KS 2 2 0 0 0 0 10 20269.222496731707 0.004079318347 KS 2 2 0 0 0 0 10 20269.230023134033 0.004079145645 KS 2 2 0 0 0 0 10 20269.242925533980 0.004078849421 KS 2 2 0 0 0 0 10 20269.248301531583 0.004078725975 KS 2 2 0 0 0 0 10 20269.249376733937 0.004078701365 KS 2 2 0 0 0 0 10 20269.252602326847 0.004078627319 KS 2 2 0 0 0 0 10 20269.263354322083 0.004078380612 KS 2 2 0 0 0 0 10 20269.268730333860 0.004078257276 KS 2 2 0 0 0 0 10 20269.269805522053 0.004078232542 KS 2 2 0 0 0 0 10 20269.279482329115 0.004078010561 KS 2 2 0 0 0 0 10 20269.288083933797 0.004077813299 KS 2 2 0 0 0 0 10 20269.290234324358 0.004077764005 KS 2 2 0 0 0 0 10 20269.292384729064 0.004077714683 KS 2 2 0 0 0 0 10 20269.293459931442 0.004077690007 KS 2 2 0 0 0 0 10 20269.296685524352 0.004077616040 KS 2 2 0 0 0 0 10 20269.297760726671 0.004077591459 KS 2 2 0 0 0 0 10 20269.298835929059 0.004077566789 KS 2 2 0 0 0 0 10 20269.307437533729 0.004077369562 KS 2 2 0 0 0 0 10 20269.314963921881 0.004077197038 KS 2 2 0 0 0 0 10 20269.316039124268 0.004077172423 KS 2 2 0 0 0 0 10 20269.331091928936 0.004076827481 KS 2 2 0 0 0 0 10 20269.335392724210 0.004076728852 KS 2 2 0 0 0 0 10 20269.340768721817 0.004076605751 KS 2 2 0 0 0 0 10 20269.346144733588 0.004076482579 KS 2 2 0 0 0 0 10 20269.350445528862 0.004076384050 KS 2 2 0 0 0 0 10 20269.355821526463 0.004076260991 KS 2 2 0 0 0 0 10 20269.370874331160 0.004075916298 KS 2 2 0 0 0 0 10 20269.371949533523 0.004075891701 KS 2 2 0 0 0 0 10 20269.373024735883 0.004075867051 KS 2 2 0 0 0 0 10 20269.376250328784 0.004075793221 KS 2 2 0 0 0 0 10 20269.378400733505 0.004075743981 KS 2 2 0 0 0 0 10 20269.387002324052 0.004075547097 KS 2 2 0 0 0 0 10 20269.388077526391 0.004075522479 KS 2 2 0 0 0 0 10 20269.389152728742 0.004075497893 KS 2 2 0 0 0 0 10 20269.392378335816 0.004075424008 KS 2 2 0 0 0 0 10 20269.400979926349 0.004075227178 KS 2 2 0 0 0 0 10 20269.403130331061 0.004075177958 KS 2 2 0 0 0 0 10 20269.412807123986 0.004074956555 KS 2 2 0 0 0 0 10 20269.423559133360 0.004074710709 KS 2 2 0 0 0 0 10 20269.424634335729 0.004074686124 KS 2 2 0 0 0 0 10 20269.436461533334 0.004074415605 KS 2 2 0 0 0 0 10 20269.438611923898 0.004074366401 KS 2 2 0 0 0 0 10 20269.449363933280 0.004074120617 KS 2 2 0 0 0 0 10 20269.452589526179 0.004074046890 KS 2 2 0 0 0 0 10 20269.453664728567 0.004074022374 KS 2 2 0 0 0 0 10 20269.460115928539 0.004073874924 KS 2 2 0 0 0 0 10 20269.465491926149 0.004073752059 KS 2 2 0 0 0 0 10 20269.480544730863 0.004073408121 KS 2 2 0 0 0 0 10 20269.482695135563 0.004073359014 KS 2 2 0 0 0 0 10 20269.483770323762 0.004073334449 KS 2 2 0 0 0 0 10 20269.492371928458 0.004073137907 KS 2 2 0 0 0 0 10 20269.498823128444 0.004072990620 KS 2 2 0 0 0 0 10 20269.500973533150 0.004072941556 KS 2 2 0 0 0 0 10 20269.506349530801 0.004072818765 KS 2 2 0 0 0 0 10 20269.511725528405 0.004072696051 KS 2 2 0 0 0 0 10 20269.512800730784 0.004072671520 KS 2 2 0 0 0 0 10 20269.520327133096 0.004072499637 KS 2 2 0 0 0 0 10 20269.525703130755 0.004072376954 KS 2 2 0 0 0 0 10 20269.526778333089 0.004072352427 KS 2 2 0 0 0 0 10 20269.531079128355 0.004072254282 KS 2 2 0 0 0 0 10 20269.536455125979 0.004072131567 KS 2 2 0 0 0 0 10 20269.540755935425 0.004072033450 KS 2 2 0 0 0 0 10 20269.550432728305 0.004071812617 KS 2 2 0 0 0 0 10 20269.555808725936 0.004071690008 KS 2 2 0 0 0 0 10 20269.574087123560 0.004071273154 KS 2 2 0 0 0 0 10 20269.575162325886 0.004071248663 KS 2 2 0 0 0 0 10 20269.581613525873 0.004071101575 KS 2 2 0 0 0 0 10 20269.598816735309 0.004070709393 KS 2 2 0 0 0 0 10 20269.600967125840 0.004070660360 KS 2 2 0 0 0 0 10 20269.606343123494 0.004070537882 KS 2 2 0 0 0 0 10 20269.622471130545 0.004070170384 KS 2 2 0 0 0 0 10 20269.629997532861 0.004069999074 KS 2 2 0 0 0 0 10 20269.636448732858 0.004069852089 KS 2 2 0 0 0 0 10 20269.659027925745 0.004069337958 KS 2 2 0 0 0 0 10 20269.666554328080 0.004069166694 KS 2 2 0 0 0 0 10 20269.683757523349 0.004068775175 KS 2 2 0 0 0 0 10 20269.688058332766 0.004068677327 KS 2 2 0 0 0 0 10 20269.693434330432 0.004068554989 KS 2 2 0 0 0 0 10 20269.697735125680 0.004068457196 KS 2 2 0 0 0 0 10 20269.698810328031 0.004068432796 KS 2 2 0 0 0 0 10 20269.729991125624 0.004067723770 KS 2 2 0 0 0 0 10 20269.731066327986 0.004067699340 KS 2 2 0 0 0 0 10 20269.746119132689 0.004067357232 KS 2 2 0 0 0 0 10 20269.756871127958 0.004067112930 KS 2 2 0 0 0 0 10 20269.779450335029 0.004066600030 KS 2 2 0 0 0 0 10 20269.793427923214 0.004066282758 KS 2 2 0 0 0 0 10 20269.796653530311 0.004066209467 KS 2 2 0 0 0 0 10 20269.798803934998 0.004066160693 KS 2 2 0 0 0 0 10 20269.800954325559 0.004066111867 KS 2 2 0 0 0 0 10 20269.825683923190 0.004065550690 KS 2 2 0 0 0 0 10 20269.829984732604 0.004065453131 KS 2 2 0 0 0 0 10 20269.843962334956 0.004065136098 KS 2 2 0 0 0 0 10 20269.849338332598 0.004065014173 KS 2 2 0 0 0 0 10 20269.851488723159 0.004064965374 KS 2 2 0 0 0 0 10 20269.861165530248 0.004064746002 KS 2 2 0 0 0 0 10 20269.916000723129 0.004063503580 KS 2 2 0 0 0 0 10 20269.918151127840 0.004063454891 KS 2 2 0 0 0 0 10 20269.937504727827 0.004063016701 KS 2 2 0 0 0 0 10 20269.951482330216 0.004062700360 KS 2 2 0 0 0 0 10 20269.953632734910 0.004062651749 KS 2 2 0 0 0 0 10 20269.979437534927 0.004062067937 KS 2 2 0 0 0 0 10 20269.990189530216 0.004061824783 KS 2 2 0 0 0 0 10 20270.011693534920 0.004061338686 KS 2 2 0 0 0 0 10 20270.019219923137 0.004061168555 KS 2 2 0 0 0 0 10 20270.023520732553 0.004061071394 KS 2 2 0 0 0 0 10 20270.025671123125 0.004061022836 KS 2 2 0 0 0 0 10 20270.046099925490 0.004060561368 KS 2 2 0 0 0 0 10 20270.054701530237 0.004060367072 KS 2 2 0 0 0 0 10 20270.070829523143 0.004060002954 KS 2 2 0 0 0 0 10 20270.099859930261 0.004059347785 KS 2 2 0 0 0 0 10 20270.102010334957 0.004059299290 KS 2 2 0 0 0 0 10 20270.110611925519 0.004059105241 KS 2 2 0 0 0 0 10 20270.127815134974 0.004058717301 KS 2 2 0 0 0 0 10 20270.143943127913 0.004058353718 KS 2 2 0 0 0 0 10 20270.151469530297 0.004058184101 KS 2 2 0 0 0 0 10 20270.197703132691 0.004057142601 KS 2 2 0 0 0 0 10 20270.217056732708 0.004056706944 KS 2 2 0 0 0 0 10 20270.222432730376 0.004056585928 KS 2 2 0 0 0 0 10 20270.242861532744 0.004056126329 KS 2 2 0 0 0 0 10 20270.282643935180 0.004055231805 KS 2 2 0 0 0 0 10 20270.298771928123 0.004054869401 KS 2 2 0 0 0 0 10 20270.313824732863 0.004054531185 KS 2 2 0 0 0 0 10 20270.317050325792 0.004054458731 KS 2 2 0 0 0 0 10 20270.324576728162 0.004054289694 KS 2 2 0 0 0 0 10 20270.325651930551 0.004054265590 KS 2 2 0 0 0 0 10 20270.331027928179 0.004054144852 KS 2 2 0 0 0 0 10 20270.332103130573 0.004054120704 KS 2 2 0 0 0 0 10 20270.334253535265 0.004054072403 KS 2 2 0 0 0 0 10 20270.335328723488 0.004054048227 KS 2 2 0 0 0 0 10 20270.345005530595 0.004053831026 KS 2 2 0 0 0 0 10 20270.348231123513 0.004053758642 KS 2 2 0 0 0 0 10 20270.353607135311 0.004053637980 KS 2 2 0 0 0 0 10 20270.358983132968 0.004053517369 KS 2 2 0 0 0 0 10 20270.360058335338 0.004053493140 KS 2 2 0 0 0 0 10 20270.368659925900 0.004053300194 KS 2 2 0 0 0 0 10 20270.372960735363 0.004053203691 KS 2 2 0 0 0 0 10 20270.378336733003 0.004053083132 KS 2 2 0 0 0 0 10 20270.392314335394 0.004052769582 KS 2 2 0 0 0 0 10 20270.398765535403 0.004052624952 KS 2 2 0 0 0 0 10 20270.400915925978 0.004052576713 KS 2 2 0 0 0 0 10 20270.401991128328 0.004052552628 KS 2 2 0 0 0 0 10 20270.406291923649 0.004052456165 KS 2 2 0 0 0 0 10 20270.425645523689 0.004052022380 KS 2 2 0 0 0 0 10 20270.451450323751 0.004051444233 KS 2 2 0 0 0 0 10 20270.483706323829 0.004050722026 KS 2 2 0 0 0 0 10 20270.485856728550 0.004050673940 KS 2 2 0 0 0 0 10 20270.493383130940 0.004050505437 KS 2 2 0 0 0 0 10 20270.494458333292 0.004050481400 KS 2 2 0 0 0 0 10 20270.501984735676 0.004050313041 KS 2 2 0 0 0 0 10 20270.503059923892 0.004050288912 KS 2 2 0 0 0 0 10 20270.504135126240 0.004050264877 KS 2 2 0 0 0 0 10 20270.505210328599 0.004050240826 KS 2 2 0 0 0 0 10 20270.538541531074 0.004049495333 KS 2 2 0 0 0 0 10 20270.544992731091 0.004049351103 KS 2 2 0 0 0 0 10 20270.556819928750 0.004049086796 KS 2 2 0 0 0 0 10 20270.578323933541 0.004048606306 KS 2 2 0 0 0 0 10 20270.585850321771 0.004048438129 KS 2 2 0 0 0 0 10 20270.642835933748 0.004047166135 KS 2 2 0 0 0 0 10 20270.644986324337 0.004047118150 KS 2 2 0 0 0 0 10 20270.717024726950 0.004045512357 KS 2 2 0 0 0 0 10 20270.772935122453 0.004044267689 KS 2 2 0 0 0 0 10 20270.855725534635 0.004042427352 KS 2 2 0 0 0 0 10 20270.901959123035 0.004041401004 KS 2 2 0 0 0 0 10 20270.908410323071 0.004041257882 KS 2 2 0 0 0 0 10 20270.909485525457 0.004041234038 KS 2 2 0 0 0 0 10 20270.933139935006 0.004040709393 KS 2 2 0 0 0 0 10 20270.942816727953 0.004040494864 KS 2 2 0 0 0 0 10 20270.947117523257 0.004040399473 KS 2 2 0 0 0 0 10 20270.955719128036 0.004040208854 KS 2 2 0 0 0 0 10 20270.965395935175 0.004039994418 KS 2 2 0 0 0 0 10 20270.971847135205 0.004039851551 KS 2 2 0 0 0 0 10 20270.996576733007 0.004039303674 KS 2 2 0 0 0 0 10 20271.006253525955 0.004039089465 KS 2 2 0 0 0 0 10 20271.009479133060 0.004039018045 KS 2 2 0 0 0 0 10 20271.015930333096 0.004038875247 KS 2 2 0 0 0 0 10 20271.022381533121 0.004038732396 KS 2 2 0 0 0 0 10 20271.034208730829 0.004038470776 KS 2 2 0 0 0 0 10 20271.035283933213 0.004038446917 KS 2 2 0 0 0 0 10 20271.051411926210 0.004038090211 KS 2 2 0 0 0 0 10 20271.054637533331 0.004038018798 KS 2 2 0 0 0 0 10 20271.065389528633 0.004037781044 KS 2 2 0 0 0 0 10 20271.112698333674 0.004036735430 KS 2 2 0 0 0 0 10 20271.141728726763 0.004036094426 KS 2 2 0 0 0 0 10 20271.143879131458 0.004036046975 KS 2 2 0 0 0 0 10 20271.144954333860 0.004036023210 KS 2 2 0 0 0 0 10 20271.152480722073 0.004035857136 KS 2 2 0 0 0 0 10 20271.165383122150 0.004035572426 KS 2 2 0 0 0 0 10 20271.193338327079 0.004034955731 KS 2 2 0 0 0 0 10 20271.225594327282 0.004034244757 KS 2 2 0 0 0 0 10 20271.227744732002 0.004034197336 KS 2 2 0 0 0 0 10 20271.234195932073 0.004034055137 KS 2 2 0 0 0 0 10 20271.237421524998 0.004033984085 KS 2 2 0 0 0 0 10 20271.256775125139 0.004033557827 KS 2 2 0 0 0 0 10 20271.271827929944 0.004033226383 KS 2 2 0 0 0 0 10 20271.275053522901 0.004033155322 KS 2 2 0 0 0 0 10 20271.282579925309 0.004032989715 KS 2 2 0 0 0 0 10 20271.290106327736 0.004032824064 KS 2 2 0 0 0 0 10 20271.297632730138 0.004032658452 KS 2 2 0 0 0 0 10 20271.304083930183 0.004032516509 KS 2 2 0 0 0 0 10 20271.305159132542 0.004032492875 KS 2 2 0 0 0 0 10 20271.313760723157 0.004032303659 KS 2 2 0 0 0 0 10 20271.318061532649 0.004032209038 KS 2 2 0 0 0 0 10 20271.337415132780 0.004031783471 KS 2 2 0 0 0 0 10 20271.339565523342 0.004031736265 KS 2 2 0 0 0 0 10 20271.348167128152 0.004031547204 KS 2 2 0 0 0 0 10 20271.357843935308 0.004031334578 KS 2 2 0 0 0 0 10 20271.387949530796 0.004030673201 KS 2 2 0 0 0 0 10 20271.410528723872 0.004030177495 KS 2 2 0 0 0 0 10 20271.411603926249 0.004030153939 KS 2 2 0 0 0 0 10 20271.415904735751 0.004030059439 KS 2 2 0 0 0 0 10 20271.419130328693 0.004029988685 KS 2 2 0 0 0 0 10 20271.451386328947 0.004029281090 KS 2 2 0 0 0 0 10 20271.453536733670 0.004029233917 KS 2 2 0 0 0 0 10 20271.459987933728 0.004029092484 KS 2 2 0 0 0 0 10 20271.462138324276 0.004029045350 KS 2 2 0 0 0 0 10 20271.467514321980 0.004028927442 KS 2 2 0 0 0 0 10 20271.470739929105 0.004028856723 KS 2 2 0 0 0 0 10 20271.473965522044 0.004028786032 KS 2 2 0 0 0 0 10 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