H1 CRD 2 2021 1 11 15 H2 HERL 7840 35 1 4 ILRS H3 hy2b 1808101 2208 43655 0 1 1 H4 0 2020 3 25 7 2 38 2020 3 25 7 8 15 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 2.280 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 25021.440000 1021.81 278.10 51.2 0 20 25375.680000 1021.85 278.10 51.1 0 20 25738.560000 1021.87 278.30 49.1 0 20 25920.000000 1021.85 278.50 49.5 0 41 22343.040000 0 KS 1676 1676 122.977 104295.5 0.0 26.0 0.320 -0.260 -9.0 2 0 0 1 na 41 27069.120000 0 KS 1240 1240 122.977 104287.5 0.0 24.7 0.150 -0.370 0.0 2 0 0 2 na 40 25526.880000 0 KS 2916 2916 122.977 104290.1 8.0 25.4 0.235 -0.315 -4.5 2 2 0 3 na 50 KS 38.6 0.309 -0.285 0.0 0 10 25354.482078810781 0.009969234433 KS 2 2 0 0 0 0 10 25356.141249218520 0.009913317151 KS 2 2 0 0 0 0 10 25356.583082417024 0.009898473202 KS 2 2 0 0 0 0 10 25356.584102805099 0.009898438930 KS 2 2 0 0 0 0 10 25356.615735218353 0.009897376974 KS 2 2 0 0 0 0 10 25356.618796410944 0.009897274187 KS 2 2 0 0 0 0 10 25356.836141609516 0.009889980204 KS 2 2 0 0 0 0 10 25356.846345617858 0.009889637934 KS 2 2 0 0 0 0 10 25356.847366005933 0.009889603710 KS 2 2 0 0 0 0 10 25356.852468017220 0.009889432538 KS 2 2 0 0 0 0 10 25356.865733218203 0.009888987582 KS 2 2 0 0 0 0 10 25356.868794410794 0.009888884831 KS 2 2 0 0 0 0 10 25356.917773605695 0.009887242049 KS 2 2 0 0 0 0 10 25356.933079611170 0.009886728662 KS 2 2 0 0 0 0 10 25356.951446809251 0.009886112653 KS 2 2 0 0 0 0 10 25356.959610013133 0.009885838887 KS 2 2 0 0 0 0 10 25356.970834409616 0.009885462502 KS 2 2 0 0 0 0 10 25356.974916004450 0.009885325602 KS 2 2 0 0 0 0 10 25356.980018015756 0.009885154523 KS 2 2 0 0 0 0 10 25356.986140415112 0.009884949169 KS 2 2 0 0 0 0 10 25357.007568805802 0.009884230677 KS 2 2 0 0 0 0 10 25357.050425615506 0.009882793775 KS 2 2 0 0 0 0 10 25357.053486808104 0.009882691086 KS 2 2 0 0 0 0 10 25357.056548014876 0.009882588439 KS 2 2 0 0 0 0 10 25357.088180413920 0.009881527975 KS 2 2 0 0 0 0 10 25357.089200816179 0.009881493832 KS 2 2 0 0 0 0 10 25357.097364005884 0.009881220191 KS 2 2 0 0 0 0 10 25357.102466017200 0.009881049121 KS 2 2 0 0 0 0 10 25357.136139206605 0.009879920422 KS 2 2 0 0 0 0 10 25357.140220815613 0.009879783653 KS 2 2 0 0 0 0 10 25357.147363617238 0.009879544297 KS 2 2 0 0 0 0 10 25357.174914407278 0.009878620907 KS 2 2 0 0 0 0 10 25357.189200010514 0.009878142183 KS 2 2 0 0 0 0 10 25357.225934406713 0.009876911144 KS 2 2 0 0 0 0 10 25357.232056806068 0.009876706020 KS 2 2 0 0 0 0 10 25357.257566805794 0.009875851226 KS 2 2 0 0 0 0 10 25357.261648414818 0.009875714591 KS 2 2 0 0 0 0 10 25357.275934018048 0.009875235857 KS 2 2 0 0 0 0 10 25357.290219607134 0.009874757248 KS 2 2 0 0 0 0 10 25357.322872408479 0.009873663372 KS 2 2 0 0 0 0 10 25357.331035612329 0.009873390000 KS 2 2 0 0 0 0 10 25357.346341617844 0.009872877210 KS 2 2 0 0 0 0 10 25357.420830812531 0.009870382355 KS 2 2 0 0 0 0 10 25357.448381616742 0.009869459777 KS 2 2 0 0 0 0 10 25357.482054806165 0.009868332331 KS 2 2 0 0 0 0 10 25357.499401616157 0.009867751548 KS 2 2 0 0 0 0 10 25357.512666817193 0.009867307360 KS 2 2 0 0 0 0 10 25357.537156414633 0.009866487513 KS 2 2 0 0 0 0 10 25357.542258411732 0.009866316685 KS 2 2 0 0 0 0 10 25357.552462405973 0.009865975126 KS 2 2 0 0 0 0 10 25357.553482808228 0.009865940994 KS 2 2 0 0 0 0 10 25357.581033612467 0.009865018695 KS 2 2 0 0 0 0 10 25357.582054014701 0.009864984604 KS 2 2 0 0 0 0 10 25357.626951614799 0.009863481892 KS 2 2 0 0 0 0 10 25357.658584013914 0.009862423334 KS 2 2 0 0 0 0 10 25357.696338812377 0.009861159989 KS 2 2 0 0 0 0 10 25357.699400004992 0.009861057481 KS 2 2 0 0 0 0 10 25357.701440809480 0.009860989245 KS 2 2 0 0 0 0 10 25357.714706010478 0.009860545369 KS 2 2 0 0 0 0 10 25357.739195607973 0.009859725999 KS 2 2 0 0 0 0 10 25357.740216010204 0.009859691900 KS 2 2 0 0 0 0 10 25357.755522015717 0.009859179893 KS 2 2 0 0 0 0 10 25357.758583208324 0.009859077428 KS 2 2 0 0 0 0 10 25357.768787216712 0.009858736117 KS 2 2 0 0 0 0 10 25357.772868811588 0.009858599601 KS 2 2 0 0 0 0 10 25357.774909616078 0.009858531333 KS 2 2 0 0 0 0 10 25357.791236009672 0.009857985119 KS 2 2 0 0 0 0 10 25357.805521612932 0.009857507243 KS 2 2 0 0 0 0 10 25357.815725607183 0.009857165943 KS 2 2 0 0 0 0 10 25357.816746009405 0.009857131850 KS 2 2 0 0 0 0 10 25357.821848006554 0.009856961120 KS 2 2 0 0 0 0 10 25357.826950017809 0.009856790530 KS 2 2 0 0 0 0 10 25357.833072417194 0.009856585733 KS 2 2 0 0 0 0 10 25357.869806813395 0.009855357211 KS 2 2 0 0 0 0 10 25357.872868005982 0.009855254832 KS 2 2 0 0 0 0 10 25357.909602416372 0.009854026496 KS 2 2 0 0 0 0 10 25357.914704413483 0.009853855774 KS 2 2 0 0 0 0 10 25357.916745218027 0.009853787557 KS 2 2 0 0 0 0 10 25357.919806410636 0.009853685175 KS 2 2 0 0 0 0 10 25357.950418407495 0.009852661653 KS 2 2 0 0 0 0 10 25357.967765217500 0.009852081711 KS 2 2 0 0 0 0 10 25357.976948809484 0.009851774654 KS 2 2 0 0 0 0 10 25357.981030418511 0.009851638235 KS 2 2 0 0 0 0 10 25358.007560806305 0.009850751357 KS 2 2 0 0 0 0 10 25358.017764814727 0.009850410321 KS 2 2 0 0 0 0 10 25358.026948406710 0.009850103345 KS 2 2 0 0 0 0 10 25358.027968808954 0.009850069157 KS 2 2 0 0 0 0 10 25358.033070806079 0.009849898720 KS 2 2 0 0 0 0 10 25358.085111207835 0.009848159241 KS 2 2 0 0 0 0 10 25358.102458017842 0.009847579601 KS 2 2 0 0 0 0 10 25358.116743606920 0.009847102173 KS 2 2 0 0 0 0 10 25358.120825215946 0.009846965756 KS 2 2 0 0 0 0 10 25358.142253606671 0.009846249772 KS 2 2 0 0 0 0 10 25358.146335215715 0.009846113294 KS 2 2 0 0 0 0 10 25358.150416810541 0.009845976999 KS 2 2 0 0 0 0 10 25358.152457615081 0.009845908761 KS 2 2 0 0 0 0 10 25358.155518807681 0.009845806441 KS 2 2 0 0 0 0 10 25358.162661609284 0.009845567881 KS 2 2 0 0 0 0 10 25358.165722816073 0.009845465572 KS 2 2 0 0 0 0 10 25358.170824813208 0.009845294987 KS 2 2 0 0 0 0 10 25358.173886005809 0.009845192780 KS 2 2 0 0 0 0 10 25358.174906408047 0.009845158758 KS 2 2 0 0 0 0 10 25358.177967614808 0.009845056441 KS 2 2 0 0 0 0 10 25358.180008405176 0.009844988267 KS 2 2 0 0 0 0 10 25358.184090014190 0.009844851866 KS 2 2 0 0 0 0 10 25358.195314410694 0.009844476781 KS 2 2 0 0 0 0 10 25358.205518404910 0.009844135979 KS 2 2 0 0 0 0 10 25358.207559209440 0.009844067764 KS 2 2 0 0 0 0 10 25358.231028404640 0.009843283841 KS 2 2 0 0 0 0 10 25358.235110013704 0.009843147361 KS 2 2 0 0 0 0 10 25358.236130415927 0.009843113390 KS 2 2 0 0 0 0 10 25358.257558806652 0.009842397575 KS 2 2 0 0 0 0 10 25358.264701608301 0.009842158968 KS 2 2 0 0 0 0 10 25358.270824007664 0.009841954505 KS 2 2 0 0 0 0 10 25358.282048418323 0.009841579591 KS 2 2 0 0 0 0 10 25358.289191205780 0.009841340973 KS 2 2 0 0 0 0 10 25358.299395214206 0.009841000249 KS 2 2 0 0 0 0 10 25358.323884811701 0.009840182307 KS 2 2 0 0 0 0 10 25358.352456018210 0.009839228213 KS 2 2 0 0 0 0 10 25358.355517210817 0.009839126086 KS 2 2 0 0 0 0 10 25358.366741607321 0.009838751155 KS 2 2 0 0 0 0 10 25358.410618805183 0.009837286241 KS 2 2 0 0 0 0 10 25358.411639207443 0.009837252160 KS 2 2 0 0 0 0 10 25358.442251218488 0.009836230149 KS 2 2 0 0 0 0 10 25358.448373617881 0.009836025754 KS 2 2 0 0 0 0 10 25358.484087611861 0.009834833586 KS 2 2 0 0 0 0 10 25358.519801605864 0.009833641515 KS 2 2 0 0 0 0 10 25358.526944407490 0.009833403158 KS 2 2 0 0 0 0 10 25358.541230010769 0.009832926441 KS 2 2 0 0 0 0 10 25358.549393214614 0.009832653973 KS 2 2 0 0 0 0 10 25358.550413616917 0.009832619903 KS 2 2 0 0 0 0 10 25358.557556418538 0.009832381503 KS 2 2 0 0 0 0 10 25358.558576806626 0.009832347510 KS 2 2 0 0 0 0 10 25358.560617611129 0.009832279408 KS 2 2 0 0 0 0 10 25358.568780815059 0.009832006939 KS 2 2 0 0 0 0 10 25358.571842007640 0.009831904753 KS 2 2 0 0 0 0 10 25358.577964407035 0.009831700500 KS 2 2 0 0 0 0 10 25358.598372409633 0.009831019566 KS 2 2 0 0 0 0 10 25358.601433616433 0.009830917390 KS 2 2 0 0 0 0 10 25358.631025211046 0.009829930072 KS 2 2 0 0 0 0 10 25358.632045613308 0.009829896051 KS 2 2 0 0 0 0 10 25358.657555613089 0.009829044909 KS 2 2 0 0 0 0 10 25358.665718816954 0.009828772607 KS 2 2 0 0 0 0 10 25358.684086015081 0.009828159901 KS 2 2 0 0 0 0 10 25358.698371618373 0.009827683350 KS 2 2 0 0 0 0 10 25358.746330411133 0.009826083703 KS 2 2 0 0 0 0 10 25358.747350813381 0.009826049682 KS 2 2 0 0 0 0 10 25358.764697609270 0.009825471203 KS 2 2 0 0 0 0 10 25358.765718011508 0.009825437143 KS 2 2 0 0 0 0 10 25358.802452407781 0.009824212167 KS 2 2 0 0 0 0 10 25358.895308814888 0.009821116154 KS 2 2 0 0 0 0 10 25359.024899618300 0.009816796940 KS 2 2 0 0 0 0 10 25359.059593210027 0.009815640921 KS 2 2 0 0 0 0 10 25359.088164416592 0.009814689003 KS 2 2 0 0 0 0 10 25359.095307218252 0.009814450988 KS 2 2 0 0 0 0 10 25359.116735608995 0.009813737128 KS 2 2 0 0 0 0 10 25359.130000809992 0.009813295263 KS 2 2 0 0 0 0 10 25359.138164013919 0.009813023301 KS 2 2 0 0 0 0 10 25359.150408812683 0.009812615529 KS 2 2 0 0 0 0 10 25359.165714818211 0.009812105650 KS 2 2 0 0 0 0 10 25359.237142806257 0.009809726719 KS 2 2 0 0 0 0 10 25359.258571211178 0.009809013175 KS 2 2 0 0 0 0 10 25359.324897216297 0.009806804850 KS 2 2 0 0 0 0 10 25359.331019615687 0.009806600972 KS 2 2 0 0 0 0 10 25359.332040017931 0.009806567049 KS 2 2 0 0 0 0 10 25359.334080808289 0.009806499086 KS 2 2 0 0 0 0 10 25359.356529615458 0.009805751787 KS 2 2 0 0 0 0 10 25359.392243609527 0.009804562976 KS 2 2 0 0 0 0 10 25359.398366008898 0.009804359267 KS 2 2 0 0 0 0 10 25359.407549615053 0.009804053587 KS 2 2 0 0 0 0 10 25359.422855606421 0.009803544218 KS 2 2 0 0 0 0 10 25359.469794011127 0.009801982077 KS 2 2 0 0 0 0 10 25359.472855217915 0.009801880286 KS 2 2 0 0 0 0 10 25359.509589614207 0.009800657896 KS 2 2 0 0 0 0 10 25359.510610016468 0.009800624034 KS 2 2 0 0 0 0 10 25359.514691611350 0.009800488163 KS 2 2 0 0 0 0 10 25359.524895605571 0.009800148678 KS 2 2 0 0 0 0 10 25359.526936410115 0.009800080757 KS 2 2 0 0 0 0 10 25359.532038407222 0.009799910993 KS 2 2 0 0 0 0 10 25359.549385217278 0.009799333948 KS 2 2 0 0 0 0 10 25359.557548407041 0.009799062436 KS 2 2 0 0 0 0 10 25359.563670806427 0.009798858632 KS 2 2 0 0 0 0 10 25359.594282817512 0.009797840325 KS 2 2 0 0 0 0 10 25359.608568406608 0.009797365254 KS 2 2 0 0 0 0 10 25359.645302817094 0.009796143424 KS 2 2 0 0 0 0 10 25359.679996408898 0.009794989576 KS 2 2 0 0 0 0 10 25359.684078017916 0.009794853872 KS 2 2 0 0 0 0 10 25359.690200417285 0.009794650301 KS 2 2 0 0 0 0 10 25359.710608405808 0.009793971651 KS 2 2 0 0 0 0 10 25359.717751207437 0.009793734182 KS 2 2 0 0 0 0 10 25359.751424411138 0.009792614626 KS 2 2 0 0 0 0 10 25359.762648807661 0.009792241437 KS 2 2 0 0 0 0 10 25359.835097212215 0.009789833103 KS 2 2 0 0 0 0 10 25359.874892815288 0.009788510463 KS 2 2 0 0 0 0 10 25359.884076407279 0.009788205218 KS 2 2 0 0 0 0 10 25359.889178404415 0.009788035644 KS 2 2 0 0 0 0 10 25359.947341205656 0.009786102915 KS 2 2 0 0 0 0 10 25359.977953216762 0.009785085910 KS 2 2 0 0 0 0 10 25359.994279610399 0.009784543450 KS 2 2 0 0 0 0 10 25359.999381607526 0.009784373974 KS 2 2 0 0 0 0 10 25360.009585615951 0.009784035026 KS 2 2 0 0 0 0 10 25360.016728417619 0.009783797694 KS 2 2 0 0 0 0 10 25360.017748805696 0.009783763789 KS 2 2 0 0 0 0 10 25360.049381204891 0.009782713075 KS 2 2 0 0 0 0 10 25360.066728014950 0.009782136886 KS 2 2 0 0 0 0 10 25360.082034006330 0.009781628539 KS 2 2 0 0 0 0 10 25360.094278805110 0.009781221862 KS 2 2 0 0 0 0 10 25360.141217209886 0.009779663096 KS 2 2 0 0 0 0 10 25360.144278416643 0.009779561476 KS 2 2 0 0 0 0 10 25360.150400816037 0.009779358157 KS 2 2 0 0 0 0 10 25360.171829206817 0.009778646704 KS 2 2 0 0 0 0 10 25360.206522812829 0.009777494757 KS 2 2 0 0 0 0 10 25360.244277611381 0.009776241488 KS 2 2 0 0 0 0 10 25360.249379608540 0.009776072034 KS 2 2 0 0 0 0 10 25360.258563214691 0.009775767342 KS 2 2 0 0 0 0 10 25360.266726404434 0.009775496330 KS 2 2 0 0 0 0 10 25360.327950412512 0.009773464346 KS 2 2 0 0 0 0 10 25360.344276806173 0.009772922444 KS 2 2 0 0 0 0 10 25360.378970412169 0.009771771261 KS 2 2 0 0 0 0 10 25360.414684406242 0.009770586311 KS 2 2 0 0 0 0 10 25360.461622810999 0.009769029123 KS 2 2 0 0 0 0 10 25360.479990009181 0.009768419952 KS 2 2 0 0 0 0 10 25360.485092006323 0.009768250640 KS 2 2 0 0 0 0 10 25360.550397609267 0.009766084673 KS 2 2 0 0 0 0 10 25360.561622005810 0.009765712439 KS 2 2 0 0 0 0 10 25360.564683212604 0.009765610918 KS 2 2 0 0 0 0 10 25360.568764807447 0.009765475629 KS 2 2 0 0 0 0 10 25360.652437608587 0.009762701343 KS 2 2 0 0 0 0 10 25360.673866013538 0.009761991021 KS 2 2 0 0 0 0 10 25360.711620812197 0.009760739442 KS 2 2 0 0 0 0 10 25360.763661214110 0.009759014706 KS 2 2 0 0 0 0 10 25360.774885610630 0.009758642742 KS 2 2 0 0 0 0 10 25360.781008010021 0.009758439804 KS 2 2 0 0 0 0 10 25360.809579216647 0.009757493044 KS 2 2 0 0 0 0 10 25360.814681213770 0.009757324002 KS 2 2 0 0 0 0 10 25360.861619604408 0.009755768772 KS 2 2 0 0 0 0 10 25360.866721615712 0.009755599842 KS 2 2 0 0 0 0 10 25360.879986816790 0.009755160334 KS 2 2 0 0 0 0 10 25360.884068411616 0.009755025130 KS 2 2 0 0 0 0 10 25360.915700810856 0.009753977289 KS 2 2 0 0 0 0 10 25360.942231212963 0.009753098534 KS 2 2 0 0 0 0 10 25360.960598411147 0.009752490259 KS 2 2 0 0 0 0 10 25360.987128813261 0.009751611542 KS 2 2 0 0 0 0 10 25361.020802017030 0.009750496479 KS 2 2 0 0 0 0 10 25361.040189617446 0.009749854530 KS 2 2 0 0 0 0 10 25361.107536010810 0.009747624905 KS 2 2 0 0 0 0 10 25361.250392015650 0.009742896919 KS 2 2 0 0 0 0 10 25361.366717618384 0.009739048567 KS 2 2 0 0 0 0 10 25361.371819615496 0.009738879831 KS 2 2 0 0 0 0 10 25361.397329615364 0.009738036101 KS 2 2 0 0 0 0 10 25361.420798810678 0.009737259953 KS 2 2 0 0 0 0 10 25361.549369212265 0.009733008979 KS 2 2 0 0 0 0 10 25361.563654815574 0.009732536812 KS 2 2 0 0 0 0 10 25361.591205605788 0.009731626104 KS 2 2 0 0 0 0 10 25361.639164412940 0.009730041043 KS 2 2 0 0 0 0 10 25361.726918809031 0.009727141490 KS 2 2 0 0 0 0 10 25361.817734411968 0.009724141596 KS 2 2 0 0 0 0 10 25361.897325618374 0.009721513234 KS 2 2 0 0 0 0 10 25361.905488808145 0.009721243687 KS 2 2 0 0 0 0 10 25361.908550014942 0.009721142553 KS 2 2 0 0 0 0 10 25361.923856006356 0.009720637206 KS 2 2 0 0 0 0 10 25362.034059209795 0.009716999331 KS 2 2 0 0 0 0 10 25362.055487614806 0.009716292139 KS 2 2 0 0 0 0 10 25362.089160804452 0.009715180865 KS 2 2 0 0 0 0 10 25362.110589209448 0.009714473828 KS 2 2 0 0 0 0 10 25362.124874812744 0.009714002504 KS 2 2 0 0 0 0 10 25362.163650013706 0.009712723221 KS 2 2 0 0 0 0 10 25362.219772010623 0.009710871869 KS 2 2 0 0 0 0 10 25362.245282010515 0.009710030437 KS 2 2 0 0 0 0 10 25362.270792010390 0.009709189101 KS 2 2 0 0 0 0 10 25362.292220415388 0.009708482443 KS 2 2 0 0 0 0 10 25362.316710013020 0.009707674894 KS 2 2 0 0 0 0 10 25362.327934409584 0.009707304842 KS 2 2 0 0 0 0 10 25362.343240415192 0.009706800088 KS 2 2 0 0 0 0 10 25362.353444409474 0.009706463682 KS 2 2 0 0 0 0 10 25362.444260012484 0.009703469908 KS 2 2 0 0 0 0 10 25362.449362009611 0.009703301807 KS 2 2 0 0 0 0 10 25362.551402009204 0.009699939048 KS 2 2 0 0 0 0 10 25362.566708014817 0.009699434787 KS 2 2 0 0 0 0 10 25362.596299609567 0.009698459834 KS 2 2 0 0 0 0 10 25362.613646405534 0.009697888427 KS 2 2 0 0 0 0 10 25362.620789207217 0.009697653145 KS 2 2 0 0 0 0 10 25362.687115212619 0.009695468557 KS 2 2 0 0 0 0 10 25362.698339609206 0.009695098792 KS 2 2 0 0 0 0 10 25362.742216807300 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0.011066994522 KS 2 2 0 0 0 0 10 25698.974311605986 0.011067626646 KS 2 2 0 0 0 0 H8 H9