H1 CRD 2 2021 12 9 9 H2 HERL 7840 35 1 4 ILRS H3 tandemx 1003001 6202 36605 0 1 1 H4 0 2021 12 9 7 0 2 2021 12 9 7 2 55 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 0.000 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 24840.000000 999.30 276.60 84.7 0 20 25202.880000 999.23 276.60 84.9 0 20 25557.120000 999.27 276.70 84.7 0 41 22921.920000 0 KS 3194 3194 122.977 104408.9 0.0 22.0 0.200 -0.290 -4.0 2 0 0 1 na 41 25505.280000 0 KS 3541 3541 122.977 104414.9 0.0 20.7 0.160 -0.320 -2.0 2 0 0 2 na 40 25289.280000 0 KS 6735 6735 122.977 104414.4 -6.0 21.3 0.180 -0.305 -3.0 2 2 0 3 na 50 KS 33.4 0.043 -0.183 2.0 0 10 25202.652664796103 0.006120621189 KS 2 2 0 0 0 0 10 25202.681084993730 0.006119671066 KS 2 2 0 0 0 0 10 25202.683190187263 0.006119600773 KS 2 2 0 0 0 0 10 25202.686347991721 0.006119495185 KS 2 2 0 0 0 0 10 25202.687400588486 0.006119460044 KS 2 2 0 0 0 0 10 25202.689505796173 0.006119389693 KS 2 2 0 0 0 0 10 25202.691610989685 0.006119319386 KS 2 2 0 0 0 0 10 25202.694768794155 0.006119213778 KS 2 2 0 0 0 0 10 25202.698979195355 0.006119073149 KS 2 2 0 0 0 0 10 25202.708452594578 0.006118756471 KS 2 2 0 0 0 0 10 25202.716873397020 0.006118475010 KS 2 2 0 0 0 0 10 25202.717925993765 0.006118439882 KS 2 2 0 0 0 0 10 25202.720031187319 0.006118369512 KS 2 2 0 0 0 0 10 25202.721083798244 0.006118334455 KS 2 2 0 0 0 0 10 25202.724241588524 0.006118228875 KS 2 2 0 0 0 0 10 25202.725294199484 0.006118193745 KS 2 2 0 0 0 0 10 25202.726346796229 0.006118158504 KS 2 2 0 0 0 0 10 25202.728451989744 0.006118088106 KS 2 2 0 0 0 0 10 25202.731609794212 0.006117982676 KS 2 2 0 0 0 0 10 25202.734767598648 0.006117877206 KS 2 2 0 0 0 0 10 25202.736872792186 0.006117806736 KS 2 2 0 0 0 0 10 25202.740030596661 0.006117701266 KS 2 2 0 0 0 0 10 25202.742135790175 0.006117630895 KS 2 2 0 0 0 0 10 25202.743188386950 0.006117595696 KS 2 2 0 0 0 0 10 25202.745293594645 0.006117525391 KS 2 2 0 0 0 0 10 25202.746346191414 0.006117490246 KS 2 2 0 0 0 0 10 25202.748451399119 0.006117419875 KS 2 2 0 0 0 0 10 25202.749503995865 0.006117384724 KS 2 2 0 0 0 0 10 25202.750556592637 0.006117349560 KS 2 2 0 0 0 0 10 25202.751609189385 0.006117314436 KS 2 2 0 0 0 0 10 25202.754766993847 0.006117208904 KS 2 2 0 0 0 0 10 25202.756872187369 0.006117138589 KS 2 2 0 0 0 0 10 25202.758977395080 0.006117068251 KS 2 2 0 0 0 0 10 25202.761082588594 0.006116997852 KS 2 2 0 0 0 0 10 25202.762135199522 0.006116962716 KS 2 2 0 0 0 0 10 25202.763187796306 0.006116927611 KS 2 2 0 0 0 0 10 25202.764240393054 0.006116892454 KS 2 2 0 0 0 0 10 25202.765292989821 0.006116857220 KS 2 2 0 0 0 0 10 25202.768450794249 0.006116751794 KS 2 2 0 0 0 0 10 25202.770555987805 0.006116681485 KS 2 2 0 0 0 0 10 25202.771608598731 0.006116646343 KS 2 2 0 0 0 0 10 25202.780029387017 0.006116364993 KS 2 2 0 0 0 0 10 25202.781081997945 0.006116329847 KS 2 2 0 0 0 0 10 25202.782134594716 0.006116294628 KS 2 2 0 0 0 0 10 25202.783187191478 0.006116259451 KS 2 2 0 0 0 0 10 25202.784239788238 0.006116224319 KS 2 2 0 0 0 0 10 25202.786344995936 0.006116154009 KS 2 2 0 0 0 0 10 25202.788450189457 0.006116083709 KS 2 2 0 0 0 0 10 25202.798976199608 0.006115732096 KS 2 2 0 0 0 0 10 25202.801081393127 0.006115661845 KS 2 2 0 0 0 0 10 25202.806344391098 0.006115486131 KS 2 2 0 0 0 0 10 25202.810554792327 0.006115345459 KS 2 2 0 0 0 0 10 25202.813712596800 0.006115240016 KS 2 2 0 0 0 0 10 25202.814765193554 0.006115204898 KS 2 2 0 0 0 0 10 25202.815817790325 0.006115169710 KS 2 2 0 0 0 0 10 25202.818975594758 0.006115064247 KS 2 2 0 0 0 0 10 25202.825291189536 0.006114853361 KS 2 2 0 0 0 0 10 25202.829501590751 0.006114712727 KS 2 2 0 0 0 0 10 25202.833711991972 0.006114572168 KS 2 2 0 0 0 0 10 25202.834764588745 0.006114537049 KS 2 2 0 0 0 0 10 25202.835817199669 0.006114501812 KS 2 2 0 0 0 0 10 25202.836869796448 0.006114466618 KS 2 2 0 0 0 0 10 25202.838974989986 0.006114396396 KS 2 2 0 0 0 0 10 25202.840027586718 0.006114361293 KS 2 2 0 0 0 0 10 25202.843185391213 0.006114255782 KS 2 2 0 0 0 0 10 25202.845290598908 0.006114185467 KS 2 2 0 0 0 0 10 25202.848448389162 0.006114080111 KS 2 2 0 0 0 0 10 25202.850553596859 0.006114009840 KS 2 2 0 0 0 0 10 25202.851606193638 0.006113974606 KS 2 2 0 0 0 0 10 25202.854763998093 0.006113869215 KS 2 2 0 0 0 0 10 25202.860026996097 0.006113693468 KS 2 2 0 0 0 0 10 25202.861079592840 0.006113658324 KS 2 2 0 0 0 0 10 25202.863184786402 0.006113588128 KS 2 2 0 0 0 0 10 25202.864237397338 0.006113552926 KS 2 2 0 0 0 0 10 25202.868447798546 0.006113412387 KS 2 2 0 0 0 0 10 25202.871605588829 0.006113306979 KS 2 2 0 0 0 0 10 25202.874763393317 0.006113201563 KS 2 2 0 0 0 0 10 25202.875815990076 0.006113166397 KS 2 2 0 0 0 0 10 25202.877921197763 0.006113096077 KS 2 2 0 0 0 0 10 25202.878973794532 0.006113060944 KS 2 2 0 0 0 0 10 25202.880026391279 0.006113025868 KS 2 2 0 0 0 0 10 25202.884236792502 0.006112885273 KS 2 2 0 0 0 0 10 25202.887394596971 0.006112779814 KS 2 2 0 0 0 0 10 25202.888447193738 0.006112744760 KS 2 2 0 0 0 0 10 25202.900025786475 0.006112358223 KS 2 2 0 0 0 0 10 25202.901078397427 0.006112323079 KS 2 2 0 0 0 0 10 25202.906341395422 0.006112147484 KS 2 2 0 0 0 0 10 25202.908446588929 0.006112077250 KS 2 2 0 0 0 0 10 25202.911604393392 0.006111971778 KS 2 2 0 0 0 0 10 25202.912656990145 0.006111936734 KS 2 2 0 0 0 0 10 25202.914762197845 0.006111866399 KS 2 2 0 0 0 0 10 25202.915814794603 0.006111831339 KS 2 2 0 0 0 0 10 25202.917919988131 0.006111761138 KS 2 2 0 0 0 0 10 25202.918972599073 0.006111725922 KS 2 2 0 0 0 0 10 25202.922130389365 0.006111620548 KS 2 2 0 0 0 0 10 25202.924235597054 0.006111550248 KS 2 2 0 0 0 0 10 25202.925288193837 0.006111515179 KS 2 2 0 0 0 0 10 25202.927393387360 0.006111444859 KS 2 2 0 0 0 0 10 25202.929498595064 0.006111374667 KS 2 2 0 0 0 0 10 25202.932656399503 0.006111269265 KS 2 2 0 0 0 0 10 25202.933708996291 0.006111234074 KS 2 2 0 0 0 0 10 25202.936866786549 0.006111128770 KS 2 2 0 0 0 0 10 25202.937919397507 0.006111093649 KS 2 2 0 0 0 0 10 25202.940024591031 0.006111023406 KS 2 2 0 0 0 0 10 25202.946340199969 0.006110812626 KS 2 2 0 0 0 0 10 25202.948445393494 0.006110742321 KS 2 2 0 0 0 0 10 25202.949497990213 0.006110707266 KS 2 2 0 0 0 0 10 25202.950550587025 0.006110672151 KS 2 2 0 0 0 0 10 25202.953708391459 0.006110566798 KS 2 2 0 0 0 0 10 25202.954760988247 0.006110531695 KS 2 2 0 0 0 0 10 25202.955813599178 0.006110496643 KS 2 2 0 0 0 0 10 25202.961076597177 0.006110321018 KS 2 2 0 0 0 0 10 25202.965286998416 0.006110180426 KS 2 2 0 0 0 0 10 25202.969497399626 0.006110040087 KS 2 2 0 0 0 0 10 25202.984233796848 0.006109548380 KS 2 2 0 0 0 0 10 25202.989496794814 0.006109372753 KS 2 2 0 0 0 0 10 25202.994759792812 0.006109197249 KS 2 2 0 0 0 0 10 25202.997917597265 0.006109091942 KS 2 2 0 0 0 0 10 25203.010548786776 0.006108670609 KS 2 2 0 0 0 0 10 25203.011601397739 0.006108635450 KS 2 2 0 0 0 0 10 25203.017916992485 0.006108424927 KS 2 2 0 0 0 0 10 25203.037916387691 0.006107757856 KS 2 2 0 0 0 0 10 25203.055810589370 0.006107161183 KS 2 2 0 0 0 0 10 25203.057915797062 0.006107090968 KS 2 2 0 0 0 0 10 25203.070546986569 0.006106669876 KS 2 2 0 0 0 0 10 25203.071599597492 0.006106634737 KS 2 2 0 0 0 0 10 25203.074757387818 0.006106529460 KS 2 2 0 0 0 0 10 25203.080020399969 0.006106353997 KS 2 2 0 0 0 0 10 25203.083178190270 0.006106248723 KS 2 2 0 0 0 0 10 25203.086335994727 0.006106143532 KS 2 2 0 0 0 0 10 25203.087388591484 0.006106108328 KS 2 2 0 0 0 0 10 25203.111598387921 0.006105301343 KS 2 2 0 0 0 0 10 25203.113703595633 0.006105231183 KS 2 2 0 0 0 0 10 25203.114756192410 0.006105196109 KS 2 2 0 0 0 0 10 25203.116861385930 0.006105125933 KS 2 2 0 0 0 0 10 25203.117913996848 0.006105090807 KS 2 2 0 0 0 0 10 25203.118966593643 0.006105055740 KS 2 2 0 0 0 0 10 25203.121071787178 0.006104985535 KS 2 2 0 0 0 0 10 25203.122124398098 0.006104950511 KS 2 2 0 0 0 0 10 25203.126334799320 0.006104810198 KS 2 2 0 0 0 0 10 25203.135808198569 0.006104494490 KS 2 2 0 0 0 0 10 25203.136860795297 0.006104459402 KS 2 2 0 0 0 0 10 25203.137913392091 0.006104424272 KS 2 2 0 0 0 0 10 25203.138965988854 0.006104389192 KS 2 2 0 0 0 0 10 25203.144228986848 0.006104213817 KS 2 2 0 0 0 0 10 25203.145281597781 0.006104178688 KS 2 2 0 0 0 0 10 25203.150544595775 0.006104003360 KS 2 2 0 0 0 0 10 25203.151597192534 0.006103968286 KS 2 2 0 0 0 0 10 25203.152649789327 0.006103933189 KS 2 2 0 0 0 0 10 25203.153702386081 0.006103898112 KS 2 2 0 0 0 0 10 25203.154754997016 0.006103863023 KS 2 2 0 0 0 0 10 25203.160017995006 0.006103687619 KS 2 2 0 0 0 0 10 25203.161070591783 0.006103652542 KS 2 2 0 0 0 0 10 25203.163175799490 0.006103582398 KS 2 2 0 0 0 0 10 25203.164228396236 0.006103547322 KS 2 2 0 0 0 0 10 25203.167386186529 0.006103442076 KS 2 2 0 0 0 0 10 25203.168438797449 0.006103407123 KS 2 2 0 0 0 0 10 25203.169491394230 0.006103372012 KS 2 2 0 0 0 0 10 25203.183175194714 0.006102916143 KS 2 2 0 0 0 0 10 25203.188438192707 0.006102740743 KS 2 2 0 0 0 0 10 25203.189490789438 0.006102705642 KS 2 2 0 0 0 0 10 25203.191595997158 0.006102635508 KS 2 2 0 0 0 0 10 25203.192648593930 0.006102600442 KS 2 2 0 0 0 0 10 25203.196858995144 0.006102460242 KS 2 2 0 0 0 0 10 25203.202121993154 0.006102284901 KS 2 2 0 0 0 0 10 25203.212647989140 0.006101934272 KS 2 2 0 0 0 0 10 25203.215805793619 0.006101829084 KS 2 2 0 0 0 0 10 25203.218963598078 0.006101723872 KS 2 2 0 0 0 0 10 25203.220016194854 0.006101688814 KS 2 2 0 0 0 0 10 25203.224226596088 0.006101548562 KS 2 2 0 0 0 0 10 25203.228436997325 0.006101408373 KS 2 2 0 0 0 0 10 25203.231594787598 0.006101303139 KS 2 2 0 0 0 0 10 25203.232647398561 0.006101268108 KS 2 2 0 0 0 0 10 25203.238962993315 0.006101057806 KS 2 2 0 0 0 0 10 25203.240015590074 0.006101022733 KS 2 2 0 0 0 0 10 25203.241068186857 0.006100987620 KS 2 2 0 0 0 0 10 25203.242120797783 0.006100952547 KS 2 2 0 0 0 0 10 25203.246331199001 0.006100812371 KS 2 2 0 0 0 0 10 25203.247383795765 0.006100777355 KS 2 2 0 0 0 0 10 25203.249488989310 0.006100707227 KS 2 2 0 0 0 0 10 25203.250541586058 0.006100672209 KS 2 2 0 0 0 0 10 25203.251594197014 0.006100637160 KS 2 2 0 0 0 0 10 25203.254751987318 0.006100531955 KS 2 2 0 0 0 0 10 25203.256857195003 0.006100461820 KS 2 2 0 0 0 0 10 25203.260014999484 0.006100356740 KS 2 2 0 0 0 0 10 25203.261067596234 0.006100321656 KS 2 2 0 0 0 0 10 25203.265277997451 0.006100181512 KS 2 2 0 0 0 0 10 25203.273698799931 0.006099901026 KS 2 2 0 0 0 0 10 25203.274751396710 0.006099865974 KS 2 2 0 0 0 0 10 25203.278961797946 0.006099725833 KS 2 2 0 0 0 0 10 25203.291592987470 0.006099305257 KS 2 2 0 0 0 0 10 25203.295803388707 0.006099165120 KS 2 2 0 0 0 0 10 25203.304224191190 0.006098884672 KS 2 2 0 0 0 0 10 25203.306329398890 0.006098814700 KS 2 2 0 0 0 0 10 25203.307381995623 0.006098779646 KS 2 2 0 0 0 0 10 25203.315802798104 0.006098499325 KS 2 2 0 0 0 0 10 25203.318960588422 0.006098394168 KS 2 2 0 0 0 0 10 25203.320013199344 0.006098359121 KS 2 2 0 0 0 0 10 25203.338959997816 0.006097728538 KS 2 2 0 0 0 0 10 25203.344222995816 0.006097553367 KS 2 2 0 0 0 0 10 25203.347380786113 0.006097448264 KS 2 2 0 0 0 0 10 25203.350538590594 0.006097343157 KS 2 2 0 0 0 0 10 25203.358959393063 0.006097062925 KS 2 2 0 0 0 0 10 25203.360011989805 0.006097027997 KS 2 2 0 0 0 0 10 25203.361064586601 0.006096992875 KS 2 2 0 0 0 0 10 25203.364222391063 0.006096887782 KS 2 2 0 0 0 0 10 25203.370537999992 0.006096677643 KS 2 2 0 0 0 0 10 25203.372643193538 0.006096607517 KS 2 2 0 0 0 0 10 25203.373695790290 0.006096572566 KS 2 2 0 0 0 0 10 25203.374748387049 0.006096537470 KS 2 2 0 0 0 0 10 25203.381063996005 0.006096327349 KS 2 2 0 0 0 0 10 25203.382116592791 0.006096292337 KS 2 2 0 0 0 0 10 25203.386326994003 0.006096152303 KS 2 2 0 0 0 0 10 25203.393695199721 0.006095907101 KS 2 2 0 0 0 0 10 25203.400010794479 0.006095696979 KS 2 2 0 0 0 0 10 25203.402115988023 0.006095626942 KS 2 2 0 0 0 0 10 25203.403168598972 0.006095591918 KS 2 2 0 0 0 0 10 25203.405273792486 0.006095521935 KS 2 2 0 0 0 0 10 25203.411589387266 0.006095311839 KS 2 2 0 0 0 0 10 25203.413694594968 0.006095241731 KS 2 2 0 0 0 0 10 25203.421062786479 0.006094996670 KS 2 2 0 0 0 0 10 25203.426325798675 0.006094821574 KS 2 2 0 0 0 0 10 25203.427378395438 0.006094786577 KS 2 2 0 0 0 0 10 25203.433693990178 0.006094576490 KS 2 2 0 0 0 0 10 25203.435799197901 0.006094506432 KS 2 2 0 0 0 0 10 25203.450535595142 0.006094016369 KS 2 2 0 0 0 0 10 25203.452640788686 0.006093946289 KS 2 2 0 0 0 0 10 25203.458956397620 0.006093736305 KS 2 2 0 0 0 0 10 25203.463166798872 0.006093596266 KS 2 2 0 0 0 0 10 25203.478955792882 0.006093071222 KS 2 2 0 0 0 0 10 25203.491586996606 0.006092651219 KS 2 2 0 0 0 0 10 25203.493692190135 0.006092581222 KS 2 2 0 0 0 0 10 25203.500007799085 0.006092371256 KS 2 2 0 0 0 0 10 25203.509481198321 0.006092056275 KS 2 2 0 0 0 0 10 25203.515796793093 0.006091846261 KS 2 2 0 0 0 0 10 25203.517901986614 0.006091776333 KS 2 2 0 0 0 0 10 25203.518954597581 0.006091741300 KS 2 2 0 0 0 0 10 25203.523164998811 0.006091601392 KS 2 2 0 0 0 0 10 25203.525270192355 0.006091531381 KS 2 2 0 0 0 0 10 25203.531585787127 0.006091321466 KS 2 2 0 0 0 0 10 25203.534743591573 0.006091216527 KS 2 2 0 0 0 0 10 25203.549479988840 0.006090726682 KS 2 2 0 0 0 0 10 25203.550532599777 0.006090691701 KS 2 2 0 0 0 0 10 25203.551585196544 0.006090656693 KS 2 2 0 0 0 0 10 25203.558953388109 0.006090411808 KS 2 2 0 0 0 0 10 25203.563163789356 0.006090271870 KS 2 2 0 0 0 0 10 25203.574742396292 0.006089887163 KS 2 2 0 0 0 0 10 25203.577900186606 0.006089782171 KS 2 2 0 0 0 0 10 25203.583163198775 0.006089607211 KS 2 2 0 0 0 0 10 25203.593689194776 0.006089257537 KS 2 2 0 0 0 0 10 25203.607372995269 0.006088802865 KS 2 2 0 0 0 0 10 25203.638950997510 0.006087753836 KS 2 2 0 0 0 0 10 25203.650529590294 0.006087369269 KS 2 2 0 0 0 0 10 25203.660002989567 0.006087054550 KS 2 2 0 0 0 0 10 25203.667371195256 0.006086809854 KS 2 2 0 0 0 0 10 25203.670528999748 0.006086704972 KS 2 2 0 0 0 0 10 25203.674739386826 0.006086565139 KS 2 2 0 0 0 0 10 25203.689475798256 0.006086075773 KS 2 2 0 0 0 0 10 25203.714738191551 0.006085236983 KS 2 2 0 0 0 0 10 25203.723158994047 0.006084957368 KS 2 2 0 0 0 0 10 25203.746316193804 0.006084188662 KS 2 2 0 0 0 0 10 25203.749473998265 0.006084083908 KS 2 2 0 0 0 0 10 25203.754736996304 0.006083909141 KS 2 2 0 0 0 0 10 25203.756842189811 0.006083839297 KS 2 2 0 0 0 0 10 25203.773683794804 0.006083280295 KS 2 2 0 0 0 0 10 25203.793683190091 0.006082616631 KS 2 2 0 0 0 0 10 25203.821050791090 0.006081708529 KS 2 2 0 0 0 0 10 25203.823155998814 0.006081638701 KS 2 2 0 0 0 0 10 25203.841050186406 0.006081045078 KS 2 2 0 0 0 0 10 25203.842102797343 0.006081010109 KS 2 2 0 0 0 0 10 25203.897890596166 0.006079159794 KS 2 2 0 0 0 0 10 25203.962099197488 0.006077031065 KS 2 2 0 0 0 0 10 25203.972625193522 0.006076682104 KS 2 2 0 0 0 0 10 25204.012623998341 0.006075356580 KS 2 2 0 0 0 0 10 25204.016834399553 0.006075217132 KS 2 2 0 0 0 0 10 25204.021044786645 0.006075077567 KS 2 2 0 0 0 0 10 25204.056833190168 0.006073891933 KS 2 2 0 0 0 0 10 25204.089463789273 0.006072811040 KS 2 2 0 0 0 0 10 25204.122094388373 0.006071730490 KS 2 2 0 0 0 0 10 25204.148409392646 0.006070859258 KS 2 2 0 0 0 0 10 25204.161040596398 0.006070441101 KS 2 2 0 0 0 0 10 25204.167356191197 0.006070232019 KS 2 2 0 0 0 0 10 25204.194723792276 0.006069326205 KS 2 2 0 0 0 0 10 25204.231564792619 0.006068107097 KS 2 2 0 0 0 0 10 25204.282089593524 0.006066435548 KS 2 2 0 0 0 0 10 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