H1 CRD 2 2021 4 21 23 H2 HERL 7840 35 1 4 ILRS H3 swarmb 1306701 8008 39451 0 1 1 H4 0 2021 4 21 22 20 3 2021 4 21 22 22 30 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 0.837 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 80161.920000 1020.64 278.00 78.2 0 20 80516.160000 1020.61 278.00 78.4 0 20 80879.040000 1020.67 278.00 78.4 0 41 79220.160000 0 KS 4357 4357 122.977 104418.2 0.0 21.3 0.190 -0.290 -2.0 2 0 0 1 na 41 84101.760000 0 KS 7653 7653 122.977 104418.2 0.0 20.0 0.160 -0.290 -1.0 2 0 0 2 na 40 80477.280000 0 KS 12010 12010 122.977 104418.2 0.0 20.7 0.175 -0.290 -1.5 2 2 0 3 na 50 KS 27.1 0.109 -0.264 2.0 0 10 80405.393245975592 0.004319927650 KS 2 2 0 0 0 0 10 80405.398245982472 0.004319842815 KS 2 2 0 0 0 0 10 80405.405245983567 0.004319724064 KS 2 2 0 0 0 0 10 80405.407245977795 0.004319690164 KS 2 2 0 0 0 0 10 80405.412245984622 0.004319605428 KS 2 2 0 0 0 0 10 80405.413245974654 0.004319588498 KS 2 2 0 0 0 0 10 80405.416245973101 0.004319537603 KS 2 2 0 0 0 0 10 80405.417245977301 0.004319520573 KS 2 2 0 0 0 0 10 80405.419245971520 0.004319486714 KS 2 2 0 0 0 0 10 80405.421245979948 0.004319452889 KS 2 2 0 0 0 0 10 80405.427245976809 0.004319351164 KS 2 2 0 0 0 0 10 80405.442245983182 0.004319096994 KS 2 2 0 0 0 0 10 80405.445245981596 0.004319046247 KS 2 2 0 0 0 0 10 80405.452245982704 0.004318927654 KS 2 2 0 0 0 0 10 80405.851245973155 0.004312209856 KS 2 2 0 0 0 0 10 80405.892245975414 0.004311523998 KS 2 2 0 0 0 0 10 80405.923245978150 0.004311005904 KS 2 2 0 0 0 0 10 80405.925245972406 0.004310972452 KS 2 2 0 0 0 0 10 80405.948245983991 0.004310588478 KS 2 2 0 0 0 0 10 80405.951245982450 0.004310538421 KS 2 2 0 0 0 0 10 80405.956245975106 0.004310454983 KS 2 2 0 0 0 0 10 80405.974245979927 0.004310154638 KS 2 2 0 0 0 0 10 80406.036245971204 0.004309121520 KS 2 2 0 0 0 0 10 80406.293245974283 0.004304859101 KS 2 2 0 0 0 0 10 80406.317245975944 0.004304462698 KS 2 2 0 0 0 0 10 80406.326245971239 0.004304314160 KS 2 2 0 0 0 0 10 80406.341245977586 0.004304066650 KS 2 2 0 0 0 0 10 80406.347245974474 0.004303967683 KS 2 2 0 0 0 0 10 80406.361245976638 0.004303736750 KS 2 2 0 0 0 0 10 80406.362245980828 0.004303720279 KS 2 2 0 0 0 0 10 80406.372245980369 0.004303555371 KS 2 2 0 0 0 0 10 80406.402245978898 0.004303061109 KS 2 2 0 0 0 0 10 80406.411245974188 0.004302912919 KS 2 2 0 0 0 0 10 80406.412245978379 0.004302896485 KS 2 2 0 0 0 0 10 80406.413245982574 0.004302880088 KS 2 2 0 0 0 0 10 80406.438245974264 0.004302468629 KS 2 2 0 0 0 0 10 80406.441245972728 0.004302419264 KS 2 2 0 0 0 0 10 80406.448245973814 0.004302304088 KS 2 2 0 0 0 0 10 80406.449245977969 0.004302287691 KS 2 2 0 0 0 0 10 80406.451245972205 0.004302254762 KS 2 2 0 0 0 0 10 80406.452245976428 0.004302238323 KS 2 2 0 0 0 0 10 80406.463245980123 0.004302057482 KS 2 2 0 0 0 0 10 80406.467245982783 0.004301991757 KS 2 2 0 0 0 0 10 80406.469245976998 0.004301958881 KS 2 2 0 0 0 0 10 80406.479245976516 0.004301794536 KS 2 2 0 0 0 0 10 80406.480245980746 0.004301778106 KS 2 2 0 0 0 0 10 80406.482245974968 0.004301745248 KS 2 2 0 0 0 0 10 80406.484245983374 0.004301712409 KS 2 2 0 0 0 0 10 80406.506245976600 0.004301351129 KS 2 2 0 0 0 0 10 80406.511245983470 0.004301269004 KS 2 2 0 0 0 0 10 80406.519245974561 0.004301137786 KS 2 2 0 0 0 0 10 80406.528245984047 0.004300990039 KS 2 2 0 0 0 0 10 80406.529245974070 0.004300973622 KS 2 2 0 0 0 0 10 80406.622245982292 0.004299450056 KS 2 2 0 0 0 0 10 80406.631245977591 0.004299302817 KS 2 2 0 0 0 0 10 80406.637245974445 0.004299204706 KS 2 2 0 0 0 0 10 80406.678245976735 0.004298534646 KS 2 2 0 0 0 0 10 80406.688245976214 0.004298371400 KS 2 2 0 0 0 0 10 80406.694245973107 0.004298273472 KS 2 2 0 0 0 0 10 80406.712245977892 0.004297979662 KS 2 2 0 0 0 0 10 80406.713245982084 0.004297963428 KS 2 2 0 0 0 0 10 80406.743245980583 0.004297474173 KS 2 2 0 0 0 0 10 80406.813245977151 0.004296334348 KS 2 2 0 0 0 0 10 80406.827245979322 0.004296106708 KS 2 2 0 0 0 0 10 80406.862245970530 0.004295537985 KS 2 2 0 0 0 0 10 80406.883245973754 0.004295196996 KS 2 2 0 0 0 0 10 80406.888245980574 0.004295115878 KS 2 2 0 0 0 0 10 80406.900245974339 0.004294921136 KS 2 2 0 0 0 0 10 80406.909245983816 0.004294775149 KS 2 2 0 0 0 0 10 80406.923245971773 0.004294548201 KS 2 2 0 0 0 0 10 80406.934245975472 0.004294369921 KS 2 2 0 0 0 0 10 80406.959245981344 0.004293964916 KS 2 2 0 0 0 0 10 80406.975245977726 0.004293705931 KS 2 2 0 0 0 0 10 80406.994245972533 0.004293398484 KS 2 2 0 0 0 0 10 80407.012245977317 0.004293107392 KS 2 2 0 0 0 0 10 80407.014245971552 0.004293075092 KS 2 2 0 0 0 0 10 80407.025245975275 0.004292897277 KS 2 2 0 0 0 0 10 80407.036245978966 0.004292719596 KS 2 2 0 0 0 0 10 80407.042245975866 0.004292622613 KS 2 2 0 0 0 0 10 80407.047245982707 0.004292541858 KS 2 2 0 0 0 0 10 80407.049245976936 0.004292509511 KS 2 2 0 0 0 0 10 80407.057245982193 0.004292380410 KS 2 2 0 0 0 0 10 80407.059245976432 0.004292348073 KS 2 2 0 0 0 0 10 80407.071245984346 0.004292154435 KS 2 2 0 0 0 0 10 80407.072245974385 0.004292138300 KS 2 2 0 0 0 0 10 80407.084245982276 0.004291944700 KS 2 2 0 0 0 0 10 80407.093245977610 0.004291799508 KS 2 2 0 0 0 0 10 80407.097245980236 0.004291735031 KS 2 2 0 0 0 0 10 80407.101245982883 0.004291670612 KS 2 2 0 0 0 0 10 80407.107245979740 0.004291573887 KS 2 2 0 0 0 0 10 80407.124245980362 0.004291299875 KS 2 2 0 0 0 0 10 80407.125245984530 0.004291283770 KS 2 2 0 0 0 0 10 80407.133245975619 0.004291154882 KS 2 2 0 0 0 0 10 80407.142245970957 0.004291009972 KS 2 2 0 0 0 0 10 80407.158245981486 0.004290752375 KS 2 2 0 0 0 0 10 80407.166245972603 0.004290623579 KS 2 2 0 0 0 0 10 80407.176245972121 0.004290462735 KS 2 2 0 0 0 0 10 80407.191245978466 0.004290221527 KS 2 2 0 0 0 0 10 80407.197245975352 0.004290125061 KS 2 2 0 0 0 0 10 80407.204245976395 0.004290012548 KS 2 2 0 0 0 0 10 80407.207245974847 0.004289964314 KS 2 2 0 0 0 0 10 80407.210245973268 0.004289916122 KS 2 2 0 0 0 0 10 80407.239245981757 0.004289450391 KS 2 2 0 0 0 0 10 80407.252245979694 0.004289241762 KS 2 2 0 0 0 0 10 80407.255245978146 0.004289193590 KS 2 2 0 0 0 0 10 80407.273245982933 0.004288904903 KS 2 2 0 0 0 0 10 80407.292245977746 0.004288600258 KS 2 2 0 0 0 0 10 80407.424245979750 0.004286488905 KS 2 2 0 0 0 0 10 80407.470245974647 0.004285755238 KS 2 2 0 0 0 0 10 80407.486245971006 0.004285500317 KS 2 2 0 0 0 0 10 80407.522245980560 0.004284927174 KS 2 2 0 0 0 0 10 80407.651245984140 0.004282878525 KS 2 2 0 0 0 0 10 80407.698245983245 0.004282134184 KS 2 2 0 0 0 0 10 80407.701245981690 0.004282086720 KS 2 2 0 0 0 0 10 80407.941245984018 0.004278303560 KS 2 2 0 0 0 0 10 80407.950245979332 0.004278162260 KS 2 2 0 0 0 0 10 80408.019245971648 0.004277080262 KS 2 2 0 0 0 0 10 80408.100245971901 0.004275813113 KS 2 2 0 0 0 0 10 80408.120245970910 0.004275500796 KS 2 2 0 0 0 0 10 80408.135245977265 0.004275266608 KS 2 2 0 0 0 0 10 80408.150245983593 0.004275032674 KS 2 2 0 0 0 0 10 80408.161245973153 0.004274861022 KS 2 2 0 0 0 0 10 80408.163245981525 0.004274829875 KS 2 2 0 0 0 0 10 80408.166245979985 0.004274783084 KS 2 2 0 0 0 0 10 80408.169245978414 0.004274736269 KS 2 2 0 0 0 0 10 80408.178245973705 0.004274596033 KS 2 2 0 0 0 0 10 80408.182245976319 0.004274533733 KS 2 2 0 0 0 0 10 80408.187245983210 0.004274455779 KS 2 2 0 0 0 0 10 80408.191245971635 0.004274393498 KS 2 2 0 0 0 0 10 80408.205245973786 0.004274175437 KS 2 2 0 0 0 0 10 80408.206245977996 0.004274159851 KS 2 2 0 0 0 0 10 80408.214245983271 0.004274035352 KS 2 2 0 0 0 0 10 80408.221245984336 0.004273926396 KS 2 2 0 0 0 0 10 80408.226245976979 0.004273848621 KS 2 2 0 0 0 0 10 80408.228245971221 0.004273817514 KS 2 2 0 0 0 0 10 80408.243245977583 0.004273584135 KS 2 2 0 0 0 0 10 80408.245245971786 0.004273553061 KS 2 2 0 0 0 0 10 80408.251245982839 0.004273459746 KS 2 2 0 0 0 0 10 80408.262245972394 0.004273288731 KS 2 2 0 0 0 0 10 80408.267245979222 0.004273211005 KS 2 2 0 0 0 0 10 80408.280245977176 0.004273009128 KS 2 2 0 0 0 0 10 80408.282245971396 0.004272978026 KS 2 2 0 0 0 0 10 80408.284245979795 0.004272946975 KS 2 2 0 0 0 0 10 80408.285245984004 0.004272931429 KS 2 2 0 0 0 0 10 80408.295245983504 0.004272776166 KS 2 2 0 0 0 0 10 80408.296245973526 0.004272760649 KS 2 2 0 0 0 0 10 80408.302245984573 0.004272667509 KS 2 2 0 0 0 0 10 80408.306245973060 0.004272605424 KS 2 2 0 0 0 0 10 80408.332245983112 0.004272202030 KS 2 2 0 0 0 0 10 80408.342245982596 0.004272047029 KS 2 2 0 0 0 0 10 80408.353245972109 0.004271876595 KS 2 2 0 0 0 0 10 80408.356245984732 0.004271830061 KS 2 2 0 0 0 0 10 80408.392245980093 0.004271272624 KS 2 2 0 0 0 0 10 80408.393245984317 0.004271257118 KS 2 2 0 0 0 0 10 80408.450245982891 0.004270375822 KS 2 2 0 0 0 0 10 80408.472245976128 0.004270036105 KS 2 2 0 0 0 0 10 80408.478245973020 0.004269943479 KS 2 2 0 0 0 0 10 80408.488245972513 0.004269789164 KS 2 2 0 0 0 0 10 80408.489245976708 0.004269773760 KS 2 2 0 0 0 0 10 80408.501245984613 0.004269588680 KS 2 2 0 0 0 0 10 80408.510245979922 0.004269449878 KS 2 2 0 0 0 0 10 80408.570245976961 0.004268525861 KS 2 2 0 0 0 0 10 80408.598245981225 0.004268095242 KS 2 2 0 0 0 0 10 80408.602245983864 0.004268033653 KS 2 2 0 0 0 0 10 80408.604245978094 0.004268002959 KS 2 2 0 0 0 0 10 80408.615245981788 0.004267833932 KS 2 2 0 0 0 0 10 80408.650245972967 0.004267296490 KS 2 2 0 0 0 0 10 80408.659245982442 0.004267158383 KS 2 2 0 0 0 0 10 80408.673245984587 0.004266943660 KS 2 2 0 0 0 0 10 80408.674245974615 0.004266928356 KS 2 2 0 0 0 0 10 80408.677245973069 0.004266882320 KS 2 2 0 0 0 0 10 80408.678245977244 0.004266867035 KS 2 2 0 0 0 0 10 80408.686245982521 0.004266744358 KS 2 2 0 0 0 0 10 80408.700245970475 0.004266529809 KS 2 2 0 0 0 0 10 80408.713245982592 0.004266330700 KS 2 2 0 0 0 0 10 80408.737245984236 0.004265963304 KS 2 2 0 0 0 0 10 80408.742245976891 0.004265886773 KS 2 2 0 0 0 0 10 80408.748245973760 0.004265795020 KS 2 2 0 0 0 0 10 80408.749245977952 0.004265779729 KS 2 2 0 0 0 0 10 80408.750245982145 0.004265764491 KS 2 2 0 0 0 0 10 80408.753245980586 0.004265718503 KS 2 2 0 0 0 0 10 80408.755245974850 0.004265687917 KS 2 2 0 0 0 0 10 80408.758245973239 0.004265642106 KS 2 2 0 0 0 0 10 80408.759245977475 0.004265626765 KS 2 2 0 0 0 0 10 80408.769245976946 0.004265473913 KS 2 2 0 0 0 0 10 80408.772245975408 0.004265428013 KS 2 2 0 0 0 0 10 80408.774245983838 0.004265397444 KS 2 2 0 0 0 0 10 80408.799245975474 0.004265015537 KS 2 2 0 0 0 0 10 80408.825245971325 0.004264618697 KS 2 2 0 0 0 0 10 80408.841245981886 0.004264374627 KS 2 2 0 0 0 0 10 80408.844245980301 0.004264328871 KS 2 2 0 0 0 0 10 80408.857245978243 0.004264130728 KS 2 2 0 0 0 0 10 80408.906245971568 0.004263384486 KS 2 2 0 0 0 0 10 80408.997245971266 0.004262001894 KS 2 2 0 0 0 0 10 80409.033245980844 0.004261456081 KS 2 2 0 0 0 0 10 80409.123245976343 0.004260094433 KS 2 2 0 0 0 0 10 80409.489245983625 0.004254599612 KS 2 2 0 0 0 0 10 80409.784245975984 0.004250220391 KS 2 2 0 0 0 0 10 80409.804245974976 0.004249925092 KS 2 2 0 0 0 0 10 80409.859245979321 0.004249114135 KS 2 2 0 0 0 0 10 80409.869245978846 0.004248966809 KS 2 2 0 0 0 0 10 80409.873245981481 0.004248907920 KS 2 2 0 0 0 0 10 80409.880245982544 0.004248804881 KS 2 2 0 0 0 0 10 80410.195245973925 0.004244193451 KS 2 2 0 0 0 0 10 80410.250245978263 0.004243393517 KS 2 2 0 0 0 0 10 80410.282245971004 0.004242928798 KS 2 2 0 0 0 0 10 80410.283245975190 0.004242914269 KS 2 2 0 0 0 0 10 80410.339245983759 0.004242102279 KS 2 2 0 0 0 0 10 80410.383245984388 0.004241465469 KS 2 2 0 0 0 0 10 80410.404245973406 0.004241161967 KS 2 2 0 0 0 0 10 80410.447245984016 0.004240540974 KS 2 2 0 0 0 0 10 80410.498245971552 0.004239805765 KS 2 2 0 0 0 0 10 80410.678245976726 0.004237221620 KS 2 2 0 0 0 0 10 80410.735245975307 0.004236406805 KS 2 2 0 0 0 0 10 80410.738245973722 0.004236363983 KS 2 2 0 0 0 0 10 80410.749245977453 0.004236206945 KS 2 2 0 0 0 0 10 80410.795245972311 0.004235550907 KS 2 2 0 0 0 0 10 80410.825245970785 0.004235123638 KS 2 2 0 0 0 0 10 80410.945245978958 0.004233419347 KS 2 2 0 0 0 0 10 80411.409245972737 0.004226899346 KS 2 2 0 0 0 0 10 80411.470245973931 0.004226050569 KS 2 2 0 0 0 0 10 80411.498245978187 0.004225661565 KS 2 2 0 0 0 0 10 80411.959245973433 0.004219316078 KS 2 2 0 0 0 0 10 80411.969245972918 0.004219179727 KS 2 2 0 0 0 0 10 80412.178245972304 0.004216340591 KS 2 2 0 0 0 0 10 80412.373245983750 0.004213712358 KS 2 2 0 0 0 0 10 80412.375245977957 0.004213685440 KS 2 2 0 0 0 0 10 80412.412245977519 0.004213189013 KS 2 2 0 0 0 0 10 80412.454245983910 0.004212626399 KS 2 2 0 0 0 0 10 80412.464245983395 0.004212492613 KS 2 2 0 0 0 0 10 80412.468245971855 0.004212439070 KS 2 2 0 0 0 0 10 80412.510245978240 0.004211877675 KS 2 2 0 0 0 0 10 80412.718245973387 0.004209111165 KS 2 2 0 0 0 0 10 80412.904245975313 0.004206656557 KS 2 2 0 0 0 0 10 80412.978245974395 0.004205685015 KS 2 2 0 0 0 0 10 80415.071245979887 0.004179412641 KS 2 2 0 0 0 0 10 80415.073245974115 0.004179388595 KS 2 2 0 0 0 0 10 80415.074245978324 0.004179376653 KS 2 2 0 0 0 0 10 80415.075245982515 0.004179364654 KS 2 2 0 0 0 0 10 80415.083245973611 0.004179268754 KS 2 2 0 0 0 0 10 80415.085245982013 0.004179244754 KS 2 2 0 0 0 0 10 80415.095245981509 0.004179124952 KS 2 2 0 0 0 0 10 80415.101245978367 0.004179053041 KS 2 2 0 0 0 0 10 80415.102245982574 0.004179041067 KS 2 2 0 0 0 0 10 80415.108245979432 0.004178969237 KS 2 2 0 0 0 0 10 80415.114245976285 0.004178897409 KS 2 2 0 0 0 0 10 80415.123245971581 0.004178789660 KS 2 2 0 0 0 0 10 80415.124245975776 0.004178777753 KS 2 2 0 0 0 0 10 80415.127245974229 0.004178741847 KS 2 2 0 0 0 0 10 80415.138245977887 0.004178610371 KS 2 2 0 0 0 0 10 80415.139245982110 0.004178598330 KS 2 2 0 0 0 0 10 80415.140245972111 0.004178586410 KS 2 2 0 0 0 0 10 80415.142245980516 0.004178562431 KS 2 2 0 0 0 0 10 80415.144245974747 0.004178538538 KS 2 2 0 0 0 0 10 80415.149245981562 0.004178478828 KS 2 2 0 0 0 0 10 80415.150245971640 0.004178466835 KS 2 2 0 0 0 0 10 80415.152245980024 0.004178442973 KS 2 2 0 0 0 0 10 80415.157245972665 0.004178383256 KS 2 2 0 0 0 0 10 80415.160245971104 0.004178347343 KS 2 2 0 0 0 0 10 80415.172245978995 0.004178204091 KS 2 2 0 0 0 0 10 80415.173245983185 0.004178192118 KS 2 2 0 0 0 0 10 80415.178245975870 0.004178132489 KS 2 2 0 0 0 0 10 80415.181245974295 0.004178096645 KS 2 2 0 0 0 0 10 80415.185245976921 0.004178048908 KS 2 2 0 0 0 0 10 80415.186245981108 0.004178037050 KS 2 2 0 0 0 0 10 80415.187245971147 0.004178025002 KS 2 2 0 0 0 0 10 80415.188245975323 0.004178013205 KS 2 2 0 0 0 0 10 80415.191245973782 0.004177977351 KS 2 2 0 0 0 0 10 80415.194245972201 0.004177941603 KS 2 2 0 0 0 0 10 80415.198245974822 0.004177893860 KS 2 2 0 0 0 0 10 80415.205245975909 0.004177810408 KS 2 2 0 0 0 0 10 80415.208245974311 0.004177774629 KS 2 2 0 0 0 0 10 80415.213245981156 0.004177715087 KS 2 2 0 0 0 0 10 80415.215245975375 0.004177691233 KS 2 2 0 0 0 0 10 80415.224245970656 0.004177584014 KS 2 2 0 0 0 0 10 80415.231245971729 0.004177500596 KS 2 2 0 0 0 0 10 80415.243245979612 0.004177357831 KS 2 2 0 0 0 0 10 80415.250245980663 0.004177274558 KS 2 2 0 0 0 0 10 80415.251245970690 0.004177262644 KS 2 2 0 0 0 0 10 80415.258245971755 0.004177179368 KS 2 2 0 0 0 0 10 80415.259245975975 0.004177167497 KS 2 2 0 0 0 0 10 80415.275245972303 0.004176977270 KS 2 2 0 0 0 0 10 80415.277245980684 0.004176953535 KS 2 2 0 0 0 0 10 80415.279245974948 0.004176929693 KS 2 2 0 0 0 0 10 80415.287245980206 0.004176834707 KS 2 2 0 0 0 0 10 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