H1 CRD 2 2021 2 18 17 H2 HERL 7840 35 1 4 ILRS H3 tandemx 1003001 6202 36605 0 1 1 H4 0 2021 2 18 16 53 36 2021 2 18 16 54 37 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 1.676 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 60661.440000 1003.00 280.50 81.4 0 20 61015.680000 1003.08 280.40 81.5 0 41 60436.800000 0 KS 7362 7362 122.977 104415.6 0.0 20.7 0.200 -0.300 -2.0 2 0 0 1 na 41 60989.760000 0 KS 3231 3231 122.977 104416.2 0.0 20.7 0.160 -0.320 -3.0 2 0 0 2 na 40 60847.200000 0 KS 10593 10593 122.977 104416.1 -0.7 20.7 0.180 -0.310 -2.5 2 2 0 3 na 50 KS 27.8 0.104 -0.322 2.0 0 10 60820.212467813466 0.004896285432 KS 2 2 0 0 0 0 10 60820.649611804760 0.004895025832 KS 2 2 0 0 0 0 10 60820.658890816850 0.004895000123 KS 2 2 0 0 0 0 10 60820.659921807182 0.004894997210 KS 2 2 0 0 0 0 10 60820.670231809581 0.004894968747 KS 2 2 0 0 0 0 10 60820.746525815992 0.004894759420 KS 2 2 0 0 0 0 10 60820.750649805611 0.004894748212 KS 2 2 0 0 0 0 10 60820.792920805559 0.004894633559 KS 2 2 0 0 0 0 10 60820.815602805153 0.004894572424 KS 2 2 0 0 0 0 10 60820.819726808976 0.004894561296 KS 2 2 0 0 0 0 10 60820.823850812754 0.004894550225 KS 2 2 0 0 0 0 10 60820.841377804092 0.004894503234 KS 2 2 0 0 0 0 10 60820.860966804413 0.004894450810 KS 2 2 0 0 0 0 10 60820.861997808897 0.004894448099 KS 2 2 0 0 0 0 10 60820.867152817182 0.004894434403 KS 2 2 0 0 0 0 10 60820.873338815777 0.004894417897 KS 2 2 0 0 0 0 10 60820.874369806114 0.004894415134 KS 2 2 0 0 0 0 10 60820.889834816790 0.004894374113 KS 2 2 0 0 0 0 10 60820.910454807416 0.004894319461 KS 2 2 0 0 0 0 10 60820.919733805348 0.004894294993 KS 2 2 0 0 0 0 10 60820.930043807751 0.004894267770 KS 2 2 0 0 0 0 10 60820.942415804985 0.004894235206 KS 2 2 0 0 0 0 10 60820.963035809772 0.004894181185 KS 2 2 0 0 0 0 10 60821.001182805899 0.004894081672 KS 2 2 0 0 0 0 10 60821.010461817990 0.004894057612 KS 2 2 0 0 0 0 10 60821.013554817281 0.004894049600 KS 2 2 0 0 0 0 10 60821.014585807615 0.004894046939 KS 2 2 0 0 0 0 10 60821.018709811374 0.004894036263 KS 2 2 0 0 0 0 10 60821.025926814506 0.004894017563 KS 2 2 0 0 0 0 10 60821.037267807220 0.004893988271 KS 2 2 0 0 0 0 10 60821.040360806508 0.004893980308 KS 2 2 0 0 0 0 10 60821.053763808224 0.004893945819 KS 2 2 0 0 0 0 10 60821.055825817203 0.004893940417 KS 2 2 0 0 0 0 10 60821.057887812036 0.004893935153 KS 2 2 0 0 0 0 10 60821.058918816496 0.004893932524 KS 2 2 0 0 0 0 10 60821.060980811310 0.004893927260 KS 2 2 0 0 0 0 10 60821.066135805445 0.004893913987 KS 2 2 0 0 0 0 10 60821.069228804737 0.004893906076 KS 2 2 0 0 0 0 10 60821.073352808534 0.004893895544 KS 2 2 0 0 0 0 10 60821.075414817524 0.004893890191 KS 2 2 0 0 0 0 10 60821.113561813636 0.004893792955 KS 2 2 0 0 0 0 10 60821.138305808084 0.004893730142 KS 2 2 0 0 0 0 10 60821.139336812576 0.004893727601 KS 2 2 0 0 0 0 10 60821.141398807365 0.004893722311 KS 2 2 0 0 0 0 10 60821.162018812181 0.004893670266 KS 2 2 0 0 0 0 10 60821.169235815265 0.004893652156 KS 2 2 0 0 0 0 10 60821.172328814583 0.004893644343 KS 2 2 0 0 0 0 10 60821.180576808001 0.004893623691 KS 2 2 0 0 0 0 10 60821.187793811104 0.004893605560 KS 2 2 0 0 0 0 10 60821.214599814500 0.004893538572 KS 2 2 0 0 0 0 10 60821.219754808627 0.004893525739 KS 2 2 0 0 0 0 10 60821.236250809624 0.004893484796 KS 2 2 0 0 0 0 10 60821.239343808940 0.004893477111 KS 2 2 0 0 0 0 10 60821.241405817907 0.004893471975 KS 2 2 0 0 0 0 10 60821.258932809248 0.004893428605 KS 2 2 0 0 0 0 10 60821.264087817536 0.004893415870 KS 2 2 0 0 0 0 10 60821.272335810937 0.004893395550 KS 2 2 0 0 0 0 10 60821.295017810551 0.004893339832 KS 2 2 0 0 0 0 10 60821.302234813650 0.004893322198 KS 2 2 0 0 0 0 10 60821.305327812946 0.004893314586 KS 2 2 0 0 0 0 10 60821.314606810838 0.004893291871 KS 2 2 0 0 0 0 10 60821.334195811171 0.004893244129 KS 2 2 0 0 0 0 10 60821.344505813570 0.004893219035 KS 2 2 0 0 0 0 10 60821.347598812839 0.004893211581 KS 2 2 0 0 0 0 10 60821.348629817367 0.004893209122 KS 2 2 0 0 0 0 10 60821.349660807686 0.004893206590 KS 2 2 0 0 0 0 10 60821.352753806989 0.004893199127 KS 2 2 0 0 0 0 10 60821.375435806586 0.004893144321 KS 2 2 0 0 0 0 10 60821.378528805905 0.004893136793 KS 2 2 0 0 0 0 10 60821.380590814886 0.004893131826 KS 2 2 0 0 0 0 10 60821.398117806209 0.004893089710 KS 2 2 0 0 0 0 10 60821.399148810700 0.004893087220 KS 2 2 0 0 0 0 10 60821.402241810000 0.004893079833 KS 2 2 0 0 0 0 10 60821.408427808603 0.004893064930 KS 2 2 0 0 0 0 10 60821.415644811695 0.004893047706 KS 2 2 0 0 0 0 10 60821.417706806512 0.004893042783 KS 2 2 0 0 0 0 10 60821.432140812704 0.004893008356 KS 2 2 0 0 0 0 10 60821.442450815087 0.004892983792 KS 2 2 0 0 0 0 10 60821.451729813004 0.004892961710 KS 2 2 0 0 0 0 10 60821.462039815414 0.004892937286 KS 2 2 0 0 0 0 10 60821.468225814007 0.004892922632 KS 2 2 0 0 0 0 10 60821.470287808840 0.004892917812 KS 2 2 0 0 0 0 10 60821.474411812635 0.004892908017 KS 2 2 0 0 0 0 10 60821.488845804632 0.004892874007 KS 2 2 0 0 0 0 10 60821.494000812922 0.004892861851 KS 2 2 0 0 0 0 10 60821.508434804967 0.004892827945 KS 2 2 0 0 0 0 10 60821.515651808061 0.004892811013 KS 2 2 0 0 0 0 10 60821.525961810453 0.004892786898 KS 2 2 0 0 0 0 10 60821.526992814959 0.004892784487 KS 2 2 0 0 0 0 10 60821.541426806961 0.004892750817 KS 2 2 0 0 0 0 10 60821.554829808666 0.004892719638 KS 2 2 0 0 0 0 10 60821.558953812460 0.004892710095 KS 2 2 0 0 0 0 10 60821.566170815562 0.004892693366 KS 2 2 0 0 0 0 10 60821.574418808974 0.004892674256 KS 2 2 0 0 0 0 10 60821.589883805480 0.004892638605 KS 2 2 0 0 0 0 10 60821.601224812367 0.004892612513 KS 2 2 0 0 0 0 10 60821.604317811668 0.004892605361 KS 2 2 0 0 0 0 10 60821.610503810284 0.004892591202 KS 2 2 0 0 0 0 10 60821.619782808213 0.004892569858 KS 2 2 0 0 0 0 10 60821.620813812693 0.004892567493 KS 2 2 0 0 0 0 10 60821.626999811292 0.004892553340 KS 2 2 0 0 0 0 10 60821.635247804694 0.004892534529 KS 2 2 0 0 0 0 10 60821.644526816786 0.004892513369 KS 2 2 0 0 0 0 10 60821.649681810883 0.004892501650 KS 2 2 0 0 0 0 10 60821.663084812631 0.004892471137 KS 2 2 0 0 0 0 10 60821.685766812220 0.004892419874 KS 2 2 0 0 0 0 10 60821.688859811505 0.004892412885 KS 2 2 0 0 0 0 10 60821.690921806316 0.004892408211 KS 2 2 0 0 0 0 10 60821.701231808732 0.004892384985 KS 2 2 0 0 0 0 10 60821.705355812524 0.004892375744 KS 2 2 0 0 0 0 10 60821.706386817005 0.004892373402 KS 2 2 0 0 0 0 10 60821.741440813826 0.004892295001 KS 2 2 0 0 0 0 10 60821.743502808641 0.004892290364 KS 2 2 0 0 0 0 10 60821.751750816235 0.004892271999 KS 2 2 0 0 0 0 10 60821.752781806546 0.004892269739 KS 2 2 0 0 0 0 10 60821.779587809959 0.004892210207 KS 2 2 0 0 0 0 10 60821.783711813744 0.004892201140 KS 2 2 0 0 0 0 10 60821.787835817544 0.004892192039 KS 2 2 0 0 0 0 10 60821.788866807858 0.004892189803 KS 2 2 0 0 0 0 10 60821.794021816156 0.004892178430 KS 2 2 0 0 0 0 10 60821.796083810952 0.004892173895 KS 2 2 0 0 0 0 10 60821.805362808878 0.004892153421 KS 2 2 0 0 0 0 10 60821.822889814360 0.004892115003 KS 2 2 0 0 0 0 10 60821.831137807787 0.004892096977 KS 2 2 0 0 0 0 10 60821.832168812288 0.004892094754 KS 2 2 0 0 0 0 10 60821.836292816056 0.004892085742 KS 2 2 0 0 0 0 10 60821.843509805011 0.004892070056 KS 2 2 0 0 0 0 10 60821.873408807702 0.004892005095 KS 2 2 0 0 0 0 10 60821.882687805618 0.004891985109 KS 2 2 0 0 0 0 10 60821.884749814593 0.004891980598 KS 2 2 0 0 0 0 10 60821.894028812488 0.004891960602 KS 2 2 0 0 0 0 10 60821.896090807300 0.004891956146 KS 2 2 0 0 0 0 10 60821.907431814198 0.004891931762 KS 2 2 0 0 0 0 10 60821.911555817998 0.004891922918 KS 2 2 0 0 0 0 10 60821.912586808327 0.004891920712 KS 2 2 0 0 0 0 10 60821.916710812126 0.004891911852 KS 2 2 0 0 0 0 10 60821.918772806918 0.004891907427 KS 2 2 0 0 0 0 10 60821.923927815186 0.004891896436 KS 2 2 0 0 0 0 10 60821.930113813813 0.004891883200 KS 2 2 0 0 0 0 10 60821.936299812394 0.004891870038 KS 2 2 0 0 0 0 10 60821.989911805053 0.004891756495 KS 2 2 0 0 0 0 10 60821.991973814017 0.004891752117 KS 2 2 0 0 0 0 10 60821.993004804346 0.004891749921 KS 2 2 0 0 0 0 10 60822.005376815728 0.004891723922 KS 2 2 0 0 0 0 10 60822.008469815016 0.004891717421 KS 2 2 0 0 0 0 10 60822.038368817737 0.004891654981 KS 2 2 0 0 0 0 10 60822.062081807682 0.004891605755 KS 2 2 0 0 0 0 10 60822.065174806955 0.004891599393 KS 2 2 0 0 0 0 10 60822.067236815942 0.004891595131 KS 2 2 0 0 0 0 10 60822.082701812465 0.004891563171 KS 2 2 0 0 0 0 10 60822.095073809660 0.004891537791 KS 2 2 0 0 0 0 10 60822.107445806868 0.004891512383 KS 2 2 0 0 0 0 10 60822.117755809267 0.004891491290 KS 2 2 0 0 0 0 10 60822.143530808179 0.004891438862 KS 2 2 0 0 0 0 10 60822.157964814386 0.004891409636 KS 2 2 0 0 0 0 10 60822.179615809500 0.004891365948 KS 2 2 0 0 0 0 10 60822.204359818073 0.004891316343 KS 2 2 0 0 0 0 10 60822.214669806298 0.004891295800 KS 2 2 0 0 0 0 10 60822.233227816309 0.004891258829 KS 2 2 0 0 0 0 10 60822.242506814207 0.004891240485 KS 2 2 0 0 0 0 10 60822.251785812098 0.004891222120 KS 2 2 0 0 0 0 10 60822.255909815876 0.004891214020 KS 2 2 0 0 0 0 10 60822.271374812413 0.004891183550 KS 2 2 0 0 0 0 10 60822.281684814809 0.004891163312 KS 2 2 0 0 0 0 10 60822.289932808243 0.004891147130 KS 2 2 0 0 0 0 10 60822.298180815821 0.004891131055 KS 2 2 0 0 0 0 10 60822.315707807153 0.004891096838 KS 2 2 0 0 0 0 10 60822.323955814728 0.004891080895 KS 2 2 0 0 0 0 10 60822.326017809539 0.004891076907 KS 2 2 0 0 0 0 10 60822.329110808839 0.004891070904 KS 2 2 0 0 0 0 10 60822.337358816446 0.004891054946 KS 2 2 0 0 0 0 10 60822.344575805347 0.004891041041 KS 2 2 0 0 0 0 10 60822.347668804650 0.004891035067 KS 2 2 0 0 0 0 10 60822.357978807051 0.004891015214 KS 2 2 0 0 0 0 10 60822.367257804965 0.004890997421 KS 2 2 0 0 0 0 10 60822.385815814961 0.004890961899 KS 2 2 0 0 0 0 10 60822.396125817332 0.004890942236 KS 2 2 0 0 0 0 10 60822.405404815245 0.004890924644 KS 2 2 0 0 0 0 10 60822.407466810067 0.004890920746 KS 2 2 0 0 0 0 10 60822.426024805869 0.004890885601 KS 2 2 0 0 0 0 10 60822.444582815868 0.004890850622 KS 2 2 0 0 0 0 10 60822.451799804782 0.004890837069 KS 2 2 0 0 0 0 10 60822.467264815479 0.004890808133 KS 2 2 0 0 0 0 10 60822.477574817880 0.004890788925 KS 2 2 0 0 0 0 10 60822.478605808185 0.004890786984 KS 2 2 0 0 0 0 10 60822.481698807514 0.004890781247 KS 2 2 0 0 0 0 10 60822.510566805702 0.004890727770 KS 2 2 0 0 0 0 10 60822.532217814998 0.004890687880 KS 2 2 0 0 0 0 10 60822.533248805336 0.004890686014 KS 2 2 0 0 0 0 10 60822.539434818101 0.004890674700 KS 2 2 0 0 0 0 10 60822.541496812912 0.004890670887 KS 2 2 0 0 0 0 10 60822.547682811509 0.004890659582 KS 2 2 0 0 0 0 10 60822.552837805633 0.004890650154 KS 2 2 0 0 0 0 10 60822.559023804236 0.004890638853 KS 2 2 0 0 0 0 10 60822.574488814914 0.004890610765 KS 2 2 0 0 0 0 10 60822.595108805538 0.004890573450 KS 2 2 0 0 0 0 10 60822.607480816916 0.004890551207 KS 2 2 0 0 0 0 10 60822.609542811731 0.004890547485 KS 2 2 0 0 0 0 10 60822.630162816513 0.004890510504 KS 2 2 0 0 0 0 10 60822.640472804742 0.004890492163 KS 2 2 0 0 0 0 10 60822.664185808841 0.004890450074 KS 2 2 0 0 0 0 10 60822.666247817809 0.004890446475 KS 2 2 0 0 0 0 10 60822.667278808149 0.004890444666 KS 2 2 0 0 0 0 10 60822.670371807434 0.004890439142 KS 2 2 0 0 0 0 10 60822.673464806751 0.004890433675 KS 2 2 0 0 0 0 10 60822.674495811248 0.004890431833 KS 2 2 0 0 0 0 10 60822.681712814349 0.004890419102 KS 2 2 0 0 0 0 10 60822.702332804985 0.004890382930 KS 2 2 0 0 0 0 10 60822.712642807369 0.004890364960 KS 2 2 0 0 0 0 10 60822.715735806654 0.004890359549 KS 2 2 0 0 0 0 10 60822.717797815639 0.004890355869 KS 2 2 0 0 0 0 10 60822.731200817348 0.004890332676 KS 2 2 0 0 0 0 10 60822.735324806972 0.004890325443 KS 2 2 0 0 0 0 10 60822.751820807997 0.004890296926 KS 2 2 0 0 0 0 10 60822.798215811684 0.004890217464 KS 2 2 0 0 0 0 10 60822.801308810966 0.004890212147 KS 2 2 0 0 0 0 10 60822.810587808899 0.004890196306 KS 2 2 0 0 0 0 10 60822.836362807790 0.004890152817 KS 2 2 0 0 0 0 10 60822.860075811895 0.004890113011 KS 2 2 0 0 0 0 10 60822.864199815695 0.004890106132 KS 2 2 0 0 0 0 10 60822.867292814988 0.004890100970 KS 2 2 0 0 0 0 10 60822.869354809798 0.004890097548 KS 2 2 0 0 0 0 10 60822.873478813594 0.004890090665 KS 2 2 0 0 0 0 10 60822.881726807024 0.004890076927 KS 2 2 0 0 0 0 10 60822.883788815992 0.004890073526 KS 2 2 0 0 0 0 10 60822.904408806608 0.004890039471 KS 2 2 0 0 0 0 10 60822.935338813810 0.004889988640 KS 2 2 0 0 0 0 10 60822.940493807903 0.004889980225 KS 2 2 0 0 0 0 10 60822.942555816890 0.004889976857 KS 2 2 0 0 0 0 10 60822.945648816210 0.004889971821 KS 2 2 0 0 0 0 10 60822.946679806505 0.004889970153 KS 2 2 0 0 0 0 10 60822.969361806122 0.004889933322 KS 2 2 0 0 0 0 10 60822.973485809930 0.004889926669 KS 2 2 0 0 0 0 10 60822.979671808532 0.004889916661 KS 2 2 0 0 0 0 10 60822.982764807814 0.004889911710 KS 2 2 0 0 0 0 10 60822.987919816117 0.004889903404 KS 2 2 0 0 0 0 10 60823.070399806941 0.004889772485 KS 2 2 0 0 0 0 10 60823.081740813832 0.004889754794 KS 2 2 0 0 0 0 10 60823.089988807261 0.004889741846 KS 2 2 0 0 0 0 10 60823.093081806542 0.004889737049 KS 2 2 0 0 0 0 10 60823.107515812737 0.004889714686 KS 2 2 0 0 0 0 10 60823.157003815735 0.004889638665 KS 2 2 0 0 0 0 10 60823.192057812563 0.004889585639 KS 2 2 0 0 0 0 10 60823.201336810451 0.004889571618 KS 2 2 0 0 0 0 10 60823.227111809368 0.004889533115 KS 2 2 0 0 0 0 10 60823.230204808671 0.004889528539 KS 2 2 0 0 0 0 10 60823.241545815548 0.004889511649 KS 2 2 0 0 0 0 10 60823.243607810365 0.004889508604 KS 2 2 0 0 0 0 10 60823.248762804488 0.004889500978 KS 2 2 0 0 0 0 10 60823.274537817580 0.004889463002 KS 2 2 0 0 0 0 10 60823.284847805774 0.004889448021 KS 2 2 0 0 0 0 10 60823.291033804370 0.004889438975 KS 2 2 0 0 0 0 10 60823.294126817853 0.004889434511 KS 2 2 0 0 0 0 10 60823.307529805395 0.004889415015 KS 2 2 0 0 0 0 10 60823.309591814357 0.004889412069 KS 2 2 0 0 0 0 10 60823.310622804674 0.004889410555 KS 2 2 0 0 0 0 10 60823.320932807085 0.004889395717 KS 2 2 0 0 0 0 10 60823.322994816039 0.004889392687 KS 2 2 0 0 0 0 10 60823.326087815379 0.004889388182 KS 2 2 0 0 0 0 10 60823.329180814652 0.004889383845 KS 2 2 0 0 0 0 10 60823.342583816374 0.004889364540 KS 2 2 0 0 0 0 10 60823.358048812856 0.004889342495 KS 2 2 0 0 0 0 10 60823.364234811475 0.004889333654 KS 2 2 0 0 0 0 10 60823.371451814552 0.004889323492 KS 2 2 0 0 0 0 10 60823.380730812460 0.004889310334 KS 2 2 0 0 0 0 10 60823.381761816958 0.004889308886 KS 2 2 0 0 0 0 10 60823.382792807303 0.004889307402 KS 2 2 0 0 0 0 10 60823.383823811768 0.004889305982 KS 2 2 0 0 0 0 10 60823.388978805883 0.004889298756 KS 2 2 0 0 0 0 10 60823.397226813482 0.004889287089 KS 2 2 0 0 0 0 10 60823.401350817273 0.004889281309 KS 2 2 0 0 0 0 10 60823.405474806875 0.004889275537 KS 2 2 0 0 0 0 10 60823.409598810683 0.004889269788 KS 2 2 0 0 0 0 10 60823.423001812376 0.004889251090 KS 2 2 0 0 0 0 10 60823.424032816867 0.004889249689 KS 2 2 0 0 0 0 10 60823.425063807187 0.004889248246 KS 2 2 0 0 0 0 10 60823.431249805784 0.004889239636 KS 2 2 0 0 0 0 10 60823.432280810257 0.004889238223 KS 2 2 0 0 0 0 10 60823.433311814761 0.004889236798 KS 2 2 0 0 0 0 10 60823.446714816463 0.004889218270 KS 2 2 0 0 0 0 10 60823.450838806087 0.004889212573 KS 2 2 0 0 0 0 10 60823.451869810569 0.004889211221 KS 2 2 0 0 0 0 10 60823.459086813665 0.004889201229 KS 2 2 0 0 0 0 10 60823.475582814649 0.004889178676 KS 2 2 0 0 0 0 10 60823.499295804587 0.004889146422 KS 2 2 0 0 0 0 10 60823.515791805579 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