H1 CRD 2 2020 12 31 14 H2 HERL 7840 35 1 4 ILRS H3 swarmb 1306701 8008 39451 0 1 1 H4 0 2020 12 31 8 24 34 2020 12 31 8 26 44 1 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 2.285 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 30119.040000 1000.59 271.90 98.7 0 20 30481.920000 1000.61 271.80 98.7 0 41 28935.360000 0 KS 3895 3895 122.977 104440.3 0.0 22.7 0.180 -0.280 1.0 2 0 0 1 na 41 30473.280000 0 KS 2012 2012 122.977 104446.3 0.0 22.0 0.040 -0.380 3.0 2 0 0 2 na 40 30339.360000 0 KS 5907 5907 122.977 104445.7 -6.0 22.3 0.110 -0.330 2.0 2 2 0 3 na 50 KS 29.4 0.157 -0.276 3.0 0 10 30272.641339729370 0.004064164413 KS 2 2 0 0 0 0 10 30272.659424323097 0.004063814989 KS 2 2 0 0 0 0 10 30272.672189921171 0.004063568457 KS 2 2 0 0 0 0 10 30272.678572727303 0.004063445197 KS 2 2 0 0 0 0 10 30272.683891722991 0.004063342567 KS 2 2 0 0 0 0 10 30272.688146922316 0.004063260382 KS 2 2 0 0 0 0 10 30272.692402121706 0.004063178244 KS 2 2 0 0 0 0 10 30272.698784927841 0.004063055133 KS 2 2 0 0 0 0 10 30272.704103923482 0.004062952416 KS 2 2 0 0 0 0 10 30272.718997128376 0.004062665045 KS 2 2 0 0 0 0 10 30272.734954129509 0.004062357359 KS 2 2 0 0 0 0 10 30272.741336921475 0.004062234337 KS 2 2 0 0 0 0 10 30272.751974926923 0.004062029319 KS 2 2 0 0 0 0 10 30272.753038723245 0.004062008782 KS 2 2 0 0 0 0 10 30272.758357733077 0.004061906277 KS 2 2 0 0 0 0 10 30272.760485325688 0.004061865268 KS 2 2 0 0 0 0 10 30272.762612932435 0.004061824373 KS 2 2 0 0 0 0 10 30272.766868131813 0.004061742304 KS 2 2 0 0 0 0 10 30272.778569933598 0.004061516947 KS 2 2 0 0 0 0 10 30272.779633729904 0.004061496410 KS 2 2 0 0 0 0 10 30272.780697526174 0.004061475980 KS 2 2 0 0 0 0 10 30272.783888929230 0.004061414480 KS 2 2 0 0 0 0 10 30272.786016521859 0.004061373512 KS 2 2 0 0 0 0 10 30272.809420125398 0.004060923065 KS 2 2 0 0 0 0 10 30272.816866727848 0.004060779805 KS 2 2 0 0 0 0 10 30272.817930524161 0.004060759356 KS 2 2 0 0 0 0 10 30272.818994334589 0.004060738815 KS 2 2 0 0 0 0 10 30272.820058130899 0.004060718317 KS 2 2 0 0 0 0 10 30272.831759932689 0.004060493277 KS 2 2 0 0 0 0 10 30272.834951321585 0.004060431914 KS 2 2 0 0 0 0 10 30272.836015132071 0.004060411382 KS 2 2 0 0 0 0 10 30272.839206520961 0.004060350037 KS 2 2 0 0 0 0 10 30272.841334127721 0.004060309097 KS 2 2 0 0 0 0 10 30272.846653123395 0.004060206858 KS 2 2 0 0 0 0 10 30272.848780730145 0.004060165961 KS 2 2 0 0 0 0 10 30272.857291128865 0.004060002403 KS 2 2 0 0 0 0 10 30272.860482531923 0.004059941046 KS 2 2 0 0 0 0 10 30272.867929134352 0.004059797975 KS 2 2 0 0 0 0 10 30272.886013728099 0.004059450574 KS 2 2 0 0 0 0 10 30272.889205131165 0.004059389231 KS 2 2 0 0 0 0 10 30272.891332723785 0.004059348344 KS 2 2 0 0 0 0 10 30272.894524126841 0.004059287103 KS 2 2 0 0 0 0 10 30272.895587923132 0.004059266668 KS 2 2 0 0 0 0 10 30272.899843122499 0.004059184957 KS 2 2 0 0 0 0 10 30272.901970729244 0.004059144160 KS 2 2 0 0 0 0 10 30272.903034525551 0.004059123764 KS 2 2 0 0 0 0 10 30272.905162132309 0.004059082902 KS 2 2 0 0 0 0 10 30272.906225928619 0.004059062449 KS 2 2 0 0 0 0 10 30272.907289724935 0.004059042019 KS 2 2 0 0 0 0 10 30272.910481127994 0.004058980735 KS 2 2 0 0 0 0 10 30272.914736327320 0.004058899109 KS 2 2 0 0 0 0 10 30272.922182929782 0.004058756195 KS 2 2 0 0 0 0 10 30272.923246726084 0.004058735755 KS 2 2 0 0 0 0 10 30272.927501925413 0.004058654154 KS 2 2 0 0 0 0 10 30272.941331333985 0.004058388837 KS 2 2 0 0 0 0 10 30272.950905529001 0.004058205268 KS 2 2 0 0 0 0 10 30272.956224524644 0.004058103324 KS 2 2 0 0 0 0 10 30272.963671127103 0.004057960488 KS 2 2 0 0 0 0 10 30272.964734923412 0.004057940164 KS 2 2 0 0 0 0 10 30272.971117729543 0.004057817810 KS 2 2 0 0 0 0 10 30272.973245322130 0.004057777040 KS 2 2 0 0 0 0 10 30272.975372928885 0.004057736276 KS 2 2 0 0 0 0 10 30272.988138526966 0.004057491709 KS 2 2 0 0 0 0 10 30272.992393726335 0.004057410180 KS 2 2 0 0 0 0 10 30273.011542130549 0.004057043554 KS 2 2 0 0 0 0 10 30273.012605926868 0.004057023186 KS 2 2 0 0 0 0 10 30273.018988733003 0.004056900952 KS 2 2 0 0 0 0 10 30273.020052529263 0.004056880668 KS 2 2 0 0 0 0 10 30273.022180121889 0.004056839923 KS 2 2 0 0 0 0 10 30273.024307728628 0.004056799232 KS 2 2 0 0 0 0 10 30273.036009530413 0.004056575292 KS 2 2 0 0 0 0 10 30273.037073326730 0.004056554916 KS 2 2 0 0 0 0 10 30273.039200933488 0.004056514263 KS 2 2 0 0 0 0 10 30273.040264729795 0.004056493884 KS 2 2 0 0 0 0 10 30273.048775128514 0.004056331107 KS 2 2 0 0 0 0 10 30273.054094124183 0.004056229400 KS 2 2 0 0 0 0 10 30273.056221730944 0.004056188757 KS 2 2 0 0 0 0 10 30273.067923532726 0.004055964971 KS 2 2 0 0 0 0 10 30273.079625334537 0.004055741295 KS 2 2 0 0 0 0 10 30273.088135733240 0.004055578720 KS 2 2 0 0 0 0 10 30273.096646131967 0.004055416155 KS 2 2 0 0 0 0 10 30273.101965127652 0.004055314559 KS 2 2 0 0 0 0 10 30273.104092734395 0.004055273922 KS 2 2 0 0 0 0 10 30273.115794522025 0.004055050547 KS 2 2 0 0 0 0 10 30273.118985925084 0.004054989481 KS 2 2 0 0 0 0 10 30273.128560134258 0.004054806786 KS 2 2 0 0 0 0 10 30273.133879129944 0.004054705230 KS 2 2 0 0 0 0 10 30273.137070533022 0.004054644317 KS 2 2 0 0 0 0 10 30273.139198125604 0.004054603761 KS 2 2 0 0 0 0 10 30273.148772334783 0.004054421112 KS 2 2 0 0 0 0 10 30273.150899927374 0.004054380508 KS 2 2 0 0 0 0 10 30273.153027534156 0.004054339884 KS 2 2 0 0 0 0 10 30273.155155126741 0.004054299373 KS 2 2 0 0 0 0 10 30273.170048331590 0.004054015407 KS 2 2 0 0 0 0 10 30273.171112127897 0.004053995093 KS 2 2 0 0 0 0 10 30273.172175924205 0.004053974785 KS 2 2 0 0 0 0 10 30273.174303530954 0.004053934265 KS 2 2 0 0 0 0 10 30273.176431123552 0.004053893688 KS 2 2 0 0 0 0 10 30273.181750133409 0.004053792268 KS 2 2 0 0 0 0 10 30273.187069129042 0.004053690930 KS 2 2 0 0 0 0 10 30273.189196721648 0.004053650391 KS 2 2 0 0 0 0 10 30273.197707134540 0.004053488170 KS 2 2 0 0 0 0 10 30273.200898523458 0.004053427361 KS 2 2 0 0 0 0 10 30273.215791728294 0.004053143744 KS 2 2 0 0 0 0 10 30273.226429733799 0.004052941160 KS 2 2 0 0 0 0 10 30273.228557326371 0.004052900714 KS 2 2 0 0 0 0 10 30273.233876322034 0.004052799424 KS 2 2 0 0 0 0 10 30273.244514327513 0.004052597011 KS 2 2 0 0 0 0 10 30273.246641934279 0.004052556535 KS 2 2 0 0 0 0 10 30273.247705730589 0.004052536249 KS 2 2 0 0 0 0 10 30273.256216129316 0.004052374353 KS 2 2 0 0 0 0 10 30273.260471328675 0.004052293443 KS 2 2 0 0 0 0 10 30273.266854134809 0.004052172062 KS 2 2 0 0 0 0 10 30273.271109334184 0.004052091135 KS 2 2 0 0 0 0 10 30273.275364533531 0.004052010221 KS 2 2 0 0 0 0 10 30273.276428329832 0.004051990031 KS 2 2 0 0 0 0 10 30273.309406128449 0.004051363258 KS 2 2 0 0 0 0 10 30273.321107930210 0.004051141024 KS 2 2 0 0 0 0 10 30273.330682125223 0.004050959243 KS 2 2 0 0 0 0 10 30273.338128727676 0.004050817838 KS 2 2 0 0 0 0 10 30273.342383927028 0.004050737077 KS 2 2 0 0 0 0 10 30273.344511533804 0.004050696720 KS 2 2 0 0 0 0 10 30273.346639126380 0.004050656316 KS 2 2 0 0 0 0 10 30273.350894325771 0.004050575549 KS 2 2 0 0 0 0 10 30273.354085728827 0.004050515022 KS 2 2 0 0 0 0 10 30273.370042729985 0.004050212311 KS 2 2 0 0 0 0 10 30273.388127323711 0.004049869354 KS 2 2 0 0 0 0 10 30273.403020528551 0.004049587140 KS 2 2 0 0 0 0 10 30273.410467130978 0.004049446077 KS 2 2 0 0 0 0 10 30273.432806924096 0.004049022914 KS 2 2 0 0 0 0 10 30273.451955328315 0.004048660420 KS 2 2 0 0 0 0 10 30273.457274323968 0.004048559705 KS 2 2 0 0 0 0 10 30273.493443525623 0.004047875672 KS 2 2 0 0 0 0 10 30273.494507321928 0.004047855560 KS 2 2 0 0 0 0 10 30273.497698725002 0.004047795211 KS 2 2 0 0 0 0 10 30273.513655726152 0.004047493653 KS 2 2 0 0 0 0 10 30273.520038532276 0.004047373065 KS 2 2 0 0 0 0 10 30273.531740334046 0.004047152051 KS 2 2 0 0 0 0 10 30273.538123125998 0.004047031525 KS 2 2 0 0 0 0 10 30273.562590525859 0.004046569663 KS 2 2 0 0 0 0 10 30273.565781928935 0.004046509425 KS 2 2 0 0 0 0 10 30273.581738930088 0.004046208457 KS 2 2 0 0 0 0 10 30273.592376921408 0.004046007819 KS 2 2 0 0 0 0 10 30273.599823523848 0.004045867389 KS 2 2 0 0 0 0 10 30273.601951130600 0.004045827299 KS 2 2 0 0 0 0 10 30273.617908131760 0.004045526577 KS 2 2 0 0 0 0 10 30273.629609933528 0.004045306134 KS 2 2 0 0 0 0 10 30273.637056521796 0.004045165862 KS 2 2 0 0 0 0 10 30273.649822134052 0.004044925454 KS 2 2 0 0 0 0 10 30273.662587732139 0.004044685171 KS 2 2 0 0 0 0 10 30273.676417126532 0.004044424917 KS 2 2 0 0 0 0 10 30273.681736122186 0.004044324906 KS 2 2 0 0 0 0 10 30273.703012133150 0.004043924780 KS 2 2 0 0 0 0 10 30273.710458721407 0.004043784820 KS 2 2 0 0 0 0 10 30273.753010729205 0.004042985448 KS 2 2 0 0 0 0 10 30273.806200728295 0.004041987440 KS 2 2 0 0 0 0 10 30273.825349132518 0.004041628517 KS 2 2 0 0 0 0 10 30273.828540521408 0.004041568770 KS 2 2 0 0 0 0 10 30273.835987123853 0.004041429191 KS 2 2 0 0 0 0 10 30273.857263134812 0.004041030753 KS 2 2 0 0 0 0 10 30273.915772129566 0.004039936144 KS 2 2 0 0 0 0 10 30273.946622321401 0.004039359705 KS 2 2 0 0 0 0 10 30273.973217328054 0.004038863143 KS 2 2 0 0 0 0 10 30273.993429528538 0.004038485943 KS 2 2 0 0 0 0 10 30274.028534933901 0.004037831351 KS 2 2 0 0 0 0 10 30274.033853929577 0.004037732208 KS 2 2 0 0 0 0 10 30274.079597326240 0.004036880310 KS 2 2 0 0 0 0 10 30274.151935729559 0.004035535275 KS 2 2 0 0 0 0 10 30274.201934325601 0.004034607133 KS 2 2 0 0 0 0 10 30274.282783127642 0.004033108974 KS 2 2 0 0 0 0 10 30274.321079921891 0.004032400508 KS 2 2 0 0 0 0 10 30274.424268531165 0.004030495227 KS 2 2 0 0 0 0 10 30274.427459934220 0.004030436400 KS 2 2 0 0 0 0 10 30274.429587526846 0.004030397106 KS 2 2 0 0 0 0 10 30274.443416921207 0.004030142266 KS 2 2 0 0 0 0 10 30274.459373922352 0.004029848196 KS 2 2 0 0 0 0 10 30274.468948131542 0.004029671851 KS 2 2 0 0 0 0 10 30274.489160332065 0.004029299760 KS 2 2 0 0 0 0 10 30274.577455722311 0.004027676581 KS 2 2 0 0 0 0 10 30274.596604126539 0.004027325088 KS 2 2 0 0 0 0 10 30274.604050728954 0.004027188505 KS 2 2 0 0 0 0 10 30274.625326725761 0.004026798258 KS 2 2 0 0 0 0 10 30274.631709531884 0.004026681172 KS 2 2 0 0 0 0 10 30274.714685926507 0.004025161624 KS 2 2 0 0 0 0 10 30274.742344729474 0.004024655977 KS 2 2 0 0 0 0 10 30274.744472322055 0.004024616991 KS 2 2 0 0 0 0 10 30274.784896723042 0.004023878604 KS 2 2 0 0 0 0 10 30274.792343325472 0.004023742652 KS 2 2 0 0 0 0 10 30274.821065924698 0.004023218684 KS 2 2 0 0 0 0 10 30274.822129721021 0.004023199208 KS 2 2 0 0 0 0 10 30274.882766322530 0.004022094265 KS 2 2 0 0 0 0 10 30274.888085332330 0.004021997486 KS 2 2 0 0 0 0 10 30274.889149128664 0.004021978078 KS 2 2 0 0 0 0 10 30274.894468124297 0.004021881367 KS 2 2 0 0 0 0 10 30274.996592923107 0.004020025211 KS 2 2 0 0 0 0 10 30275.001911932939 0.004019928651 KS 2 2 0 0 0 0 10 30275.037017324118 0.004019291951 KS 2 2 0 0 0 0 10 30275.073186525760 0.004018636599 KS 2 2 0 0 0 0 10 30275.115738533556 0.004017866411 KS 2 2 0 0 0 0 10 30275.263606729010 0.004015197329 KS 2 2 0 0 0 0 10 30275.271053331432 0.004015063225 KS 2 2 0 0 0 0 10 30275.379560922202 0.004013112100 KS 2 2 0 0 0 0 10 30275.432750921284 0.004012157847 KS 2 2 0 0 0 0 10 30275.485940934531 0.004011205086 KS 2 2 0 0 0 0 10 30275.504025528266 0.004010881454 KS 2 2 0 0 0 0 10 30275.604022734498 0.004009095134 KS 2 2 0 0 0 0 10 30275.712530325241 0.004007162392 KS 2 2 0 0 0 0 10 30275.718913131366 0.004007048903 KS 2 2 0 0 0 0 10 30275.743380531205 0.004006614041 KS 2 2 0 0 0 0 10 30275.752954726209 0.004006443970 KS 2 2 0 0 0 0 10 30275.771039334120 0.004006122827 KS 2 2 0 0 0 0 10 30275.823165522734 0.004005198102 KS 2 2 0 0 0 0 10 30275.824229333218 0.004005179220 KS 2 2 0 0 0 0 10 30275.834867324492 0.004004990767 KS 2 2 0 0 0 0 10 30275.946566332468 0.004003014650 KS 2 2 0 0 0 0 10 30276.059329122569 0.004001026098 KS 2 2 0 0 0 0 10 30276.077413730463 0.004000707811 KS 2 2 0 0 0 0 10 30276.095498324212 0.004000389757 KS 2 2 0 0 0 0 10 30276.146560730690 0.003999492316 KS 2 2 0 0 0 0 10 30276.179538529230 0.003998913584 KS 2 2 0 0 0 0 10 30276.200814526045 0.003998540414 KS 2 2 0 0 0 0 10 30276.211452531504 0.003998353954 KS 2 2 0 0 0 0 10 30276.228473328929 0.003998055789 KS 2 2 0 0 0 0 10 30276.233792324575 0.003997962586 KS 2 2 0 0 0 0 10 30276.414638332743 0.003994803488 KS 2 2 0 0 0 0 10 30276.425276324035 0.003994618187 KS 2 2 0 0 0 0 10 30276.426340134499 0.003994599695 KS 2 2 0 0 0 0 10 30276.460381729376 0.003994007111 KS 2 2 0 0 0 0 10 30276.549740930038 0.003992454541 KS 2 2 0 0 0 0 10 30276.568889334225 0.003992122406 KS 2 2 0 0 0 0 10 30276.573144533587 0.003992048618 KS 2 2 0 0 0 0 10 30276.633781120885 0.003990998164 KS 2 2 0 0 0 0 10 30276.745480128820 0.003989068181 KS 2 2 0 0 0 0 10 30276.751862920770 0.003988958063 KS 2 2 0 0 0 0 10 30276.830584130128 0.003987602051 KS 2 2 0 0 0 0 10 30276.916751927754 0.003986121386 KS 2 2 0 0 0 0 10 30277.059301127498 0.003983680484 KS 2 2 0 0 0 0 10 30277.094406532844 0.003983080952 KS 2 2 0 0 0 0 10 30277.134830933787 0.003982391476 KS 2 2 0 0 0 0 10 30277.191212321738 0.003981431200 KS 2 2 0 0 0 0 10 30277.265678331744 0.003980165421 KS 2 2 0 0 0 0 10 30277.267805924338 0.003980129288 KS 2 2 0 0 0 0 10 30277.300783722904 0.003979569715 KS 2 2 0 0 0 0 10 30277.338016720810 0.003978938618 KS 2 2 0 0 0 0 10 30277.882682323541 0.003969789685 KS 2 2 0 0 0 0 10 30278.180546320977 0.003964852573 KS 2 2 0 0 0 0 10 30278.209268934336 0.003964378958 KS 2 2 0 0 0 0 10 30278.352881930308 0.003962017520 KS 2 2 0 0 0 0 10 30278.533727924217 0.003959059382 KS 2 2 0 0 0 0 10 30278.535855530966 0.003959024688 KS 2 2 0 0 0 0 10 30278.562450523422 0.003958591143 KS 2 2 0 0 0 0 10 30278.622023328555 0.003957621487 KS 2 2 0 0 0 0 10 30278.627342324190 0.003957535058 KS 2 2 0 0 0 0 10 30278.681596133715 0.003956653644 KS 2 2 0 0 0 0 10 30278.725211923575 0.003955946244 KS 2 2 0 0 0 0 10 30278.749679323383 0.003955549881 KS 2 2 0 0 0 0 10 30278.795422734186 0.003954809601 KS 2 2 0 0 0 0 10 30278.798614123071 0.003954758056 KS 2 2 0 0 0 0 10 30278.822017726597 0.003954379822 KS 2 2 0 0 0 0 10 30278.866697326911 0.003953658561 KS 2 2 0 0 0 0 10 30278.985842923031 0.003951740415 KS 2 2 0 0 0 0 10 30279.081584929776 0.003950204435 KS 2 2 0 0 0 0 10 30279.109243732662 0.003949761702 KS 2 2 0 0 0 0 10 30279.542210327233 0.003942883745 KS 2 2 0 0 0 0 10 30279.608165924302 0.003941844887 KS 2 2 0 0 0 0 10 30279.611357327352 0.003941794685 KS 2 2 0 0 0 0 10 30279.613484934114 0.003941761206 KS 2 2 0 0 0 0 10 30279.620931522359 0.003941644063 KS 2 2 0 0 0 0 10 30279.657100723976 0.003941075578 KS 2 2 0 0 0 0 10 30279.717737325400 0.003940124162 KS 2 2 0 0 0 0 10 30279.742204725221 0.003939740795 KS 2 2 0 0 0 0 10 30279.747523720866 0.003939657548 KS 2 2 0 0 0 0 10 30279.847520926960 0.003938094445 KS 2 2 0 0 0 0 10 30279.856031325656 0.003937961646 KS 2 2 0 0 0 0 10 30279.860286525010 0.003937895261 KS 2 2 0 0 0 0 10 30279.956028531732 0.003936404422 KS 2 2 0 0 0 0 10 30280.104960523276 0.003934095200 KS 2 2 0 0 0 0 10 30280.132619326166 0.003933667608 KS 2 2 0 0 0 0 10 30280.196447330635 0.003932682565 KS 2 2 0 0 0 0 10 30280.482609526076 0.003928293574 KS 2 2 0 0 0 0 10 30280.510268328951 0.003927871708 KS 2 2 0 0 0 0 10 30280.526225330064 0.003927628544 KS 2 2 0 0 0 0 10 30280.547501326856 0.003927304461 KS 2 2 0 0 0 0 10 30280.552820322488 0.003927223505 KS 2 2 0 0 0 0 10 30280.576223926042 0.003926867379 KS 2 2 0 0 0 0 10 30280.729411131076 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