H1 CRD 2 2021 12 21 23 H2 HERL 7840 35 1 4 ILRS H3 tandemx 1003001 6202 36605 0 1 1 H4 0 2021 12 21 17 27 44 2021 12 21 17 30 2 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 0.000 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 62337.600000 1020.75 275.20 75.0 0 20 62700.480000 1020.73 275.10 74.9 0 20 63063.360000 1020.76 275.00 75.1 0 41 61162.560000 0 KS 3657 3657 122.977 104415.6 0.0 24.0 0.340 -0.260 -5.0 2 0 0 1 na 41 63201.600000 0 KS 7777 7777 122.977 104415.6 0.0 21.3 0.250 -0.300 -4.0 2 0 0 2 na 40 62933.760000 0 KS 11434 11434 122.977 104415.6 0.0 22.7 0.295 -0.280 -4.5 2 2 0 3 na 50 KS 29.4 0.099 -0.260 1.0 0 10 62864.376592594277 0.003593115867 KS 2 2 0 0 0 0 10 62864.836778194853 0.003587647171 KS 2 2 0 0 0 0 10 62865.167939803169 0.003583795341 KS 2 2 0 0 0 0 10 62865.174390995698 0.003583721047 KS 2 2 0 0 0 0 10 62865.185143002135 0.003583597191 KS 2 2 0 0 0 0 10 62865.455018196443 0.003580513074 KS 2 2 0 0 0 0 10 62865.457168603382 0.003580488767 KS 2 2 0 0 0 0 10 62865.467920595655 0.003580366831 KS 2 2 0 0 0 0 10 62865.489424594365 0.003580123294 KS 2 2 0 0 0 0 10 62865.494800597562 0.003580062448 KS 2 2 0 0 0 0 10 62865.496951004504 0.003580038039 KS 2 2 0 0 0 0 10 62865.498026207998 0.003580025913 KS 2 2 0 0 0 0 10 62865.506627807483 0.003579928659 KS 2 2 0 0 0 0 10 62865.514154203481 0.003579843537 KS 2 2 0 0 0 0 10 62865.521680599479 0.003579758432 KS 2 2 0 0 0 0 10 62865.523831006445 0.003579734164 KS 2 2 0 0 0 0 10 62865.533507795206 0.003579624965 KS 2 2 0 0 0 0 10 62865.538883798461 0.003579564173 KS 2 2 0 0 0 0 10 62865.553936604623 0.003579394400 KS 2 2 0 0 0 0 10 62865.573290196362 0.003579176234 KS 2 2 0 0 0 0 10 62865.599094994775 0.003578885772 KS 2 2 0 0 0 0 10 62865.615223004427 0.003578704437 KS 2 2 0 0 0 0 10 62865.629200607137 0.003578547401 KS 2 2 0 0 0 0 10 62865.643178195645 0.003578390524 KS 2 2 0 0 0 0 10 62865.645328602595 0.003578366358 KS 2 2 0 0 0 0 10 62865.650704605820 0.003578306101 KS 2 2 0 0 0 0 10 62865.662531801543 0.003578173470 KS 2 2 0 0 0 0 10 62865.666832601298 0.003578125218 KS 2 2 0 0 0 0 10 62865.679735000503 0.003577980783 KS 2 2 0 0 0 0 10 62865.690487006943 0.003577860424 KS 2 2 0 0 0 0 10 62865.695862995997 0.003577800213 KS 2 2 0 0 0 0 10 62865.702314202698 0.003577728077 KS 2 2 0 0 0 0 10 62865.707690205898 0.003577668040 KS 2 2 0 0 0 0 10 62865.719517401642 0.003577535836 KS 2 2 0 0 0 0 10 62865.720592605115 0.003577523790 KS 2 2 0 0 0 0 10 62865.752848596066 0.003577163835 KS 2 2 0 0 0 0 10 62865.772202201984 0.003576948209 KS 2 2 0 0 0 0 10 62865.780803801459 0.003576852309 KS 2 2 0 0 0 0 10 62865.792630997220 0.003576720736 KS 2 2 0 0 0 0 10 62865.793706200679 0.003576708790 KS 2 2 0 0 0 0 10 62865.809834196184 0.003576529437 KS 2 2 0 0 0 0 10 62865.825962205806 0.003576350329 KS 2 2 0 0 0 0 10 62865.827037395135 0.003576338410 KS 2 2 0 0 0 0 10 62865.829187802089 0.003576314506 KS 2 2 0 0 0 0 10 62865.830263005560 0.003576302550 KS 2 2 0 0 0 0 10 62865.835638994612 0.003576242940 KS 2 2 0 0 0 0 10 62865.839939794342 0.003576195218 KS 2 2 0 0 0 0 10 62865.841014997814 0.003576183255 KS 2 2 0 0 0 0 10 62865.859293400227 0.003575980594 KS 2 2 0 0 0 0 10 62865.861443807218 0.003575956746 KS 2 2 0 0 0 0 10 62865.863594200011 0.003575932979 KS 2 2 0 0 0 0 10 62865.865744606953 0.003575909112 KS 2 2 0 0 0 0 10 62865.868970203201 0.003575873487 KS 2 2 0 0 0 0 10 62865.870045406699 0.003575861487 KS 2 2 0 0 0 0 10 62865.884022995184 0.003575706805 KS 2 2 0 0 0 0 10 62865.885098198697 0.003575694903 KS 2 2 0 0 0 0 10 62865.886173402151 0.003575682973 KS 2 2 0 0 0 0 10 62865.888323794927 0.003575659189 KS 2 2 0 0 0 0 10 62865.891549405394 0.003575623497 KS 2 2 0 0 0 0 10 62865.892624594674 0.003575611657 KS 2 2 0 0 0 0 10 62865.894775001637 0.003575587828 KS 2 2 0 0 0 0 10 62865.895850205128 0.003575575898 KS 2 2 0 0 0 0 10 62865.898000597903 0.003575552171 KS 2 2 0 0 0 0 10 62865.909827807812 0.003575421413 KS 2 2 0 0 0 0 10 62865.913053404082 0.003575385838 KS 2 2 0 0 0 0 10 62865.917354203813 0.003575338304 KS 2 2 0 0 0 0 10 62865.923805396349 0.003575267055 KS 2 2 0 0 0 0 10 62865.928106196078 0.003575219621 KS 2 2 0 0 0 0 10 62865.934557402789 0.003575148398 KS 2 2 0 0 0 0 10 62865.935632606243 0.003575136539 KS 2 2 0 0 0 0 10 62865.943159002248 0.003575053537 KS 2 2 0 0 0 0 10 62865.947459801982 0.003575006168 KS 2 2 0 0 0 0 10 62865.950685398251 0.003574970579 KS 2 2 0 0 0 0 10 62865.951760601733 0.003574958748 KS 2 2 0 0 0 0 10 62865.959286997733 0.003574875778 KS 2 2 0 0 0 0 10 62865.962512608157 0.003574840236 KS 2 2 0 0 0 0 10 62865.963587797452 0.003574828389 KS 2 2 0 0 0 0 10 62865.972189396941 0.003574733670 KS 2 2 0 0 0 0 10 62865.975415007391 0.003574698148 KS 2 2 0 0 0 0 10 62865.979715807113 0.003574650875 KS 2 2 0 0 0 0 10 62865.982941403362 0.003574615379 KS 2 2 0 0 0 0 10 62865.997994195362 0.003574449879 KS 2 2 0 0 0 0 10 62866.005520605541 0.003574367102 KS 2 2 0 0 0 0 10 62866.020573397538 0.003574201801 KS 2 2 0 0 0 0 10 62866.024874197277 0.003574154647 KS 2 2 0 0 0 0 10 62866.031325403998 0.003574083839 KS 2 2 0 0 0 0 10 62866.046378195963 0.003573918839 KS 2 2 0 0 0 0 10 62866.061431002147 0.003573753892 KS 2 2 0 0 0 0 10 62866.078634201090 0.003573565599 KS 2 2 0 0 0 0 10 62866.093687007306 0.003573400875 KS 2 2 0 0 0 0 10 62866.102288606748 0.003573306917 KS 2 2 0 0 0 0 10 62866.119491805684 0.003573119116 KS 2 2 0 0 0 0 10 62866.127018201695 0.003573037048 KS 2 2 0 0 0 0 10 62866.131319001440 0.003572990065 KS 2 2 0 0 0 0 10 62866.143146197179 0.003572861115 KS 2 2 0 0 0 0 10 62866.176477405776 0.003572498325 KS 2 2 0 0 0 0 10 62866.196906200987 0.003572276252 KS 2 2 0 0 0 0 10 62866.208733396722 0.003572147808 KS 2 2 0 0 0 0 10 62866.233463005879 0.003571879498 KS 2 2 0 0 0 0 10 62866.239914198385 0.003571809630 KS 2 2 0 0 0 0 10 62866.242064605328 0.003571786320 KS 2 2 0 0 0 0 10 62866.248515797851 0.003571716369 KS 2 2 0 0 0 0 10 62866.253891801063 0.003571658179 KS 2 2 0 0 0 0 10 62866.256042208019 0.003571634941 KS 2 2 0 0 0 0 10 62866.261418197060 0.003571576707 KS 2 2 0 0 0 0 10 62866.267869403747 0.003571506975 KS 2 2 0 0 0 0 10 62866.270019796551 0.003571483629 KS 2 2 0 0 0 0 10 62866.278621396024 0.003571390662 KS 2 2 0 0 0 0 10 62866.281847006435 0.003571355776 KS 2 2 0 0 0 0 10 62866.288298198964 0.003571286061 KS 2 2 0 0 0 0 10 62866.300125394722 0.003571158315 KS 2 2 0 0 0 0 10 62866.306576601403 0.003571088762 KS 2 2 0 0 0 0 10 62866.314102997407 0.003571007501 KS 2 2 0 0 0 0 10 62866.318403797124 0.003570961107 KS 2 2 0 0 0 0 10 62866.342058202786 0.003570706159 KS 2 2 0 0 0 0 10 62866.356035805499 0.003570555721 KS 2 2 0 0 0 0 10 62866.370013408181 0.003570405350 KS 2 2 0 0 0 0 10 62866.372163800952 0.003570382221 KS 2 2 0 0 0 0 10 62866.385066200150 0.003570243663 KS 2 2 0 0 0 0 10 62866.387216607104 0.003570220500 KS 2 2 0 0 0 0 10 62866.399043802854 0.003570093526 KS 2 2 0 0 0 0 10 62866.417322205255 0.003569897448 KS 2 2 0 0 0 0 10 62866.436675797020 0.003569690085 KS 2 2 0 0 0 0 10 62866.454954199466 0.003569494445 KS 2 2 0 0 0 0 10 62866.483984594122 0.003569184218 KS 2 2 0 0 0 0 10 62866.557098203845 0.003568405250 KS 2 2 0 0 0 0 10 62866.661392601014 0.003567300126 KS 2 2 0 0 0 0 10 62866.710851805099 0.003566778452 KS 2 2 0 0 0 0 10 62866.717302997612 0.003566710555 KS 2 2 0 0 0 0 10 62866.752784598981 0.003566337510 KS 2 2 0 0 0 0 10 62866.823747801700 0.003565593821 KS 2 2 0 0 0 0 10 62867.039863006200 0.003563349045 KS 2 2 0 0 0 0 10 62867.157059802527 0.003562144509 KS 2 2 0 0 0 0 10 62867.251677396741 0.003561178526 KS 2 2 0 0 0 0 10 62867.278557398630 0.003560905115 KS 2 2 0 0 0 0 10 62867.324791006404 0.003560436060 KS 2 2 0 0 0 0 10 62867.387152595498 0.003559805600 KS 2 2 0 0 0 0 10 62867.803254994678 0.003555663710 KS 2 2 0 0 0 0 10 62867.849488602457 0.003555210507 KS 2 2 0 0 0 0 10 62867.888195800084 0.003554832235 KS 2 2 0 0 0 0 10 62867.933354204377 0.003554392062 KS 2 2 0 0 0 0 10 62868.016144602811 0.003553588509 KS 2 2 0 0 0 0 10 62868.052701407667 0.003553235106 KS 2 2 0 0 0 0 10 62868.072054999371 0.003553048498 KS 2 2 0 0 0 0 10 62868.082807005775 0.003552944853 KS 2 2 0 0 0 0 10 62868.091408605245 0.003552861989 KS 2 2 0 0 0 0 10 62868.094634201477 0.003552830943 KS 2 2 0 0 0 0 10 62868.113987807389 0.003552644696 KS 2 2 0 0 0 0 10 62868.135491806053 0.003552438184 KS 2 2 0 0 0 0 10 62868.149469394585 0.003552304041 KS 2 2 0 0 0 0 10 62868.166672607687 0.003552139164 KS 2 2 0 0 0 0 10 62868.173123800182 0.003552077351 KS 2 2 0 0 0 0 10 62868.175274207145 0.003552056840 KS 2 2 0 0 0 0 10 62868.189251795652 0.003551923017 KS 2 2 0 0 0 0 10 62868.195703002327 0.003551861324 KS 2 2 0 0 0 0 10 62868.310749405846 0.003550765825 KS 2 2 0 0 0 0 10 62868.322576601525 0.003550653762 KS 2 2 0 0 0 0 10 62868.578474206925 0.003548250266 KS 2 2 0 0 0 0 10 62868.606429398109 0.003547990389 KS 2 2 0 0 0 0 10 62868.656963805603 0.003547521735 KS 2 2 0 0 0 0 10 62868.762333406127 0.003546550079 KS 2 2 0 0 0 0 10 62868.790288597320 0.003546293529 KS 2 2 0 0 0 0 10 62868.882755798627 0.003545448597 KS 2 2 0 0 0 0 10 62868.917162196475 0.003545135655 KS 2 2 0 0 0 0 10 62868.932215002654 0.003544998972 KS 2 2 0 0 0 0 10 62868.939741398602 0.003544930721 KS 2 2 0 0 0 0 10 62868.942966994869 0.003544901451 KS 2 2 0 0 0 0 10 62868.997802202086 0.003544405303 KS 2 2 0 0 0 0 10 62869.192413407701 0.003542660256 KS 2 2 0 0 0 0 10 62869.508522195089 0.003539879404 KS 2 2 0 0 0 0 10 62869.587011807884 0.003539199252 KS 2 2 0 0 0 0 10 62869.677328602242 0.003538421603 KS 2 2 0 0 0 0 10 62869.687005405199 0.003538338648 KS 2 2 0 0 0 0 10 62869.699907804382 0.003538228052 KS 2 2 0 0 0 0 10 62869.716035799813 0.003538090051 KS 2 2 0 0 0 0 10 62869.762269407577 0.003537695242 KS 2 2 0 0 0 0 10 62869.763344596864 0.003537686072 KS 2 2 0 0 0 0 10 62869.768720600116 0.003537640197 KS 2 2 0 0 0 0 10 62869.774096603289 0.003537594438 KS 2 2 0 0 0 0 10 62869.777322199547 0.003537567022 KS 2 2 0 0 0 0 10 62869.794525398472 0.003537420638 KS 2 2 0 0 0 0 10 62869.804202201407 0.003537338435 KS 2 2 0 0 0 0 10 62869.820330196864 0.003537201479 KS 2 2 0 0 0 0 10 62869.821405400306 0.003537192340 KS 2 2 0 0 0 0 10 62869.825706200093 0.003537155837 KS 2 2 0 0 0 0 10 62869.826781403573 0.003537146754 KS 2 2 0 0 0 0 10 62869.889143006771 0.003536619144 KS 2 2 0 0 0 0 10 62869.911722194703 0.003536428815 KS 2 2 0 0 0 0 10 62869.970858201655 0.003535931824 KS 2 2 0 0 0 0 10 62869.982685397355 0.003535832684 KS 2 2 0 0 0 0 10 62870.264387800981 0.003533499475 KS 2 2 0 0 0 0 10 62870.282666203390 0.003533349853 KS 2 2 0 0 0 0 10 62870.292343006310 0.003533270753 KS 2 2 0 0 0 0 10 62870.295568602569 0.003533244454 KS 2 2 0 0 0 0 10 62870.326749404166 0.003532990082 KS 2 2 0 0 0 0 10 62870.363306194781 0.003532692654 KS 2 2 0 0 0 0 10 62870.396637403336 0.003532422320 KS 2 2 0 0 0 0 10 62870.402013406515 0.003532378778 KS 2 2 0 0 0 0 10 62870.417066198502 0.003532257003 KS 2 2 0 0 0 0 10 62870.446096607342 0.003532022464 KS 2 2 0 0 0 0 10 62870.497706204087 0.003531607036 KS 2 2 0 0 0 0 10 62870.520285406178 0.003531425853 KS 2 2 0 0 0 0 10 62870.527811802217 0.003531365508 KS 2 2 0 0 0 0 10 62870.565443796295 0.003531064440 KS 2 2 0 0 0 0 10 62870.593399001599 0.003530841429 KS 2 2 0 0 0 0 10 62870.608451807776 0.003530721549 KS 2 2 0 0 0 0 10 62870.609526997073 0.003530712977 KS 2 2 0 0 0 0 10 62870.611677404014 0.003530695833 KS 2 2 0 0 0 0 10 62870.655760604764 0.003530345843 KS 2 2 0 0 0 0 10 62870.660061404498 0.003530311693 KS 2 2 0 0 0 0 10 62870.672963803672 0.003530209537 KS 2 2 0 0 0 0 10 62870.674039007176 0.003530201086 KS 2 2 0 0 0 0 10 62870.676189399949 0.003530184033 KS 2 2 0 0 0 0 10 62870.731024607139 0.003529751064 KS 2 2 0 0 0 0 10 62870.737475799643 0.003529700259 KS 2 2 0 0 0 0 10 62870.746077399105 0.003529632560 KS 2 2 0 0 0 0 10 62870.751453402316 0.003529590311 KS 2 2 0 0 0 0 10 62870.752528605770 0.003529581852 KS 2 2 0 0 0 0 10 62870.767581397773 0.003529463559 KS 2 2 0 0 0 0 10 62870.804138202522 0.003529176987 KS 2 2 0 0 0 0 10 62870.987997401608 0.003527749143 KS 2 2 0 0 0 0 10 62870.994448594108 0.003527699471 KS 2 2 0 0 0 0 10 62871.042832594584 0.003527327755 KS 2 2 0 0 0 0 10 62871.089066202316 0.003526973926 KS 2 2 0 0 0 0 10 62871.138525406262 0.003526597089 KS 2 2 0 0 0 0 10 62871.295504603463 0.003525411796 KS 2 2 0 0 0 0 10 62871.304106202909 0.003525347393 KS 2 2 0 0 0 0 10 62871.321309401812 0.003525218605 KS 2 2 0 0 0 0 10 62871.376144594790 0.003524809396 KS 2 2 0 0 0 0 10 62871.390122197462 0.003524705421 KS 2 2 0 0 0 0 10 62871.410551006793 0.003524553664 KS 2 2 0 0 0 0 10 62871.444957404612 0.003524298773 KS 2 2 0 0 0 0 10 62871.453559004049 0.003524235234 KS 2 2 0 0 0 0 10 62871.456784600306 0.003524211400 KS 2 2 0 0 0 0 10 62871.467536606763 0.003524131896 KS 2 2 0 0 0 0 10 62871.471837406453 0.003524100228 KS 2 2 0 0 0 0 10 62871.479363802432 0.003524044706 KS 2 2 0 0 0 0 10 62871.523447003204 0.003523720325 KS 2 2 0 0 0 0 10 62871.552477397793 0.003523507373 KS 2 2 0 0 0 0 10 62871.587958999131 0.003523247885 KS 2 2 0 0 0 0 10 62871.626666196681 0.003522965823 KS 2 2 0 0 0 0 10 62871.740637396506 0.003522141097 KS 2 2 0 0 0 0 10 62872.000835801230 0.003520291126 KS 2 2 0 0 0 0 10 62872.071799003798 0.003519794486 KS 2 2 0 0 0 0 10 62872.097603802153 0.003519614713 KS 2 2 0 0 0 0 10 62872.101904601874 0.003519584805 KS 2 2 0 0 0 0 10 62872.168567004717 0.003519122766 KS 2 2 0 0 0 0 10 62872.227702997401 0.003518715353 KS 2 2 0 0 0 0 10 62872.253507795747 0.003518538344 KS 2 2 0 0 0 0 10 62872.331997394274 0.003518002700 KS 2 2 0 0 0 0 10 62872.336298208171 0.003517973439 KS 2 2 0 0 0 0 10 62872.362103006526 0.003517798323 KS 2 2 0 0 0 0 10 62872.384682194456 0.003517645393 KS 2 2 0 0 0 0 10 62872.406186207273 0.003517500158 KS 2 2 0 0 0 0 10 62872.407261396561 0.003517492868 KS 2 2 0 0 0 0 10 62872.420163795715 0.003517405992 KS 2 2 0 0 0 0 10 62872.454570207717 0.003517174457 KS 2 2 0 0 0 0 10 62872.481450195327 0.003516994230 KS 2 2 0 0 0 0 10 62872.482525398846 0.003516986982 KS 2 2 0 0 0 0 10 62872.498653394239 0.003516879154 KS 2 2 0 0 0 0 10 62872.531984602753 0.003516656678 KS 2 2 0 0 0 0 10 62872.769603805226 0.003515092586 KS 2 2 0 0 0 0 10 62872.871747795157 0.003514431994 KS 2 2 0 0 0 0 10 62872.880349394602 0.003514376715 KS 2 2 0 0 0 0 10 62872.952387800603 0.003513915518 KS 2 2 0 0 0 0 10 62872.979267802423 0.003513744348 KS 2 2 0 0 0 0 10 62873.124419803749 0.003512828389 KS 2 2 0 0 0 0 10 62873.126570196526 0.003512814896 KS 2 2 0 0 0 0 10 62873.131946199719 0.003512781293 KS 2 2 0 0 0 0 10 62873.143773395424 0.003512707331 KS 2 2 0 0 0 0 10 62873.200758995281 0.003512352459 KS 2 2 0 0 0 0 10 62873.242691803231 0.003512092683 KS 2 2 0 0 0 0 10 62873.255594202394 0.003512012987 KS 2 2 0 0 0 0 10 62873.256669405875 0.003512006369 KS 2 2 0 0 0 0 10 62873.264195801851 0.003511959945 KS 2 2 0 0 0 0 10 62873.266346194635 0.003511946668 KS 2 2 0 0 0 0 10 62873.293226196446 0.003511781238 KS 2 2 0 0 0 0 10 62873.294301399905 0.003511774648 KS 2 2 0 0 0 0 10 62873.296451806858 0.003511761414 KS 2 2 0 0 0 0 10 62873.310429395334 0.003511675579 KS 2 2 0 0 0 0 10 62873.319030994794 0.003511622910 KS 2 2 0 0 0 0 10 62873.344835807351 0.003511464896 KS 2 2 0 0 0 0 10 62873.358813395780 0.003511379648 KS 2 2 0 0 0 0 10 62873.365264602465 0.003511340302 KS 2 2 0 0 0 0 10 62873.385693397622 0.003511215778 KS 2 2 0 0 0 0 10 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