H1 CRD 2 2021 5 20 21 H2 HERL 7840 35 1 4 ILRS H3 swarma 1306702 8007 39452 0 1 1 H4 0 2021 5 20 20 50 12 2021 5 20 20 51 12 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 0.383 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 74640.960000 1003.60 284.10 83.1 0 20 75116.160000 1003.47 284.00 83.1 0 41 72817.920000 0 KS 2368 2368 122.977 104440.9 0.0 21.3 0.220 -0.290 -2.0 2 0 0 1 na 41 76567.680000 0 KS 3556 3556 122.977 104438.9 0.0 22.0 0.220 -0.280 -5.0 2 0 0 2 na 40 75042.720000 0 KS 5924 5924 122.977 104439.7 2.0 21.7 0.220 -0.285 -3.5 2 2 0 3 na 50 KS 27.5 0.118 -0.251 3.0 0 10 75011.563006814932 0.004571946806 KS 2 2 0 0 0 0 10 75011.567006820982 0.004571993537 KS 2 2 0 0 0 0 10 75011.581006813824 0.004572157242 KS 2 2 0 0 0 0 10 75011.585006819896 0.004572203945 KS 2 2 0 0 0 0 10 75011.589006825952 0.004572250739 KS 2 2 0 0 0 0 10 75011.600006821353 0.004572379421 KS 2 2 0 0 0 0 10 75011.606006816257 0.004572449642 KS 2 2 0 0 0 0 10 75011.609006813705 0.004572484790 KS 2 2 0 0 0 0 10 75011.622006826307 0.004572637025 KS 2 2 0 0 0 0 10 75011.627006826778 0.004572695637 KS 2 2 0 0 0 0 10 75011.631006818677 0.004572742468 KS 2 2 0 0 0 0 10 75011.670006813971 0.004573199829 KS 2 2 0 0 0 0 10 75011.690006815916 0.004573434708 KS 2 2 0 0 0 0 10 75011.696006824996 0.004573505206 KS 2 2 0 0 0 0 10 75011.716006826930 0.004573740283 KS 2 2 0 0 0 0 10 75011.718006815787 0.004573763805 KS 2 2 0 0 0 0 10 75011.731006814240 0.004573916798 KS 2 2 0 0 0 0 10 75011.743006818237 0.004574058000 KS 2 2 0 0 0 0 10 75011.747006824292 0.004574105077 KS 2 2 0 0 0 0 10 75011.750006821732 0.004574140427 KS 2 2 0 0 0 0 10 75011.760006822723 0.004574258209 KS 2 2 0 0 0 0 10 75011.776006818610 0.004574446836 KS 2 2 0 0 0 0 10 75011.788006822604 0.004574588305 KS 2 2 0 0 0 0 10 75011.806006821525 0.004574800744 KS 2 2 0 0 0 0 10 75011.811006822028 0.004574859785 KS 2 2 0 0 0 0 10 75011.818006825535 0.004574942459 KS 2 2 0 0 0 0 10 75011.829006820934 0.004575072423 KS 2 2 0 0 0 0 10 75011.847006819855 0.004575285222 KS 2 2 0 0 0 0 10 75011.850006817316 0.004575320737 KS 2 2 0 0 0 0 10 75011.867006821788 0.004575521853 KS 2 2 0 0 0 0 10 75011.893006818666 0.004575829762 KS 2 2 0 0 0 0 10 75011.911006817597 0.004576043136 KS 2 2 0 0 0 0 10 75011.912006826194 0.004576054995 KS 2 2 0 0 0 0 10 75011.914006815065 0.004576078689 KS 2 2 0 0 0 0 10 75011.927006827660 0.004576232942 KS 2 2 0 0 0 0 10 75011.928006822082 0.004576244809 KS 2 2 0 0 0 0 10 75011.931006819553 0.004576280402 KS 2 2 0 0 0 0 10 75011.934006817015 0.004576315984 KS 2 2 0 0 0 0 10 75011.936006820041 0.004576339748 KS 2 2 0 0 0 0 10 75011.940006826091 0.004576387319 KS 2 2 0 0 0 0 10 75011.963006825525 0.004576660471 KS 2 2 0 0 0 0 10 75011.964006819943 0.004576672306 KS 2 2 0 0 0 0 10 75011.976006823950 0.004576815005 KS 2 2 0 0 0 0 10 75011.987006819366 0.004576945864 KS 2 2 0 0 0 0 10 75011.990006816801 0.004576981523 KS 2 2 0 0 0 0 10 75011.991006825423 0.004576993470 KS 2 2 0 0 0 0 10 75012.004006823843 0.004577148160 KS 2 2 0 0 0 0 10 75012.008006815726 0.004577195804 KS 2 2 0 0 0 0 10 75012.011006827375 0.004577231499 KS 2 2 0 0 0 0 10 75012.017006822289 0.004577302972 KS 2 2 0 0 0 0 10 75012.019006825311 0.004577326779 KS 2 2 0 0 0 0 10 75012.021006814180 0.004577350623 KS 2 2 0 0 0 0 10 75012.047006825219 0.004577660579 KS 2 2 0 0 0 0 10 75012.074006816530 0.004577982786 KS 2 2 0 0 0 0 10 75012.083006823058 0.004578090271 KS 2 2 0 0 0 0 10 75012.085006826100 0.004578114152 KS 2 2 0 0 0 0 10 75012.093006824045 0.004578209741 KS 2 2 0 0 0 0 10 75012.105006813885 0.004578353164 KS 2 2 0 0 0 0 10 75012.107006816918 0.004578377121 KS 2 2 0 0 0 0 10 75012.134006822389 0.004578700173 KS 2 2 0 0 0 0 10 75012.156006827385 0.004578963571 KS 2 2 0 0 0 0 10 75012.165006819753 0.004579071436 KS 2 2 0 0 0 0 10 75012.174006826313 0.004579179278 KS 2 2 0 0 0 0 10 75012.182006824263 0.004579275321 KS 2 2 0 0 0 0 10 75012.189006827772 0.004579359259 KS 2 2 0 0 0 0 10 75012.219006816562 0.004579719419 KS 2 2 0 0 0 0 10 75012.226006820080 0.004579803519 KS 2 2 0 0 0 0 10 75012.229006817512 0.004579839665 KS 2 2 0 0 0 0 10 75012.246006822039 0.004580043968 KS 2 2 0 0 0 0 10 75012.254006819969 0.004580140206 KS 2 2 0 0 0 0 10 75012.265006815395 0.004580272577 KS 2 2 0 0 0 0 10 75012.297006821365 0.004580658003 KS 2 2 0 0 0 0 10 75012.310006819805 0.004580814752 KS 2 2 0 0 0 0 10 75012.349006815124 0.004581285410 KS 2 2 0 0 0 0 10 75012.362006827745 0.004581442497 KS 2 2 0 0 0 0 10 75012.399006820049 0.004581889957 KS 2 2 0 0 0 0 10 75012.404006820527 0.004581950489 KS 2 2 0 0 0 0 10 75012.406006823566 0.004581974719 KS 2 2 0 0 0 0 10 75012.445006818917 0.004582447241 KS 2 2 0 0 0 0 10 75012.447006821909 0.004582471579 KS 2 2 0 0 0 0 10 75012.456006814328 0.004582580617 KS 2 2 0 0 0 0 10 75012.467006823893 0.004582714187 KS 2 2 0 0 0 0 10 75012.492006826357 0.004583017800 KS 2 2 0 0 0 0 10 75012.494006815224 0.004583042052 KS 2 2 0 0 0 0 10 75012.520006826279 0.004583358175 KS 2 2 0 0 0 0 10 75012.554006821133 0.004583772042 KS 2 2 0 0 0 0 10 75012.578006815007 0.004584064515 KS 2 2 0 0 0 0 10 75012.581006826629 0.004584101118 KS 2 2 0 0 0 0 10 75012.586006827120 0.004584162098 KS 2 2 0 0 0 0 10 75012.589006824575 0.004584198779 KS 2 2 0 0 0 0 10 75012.598006816963 0.004584308477 KS 2 2 0 0 0 0 10 75012.599006825569 0.004584320730 KS 2 2 0 0 0 0 10 75012.618006818948 0.004584552685 KS 2 2 0 0 0 0 10 75012.619006827542 0.004584564891 KS 2 2 0 0 0 0 10 75012.627006825515 0.004584662673 KS 2 2 0 0 0 0 10 75012.630006822952 0.004584699347 KS 2 2 0 0 0 0 10 75012.646006818877 0.004584894863 KS 2 2 0 0 0 0 10 75012.657006814305 0.004585029354 KS 2 2 0 0 0 0 10 75012.661006820350 0.004585078296 KS 2 2 0 0 0 0 10 75012.669006818294 0.004585176171 KS 2 2 0 0 0 0 10 75012.719006823250 0.004585788812 KS 2 2 0 0 0 0 10 75012.735006819145 0.004585985042 KS 2 2 0 0 0 0 10 75012.767006825165 0.004586377984 KS 2 2 0 0 0 0 10 75012.768006819575 0.004586390299 KS 2 2 0 0 0 0 10 75012.772006825646 0.004586439453 KS 2 2 0 0 0 0 10 75012.788006821543 0.004586636186 KS 2 2 0 0 0 0 10 75012.794006816486 0.004586710005 KS 2 2 0 0 0 0 10 75012.802006814437 0.004586808459 KS 2 2 0 0 0 0 10 75012.818006824522 0.004587005377 KS 2 2 0 0 0 0 10 75012.826006822475 0.004587103874 KS 2 2 0 0 0 0 10 75012.840006815379 0.004587276327 KS 2 2 0 0 0 0 10 75012.850006816364 0.004587399583 KS 2 2 0 0 0 0 10 75012.862006820391 0.004587547599 KS 2 2 0 0 0 0 10 75012.863006814800 0.004587559956 KS 2 2 0 0 0 0 10 75012.891006814734 0.004587905545 KS 2 2 0 0 0 0 10 75012.912006825341 0.004588164991 KS 2 2 0 0 0 0 10 75012.935006824792 0.004588449398 KS 2 2 0 0 0 0 10 75012.942006814125 0.004588536078 KS 2 2 0 0 0 0 10 75012.995006816575 0.004589192588 KS 2 2 0 0 0 0 10 75013.056006816957 0.004589950011 KS 2 2 0 0 0 0 10 75013.058006819999 0.004589974835 KS 2 2 0 0 0 0 10 75013.068006820992 0.004590099270 KS 2 2 0 0 0 0 10 75013.074006815919 0.004590173830 KS 2 2 0 0 0 0 10 75013.093006823466 0.004590410413 KS 2 2 0 0 0 0 10 75013.118006825964 0.004590721759 KS 2 2 0 0 0 0 10 75013.156006826904 0.004591195788 KS 2 2 0 0 0 0 10 75013.164006824858 0.004591295550 KS 2 2 0 0 0 0 10 75013.176006814744 0.004591445435 KS 2 2 0 0 0 0 10 75013.182006823840 0.004591520423 KS 2 2 0 0 0 0 10 75013.188006818754 0.004591595395 KS 2 2 0 0 0 0 10 75013.189006827376 0.004591607904 KS 2 2 0 0 0 0 10 75013.194006827875 0.004591670344 KS 2 2 0 0 0 0 10 75013.205006823300 0.004591807931 KS 2 2 0 0 0 0 10 75013.245006827295 0.004592308518 KS 2 2 0 0 0 0 10 75013.253006825242 0.004592408825 KS 2 2 0 0 0 0 10 75013.259006820193 0.004592483979 KS 2 2 0 0 0 0 10 75013.276006824728 0.004592697108 KS 2 2 0 0 0 0 10 75013.330006821646 0.004593375135 KS 2 2 0 0 0 0 10 75013.337006825162 0.004593463070 KS 2 2 0 0 0 0 10 75013.344006814528 0.004593551076 KS 2 2 0 0 0 0 10 75013.345006823132 0.004593563651 KS 2 2 0 0 0 0 10 75013.353006821110 0.004593664260 KS 2 2 0 0 0 0 10 75013.354006815535 0.004593676867 KS 2 2 0 0 0 0 10 75013.355006824141 0.004593689461 KS 2 2 0 0 0 0 10 75013.357006827189 0.004593714592 KS 2 2 0 0 0 0 10 75013.368006822609 0.004593853094 KS 2 2 0 0 0 0 10 75013.435006818011 0.004594697522 KS 2 2 0 0 0 0 10 75013.448006816478 0.004594861643 KS 2 2 0 0 0 0 10 75013.456006814449 0.004594962680 KS 2 2 0 0 0 0 10 75013.462006823543 0.004595038454 KS 2 2 0 0 0 0 10 75013.502006827570 0.004595544204 KS 2 2 0 0 0 0 10 75013.503006822026 0.004595556898 KS 2 2 0 0 0 0 10 75013.508006822531 0.004595620140 KS 2 2 0 0 0 0 10 75013.525006827087 0.004595835382 KS 2 2 0 0 0 0 10 75013.536006822519 0.004595974740 KS 2 2 0 0 0 0 10 75013.537006816954 0.004595987384 KS 2 2 0 0 0 0 10 75013.555006815944 0.004596215512 KS 2 2 0 0 0 0 10 75013.558006827571 0.004596253592 KS 2 2 0 0 0 0 10 75013.573006814914 0.004596443889 KS 2 2 0 0 0 0 10 75013.574006823538 0.004596456573 KS 2 2 0 0 0 0 10 75013.590006819462 0.004596659686 KS 2 2 0 0 0 0 10 75013.616006816428 0.004596989942 KS 2 2 0 0 0 0 10 75013.628006820508 0.004597142508 KS 2 2 0 0 0 0 10 75013.637006827086 0.004597256994 KS 2 2 0 0 0 0 10 75013.641006818982 0.004597307863 KS 2 2 0 0 0 0 10 75013.654006817468 0.004597473303 KS 2 2 0 0 0 0 10 75013.669006818990 0.004597664306 KS 2 2 0 0 0 0 10 75013.675006813921 0.004597740763 KS 2 2 0 0 0 0 10 75013.676006822518 0.004597753474 KS 2 2 0 0 0 0 10 75013.683006826052 0.004597842760 KS 2 2 0 0 0 0 10 75013.689006821015 0.004597919166 KS 2 2 0 0 0 0 10 75013.691006824043 0.004597944670 KS 2 2 0 0 0 0 10 75013.697006818995 0.004598021142 KS 2 2 0 0 0 0 10 75013.722006821513 0.004598340063 KS 2 2 0 0 0 0 10 75013.724006824557 0.004598365615 KS 2 2 0 0 0 0 10 75013.728006816445 0.004598416641 KS 2 2 0 0 0 0 10 75013.750006821529 0.004598697675 KS 2 2 0 0 0 0 10 75013.764006814435 0.004598876529 KS 2 2 0 0 0 0 10 75013.775006824064 0.004599017227 KS 2 2 0 0 0 0 10 75013.782006827599 0.004599106798 KS 2 2 0 0 0 0 10 75013.783006822061 0.004599119513 KS 2 2 0 0 0 0 10 75013.786006819526 0.004599157901 KS 2 2 0 0 0 0 10 75013.808006824604 0.004599439497 KS 2 2 0 0 0 0 10 75013.828006826652 0.004599695727 KS 2 2 0 0 0 0 10 75013.829006821067 0.004599708515 KS 2 2 0 0 0 0 10 75013.854006823616 0.004600029102 KS 2 2 0 0 0 0 10 75013.881006815026 0.004600375675 KS 2 2 0 0 0 0 10 75013.903006820107 0.004600658361 KS 2 2 0 0 0 0 10 75013.950006827758 0.004601262953 KS 2 2 0 0 0 0 10 75013.962006817626 0.004601417484 KS 2 2 0 0 0 0 10 75014.010006819723 0.004602036414 KS 2 2 0 0 0 0 10 75014.012006822757 0.004602062168 KS 2 2 0 0 0 0 10 75014.034006827878 0.004602346214 KS 2 2 0 0 0 0 10 75014.035006822293 0.004602359194 KS 2 2 0 0 0 0 10 75014.036006816733 0.004602372076 KS 2 2 0 0 0 0 10 75014.043006820281 0.004602462547 KS 2 2 0 0 0 0 10 75014.044006814710 0.004602475451 KS 2 2 0 0 0 0 10 75014.061006819305 0.004602695194 KS 2 2 0 0 0 0 10 75014.064006816741 0.004602734067 KS 2 2 0 0 0 0 10 75014.085006827417 0.004603005675 KS 2 2 0 0 0 0 10 75014.119006822416 0.004603446025 KS 2 2 0 0 0 0 10 75014.134006823973 0.004603640437 KS 2 2 0 0 0 0 10 75014.137006821440 0.004603679373 KS 2 2 0 0 0 0 10 75014.139006824478 0.004603705266 KS 2 2 0 0 0 0 10 75014.163006818460 0.004604016720 KS 2 2 0 0 0 0 10 75014.164006827075 0.004604029643 KS 2 2 0 0 0 0 10 75014.175006822505 0.004604172523 KS 2 2 0 0 0 0 10 75014.218006824113 0.004604731429 KS 2 2 0 0 0 0 10 75014.239006820618 0.004605004771 KS 2 2 0 0 0 0 10 75014.245006815588 0.004605082816 KS 2 2 0 0 0 0 10 75014.258006814094 0.004605252152 KS 2 2 0 0 0 0 10 75014.271006826752 0.004605421556 KS 2 2 0 0 0 0 10 75014.291006814676 0.004605682397 KS 2 2 0 0 0 0 10 75014.300006821279 0.004605799787 KS 2 2 0 0 0 0 10 75014.317006825880 0.004606021632 KS 2 2 0 0 0 0 10 75014.346006820380 0.004606400550 KS 2 2 0 0 0 0 10 75014.387006818967 0.004606936908 KS 2 2 0 0 0 0 10 75014.402006820540 0.004607133344 KS 2 2 0 0 0 0 10 75014.426006814520 0.004607447827 KS 2 2 0 0 0 0 10 75014.461006818191 0.004607907014 KS 2 2 0 0 0 0 10 75014.474006816697 0.004608077727 KS 2 2 0 0 0 0 10 75014.491006821309 0.004608301103 KS 2 2 0 0 0 0 10 75014.495006827391 0.004608353686 KS 2 2 0 0 0 0 10 75014.540006817938 0.004608945681 KS 2 2 0 0 0 0 10 75014.544006824025 0.004608998396 KS 2 2 0 0 0 0 10 75014.553006816441 0.004609116960 KS 2 2 0 0 0 0 10 75014.575006821580 0.004609406886 KS 2 2 0 0 0 0 10 75014.577006824656 0.004609433205 KS 2 2 0 0 0 0 10 75014.579006827667 0.004609459627 KS 2 2 0 0 0 0 10 75014.583006819583 0.004609512369 KS 2 2 0 0 0 0 10 75014.588006820110 0.004609578291 KS 2 2 0 0 0 0 10 75014.606006819181 0.004609815792 KS 2 2 0 0 0 0 10 75014.630006827352 0.004610132725 KS 2 2 0 0 0 0 10 75014.641006822850 0.004610278079 KS 2 2 0 0 0 0 10 75014.646006823353 0.004610344260 KS 2 2 0 0 0 0 10 75014.653006826945 0.004610436704 KS 2 2 0 0 0 0 10 75014.660006816316 0.004610529329 KS 2 2 0 0 0 0 10 75014.667006819902 0.004610621906 KS 2 2 0 0 0 0 10 75014.670006817369 0.004610661591 KS 2 2 0 0 0 0 10 75014.689006825060 0.004610913066 KS 2 2 0 0 0 0 10 75014.697006823034 0.004611019078 KS 2 2 0 0 0 0 10 75014.722006825677 0.004611350278 KS 2 2 0 0 0 0 10 75014.727006826189 0.004611416589 KS 2 2 0 0 0 0 10 75014.758006823813 0.004611827824 KS 2 2 0 0 0 0 10 75014.766006821789 0.004611934099 KS 2 2 0 0 0 0 10 75014.832006823105 0.004612811423 KS 2 2 0 0 0 0 10 75014.854006814103 0.004613104441 KS 2 2 0 0 0 0 10 75014.862006826280 0.004613211024 KS 2 2 0 0 0 0 10 75014.890006826404 0.004613584314 KS 2 2 0 0 0 0 10 75014.895006826937 0.004613651010 KS 2 2 0 0 0 0 10 75014.902006816341 0.004613744410 KS 2 2 0 0 0 0 10 75014.907006816850 0.004613811185 KS 2 2 0 0 0 0 10 75014.946006826657 0.004614332131 KS 2 2 0 0 0 0 10 75014.977006824307 0.004614746673 KS 2 2 0 0 0 0 10 75014.978006818718 0.004614760079 KS 2 2 0 0 0 0 10 75014.979006827335 0.004614773458 KS 2 2 0 0 0 0 10 75014.982006824819 0.004614813631 KS 2 2 0 0 0 0 10 75014.997006826409 0.004615014442 KS 2 2 0 0 0 0 10 75015.024006817947 0.004615376213 KS 2 2 0 0 0 0 10 75015.047006817536 0.004615684666 KS 2 2 0 0 0 0 10 75015.064006822184 0.004615912713 KS 2 2 0 0 0 0 10 75015.070006817175 0.004615993390 KS 2 2 0 0 0 0 10 75015.071006825779 0.004616006744 KS 2 2 0 0 0 0 10 75015.086006827358 0.004616208205 KS 2 2 0 0 0 0 10 75015.097006822872 0.004616356034 KS 2 2 0 0 0 0 10 75015.112006824473 0.004616557683 KS 2 2 0 0 0 0 10 75015.116006816391 0.004616611512 KS 2 2 0 0 0 0 10 75015.129006814943 0.004616786416 KS 2 2 0 0 0 0 10 75015.134006815484 0.004616853681 KS 2 2 0 0 0 0 10 75015.144006816539 0.004616988363 KS 2 2 0 0 0 0 10 75015.159006818133 0.004617190305 KS 2 2 0 0 0 0 10 75015.174006819742 0.004617392403 KS 2 2 0 0 0 0 10 75015.181006823331 0.004617486753 KS 2 2 0 0 0 0 10 75015.183006826373 0.004617513719 KS 2 2 0 0 0 0 10 75015.205006817398 0.004617810496 KS 2 2 0 0 0 0 10 75015.211006826513 0.004617891507 KS 2 2 0 0 0 0 10 75015.222006822046 0.004618039998 KS 2 2 0 0 0 0 10 75015.227006822566 0.004618107479 KS 2 2 0 0 0 0 10 75015.231006814485 0.004618161488 KS 2 2 0 0 0 0 10 75015.242006824180 0.004618310078 KS 2 2 0 0 0 0 10 75015.292006815379 0.004618986286 KS 2 2 0 0 0 0 10 75015.298006824510 0.004619067484 KS 2 2 0 0 0 0 10 75015.300006827549 0.004619094587 KS 2 2 0 0 0 0 10 75015.321006824136 0.004619379024 KS 2 2 0 0 0 0 10 75015.328006827737 0.004619473907 KS 2 2 0 0 0 0 10 75015.330006816619 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