H1 CRD 2 2021 2 18 17 H2 HERL 7840 35 1 4 ILRS H3 terrasarx 0702601 6201 31698 0 1 1 H4 0 2021 2 18 16 53 28 2021 2 18 16 55 3 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 1.676 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 60661.440000 1003.00 280.50 81.4 0 20 61015.680000 1003.08 280.40 81.5 0 41 60436.800000 0 KS 7362 7362 122.977 104415.6 0.0 20.7 0.200 -0.300 -2.0 2 0 0 1 na 41 60989.760000 0 KS 3231 3231 122.977 104416.2 0.0 20.7 0.160 -0.320 -3.0 2 0 0 2 na 40 60855.840000 0 KS 10593 10593 122.977 104416.1 -0.7 20.7 0.180 -0.310 -2.5 2 2 0 3 na 50 KS 30.0 0.168 -0.270 2.0 0 10 60809.718949808178 0.004954854871 KS 2 2 0 0 0 0 10 60809.719980812665 0.004954846475 KS 2 2 0 0 0 0 10 60809.725135806762 0.004954804776 KS 2 2 0 0 0 0 10 60809.726166811239 0.004954796411 KS 2 2 0 0 0 0 10 60809.733383814388 0.004954737954 KS 2 2 0 0 0 0 10 60809.735445809197 0.004954721363 KS 2 2 0 0 0 0 10 60809.737507804016 0.004954704659 KS 2 2 0 0 0 0 10 60809.738538808512 0.004954696223 KS 2 2 0 0 0 0 10 60809.743693816774 0.004954654676 KS 2 2 0 0 0 0 10 60809.745755811597 0.004954637956 KS 2 2 0 0 0 0 10 60809.746786816097 0.004954629694 KS 2 2 0 0 0 0 10 60809.754003805050 0.004954571290 KS 2 2 0 0 0 0 10 60809.759158813348 0.004954529587 KS 2 2 0 0 0 0 10 60809.761220808149 0.004954512955 KS 2 2 0 0 0 0 10 60809.765344811953 0.004954479667 KS 2 2 0 0 0 0 10 60809.769468815741 0.004954446414 KS 2 2 0 0 0 0 10 60809.770499806067 0.004954438001 KS 2 2 0 0 0 0 10 60809.771530810550 0.004954429716 KS 2 2 0 0 0 0 10 60809.772561815054 0.004954421358 KS 2 2 0 0 0 0 10 60809.778747813689 0.004954371426 KS 2 2 0 0 0 0 10 60809.779778818163 0.004954363093 KS 2 2 0 0 0 0 10 60809.784933812297 0.004954321546 KS 2 2 0 0 0 0 10 60809.785964816785 0.004954313301 KS 2 2 0 0 0 0 10 60809.788026811596 0.004954296602 KS 2 2 0 0 0 0 10 60809.792150815411 0.004954263392 KS 2 2 0 0 0 0 10 60809.797305809532 0.004954221776 KS 2 2 0 0 0 0 10 60809.799367804333 0.004954205164 KS 2 2 0 0 0 0 10 60809.801429813339 0.004954188550 KS 2 2 0 0 0 0 10 60809.802460817803 0.004954180211 KS 2 2 0 0 0 0 10 60809.803491808132 0.004954171942 KS 2 2 0 0 0 0 10 60809.808646816408 0.004954130472 KS 2 2 0 0 0 0 10 60809.814832815057 0.004954080666 KS 2 2 0 0 0 0 10 60809.817925814379 0.004954055727 KS 2 2 0 0 0 0 10 60809.822049818163 0.004954022512 KS 2 2 0 0 0 0 10 60809.824111812974 0.004954005930 KS 2 2 0 0 0 0 10 60809.826173807775 0.004953989355 KS 2 2 0 0 0 0 10 60809.834421815408 0.004953922919 KS 2 2 0 0 0 0 10 60809.835452805711 0.004953914731 KS 2 2 0 0 0 0 10 60809.836483810208 0.004953906362 KS 2 2 0 0 0 0 10 60809.841638804340 0.004953864955 KS 2 2 0 0 0 0 10 60809.843700813320 0.004953848463 KS 2 2 0 0 0 0 10 60809.848855807441 0.004953806960 KS 2 2 0 0 0 0 10 60809.852979811263 0.004953773788 KS 2 2 0 0 0 0 10 60809.861227804672 0.004953707597 KS 2 2 0 0 0 0 10 60809.865351808471 0.004953674504 KS 2 2 0 0 0 0 10 60809.868444807776 0.004953649666 KS 2 2 0 0 0 0 10 60809.871537807102 0.004953624802 KS 2 2 0 0 0 0 10 60809.877723805726 0.004953575175 KS 2 2 0 0 0 0 10 60809.878754810190 0.004953566922 KS 2 2 0 0 0 0 10 60809.883909804323 0.004953525566 KS 2 2 0 0 0 0 10 60809.885971813327 0.004953509020 KS 2 2 0 0 0 0 10 60809.892157811931 0.004953459395 KS 2 2 0 0 0 0 10 60809.893188816404 0.004953451215 KS 2 2 0 0 0 0 10 60809.896281815744 0.004953426404 KS 2 2 0 0 0 0 10 60809.899374815036 0.004953401630 KS 2 2 0 0 0 0 10 60809.901436809834 0.004953385119 KS 2 2 0 0 0 0 10 60809.905560813654 0.004953352076 KS 2 2 0 0 0 0 10 60809.924118809502 0.004953203509 KS 2 2 0 0 0 0 10 60809.928242813318 0.004953170584 KS 2 2 0 0 0 0 10 60809.930304808118 0.004953154101 KS 2 2 0 0 0 0 10 60809.931335812618 0.004953145882 KS 2 2 0 0 0 0 10 60809.933397807436 0.004953129343 KS 2 2 0 0 0 0 10 60809.934428811938 0.004953121058 KS 2 2 0 0 0 0 10 60809.939583806043 0.004953079988 KS 2 2 0 0 0 0 10 60809.954017812281 0.004952964560 KS 2 2 0 0 0 0 10 60809.957110811576 0.004952939914 KS 2 2 0 0 0 0 10 60809.958141816077 0.004952931657 KS 2 2 0 0 0 0 10 60809.963296810155 0.004952890591 KS 2 2 0 0 0 0 10 60809.964327814683 0.004952882265 KS 2 2 0 0 0 0 10 60809.972575808125 0.004952816534 KS 2 2 0 0 0 0 10 60809.975668807419 0.004952791922 KS 2 2 0 0 0 0 10 60809.979792811230 0.004952758922 KS 2 2 0 0 0 0 10 60809.991133818125 0.004952668555 KS 2 2 0 0 0 0 10 60809.992164808461 0.004952660320 KS 2 2 0 0 0 0 10 60809.993195812968 0.004952652098 KS 2 2 0 0 0 0 10 60810.000412816059 0.004952594641 KS 2 2 0 0 0 0 10 60810.001443806370 0.004952586440 KS 2 2 0 0 0 0 10 60810.002474810871 0.004952578265 KS 2 2 0 0 0 0 10 60810.006598814670 0.004952545473 KS 2 2 0 0 0 0 10 60810.013815817781 0.004952488024 KS 2 2 0 0 0 0 10 60810.015877812633 0.004952471574 KS 2 2 0 0 0 0 10 60810.016908817104 0.004952463339 KS 2 2 0 0 0 0 10 60810.018970811913 0.004952447022 KS 2 2 0 0 0 0 10 60810.023094815695 0.004952414227 KS 2 2 0 0 0 0 10 60810.027218805350 0.004952381435 KS 2 2 0 0 0 0 10 60810.030311804648 0.004952356777 KS 2 2 0 0 0 0 10 60810.041652811574 0.004952266642 KS 2 2 0 0 0 0 10 60810.043714806371 0.004952250352 KS 2 2 0 0 0 0 10 60810.050931809471 0.004952193044 KS 2 2 0 0 0 0 10 60810.054024808811 0.004952168466 KS 2 2 0 0 0 0 10 60810.056086817786 0.004952152128 KS 2 2 0 0 0 0 10 60810.059179817090 0.004952127536 KS 2 2 0 0 0 0 10 60810.066396806027 0.004952070312 KS 2 2 0 0 0 0 10 60810.068458815015 0.004952054033 KS 2 2 0 0 0 0 10 60810.070520809828 0.004952037629 KS 2 2 0 0 0 0 10 60810.071551814322 0.004952029382 KS 2 2 0 0 0 0 10 60810.073613809142 0.004952013038 KS 2 2 0 0 0 0 10 60810.078768817444 0.004951972275 KS 2 2 0 0 0 0 10 60810.083923811540 0.004951931378 KS 2 2 0 0 0 0 10 60810.093202809478 0.004951857944 KS 2 2 0 0 0 0 10 60810.095264804297 0.004951841608 KS 2 2 0 0 0 0 10 60810.096295808811 0.004951833420 KS 2 2 0 0 0 0 10 60810.097326813296 0.004951825179 KS 2 2 0 0 0 0 10 60810.098357817779 0.004951817048 KS 2 2 0 0 0 0 10 60810.103512811901 0.004951776278 KS 2 2 0 0 0 0 10 60810.106605811210 0.004951751773 KS 2 2 0 0 0 0 10 60810.108667806023 0.004951735479 KS 2 2 0 0 0 0 10 60810.109698810503 0.004951727346 KS 2 2 0 0 0 0 10 60810.121039817425 0.004951637665 KS 2 2 0 0 0 0 10 60810.123101812234 0.004951621397 KS 2 2 0 0 0 0 10 60810.125163807055 0.004951605058 KS 2 2 0 0 0 0 10 60810.132380810162 0.004951548059 KS 2 2 0 0 0 0 10 60810.140628817784 0.004951482908 KS 2 2 0 0 0 0 10 60810.147845806696 0.004951425953 KS 2 2 0 0 0 0 10 60810.153000815020 0.004951385269 KS 2 2 0 0 0 0 10 60810.155062809821 0.004951369028 KS 2 2 0 0 0 0 10 60810.160217818135 0.004951328294 KS 2 2 0 0 0 0 10 60810.161248808438 0.004951320242 KS 2 2 0 0 0 0 10 60810.162279812940 0.004951312101 KS 2 2 0 0 0 0 10 60810.163310817411 0.004951303996 KS 2 2 0 0 0 0 10 60810.164341807748 0.004951295845 KS 2 2 0 0 0 0 10 60810.170527806363 0.004951247060 KS 2 2 0 0 0 0 10 60810.178775813968 0.004951182036 KS 2 2 0 0 0 0 10 60810.182899817760 0.004951149597 KS 2 2 0 0 0 0 10 60810.183930808091 0.004951141451 KS 2 2 0 0 0 0 10 60810.187023807376 0.004951117213 KS 2 2 0 0 0 0 10 60810.188054811884 0.004951109027 KS 2 2 0 0 0 0 10 60810.195271815016 0.004951052241 KS 2 2 0 0 0 0 10 60810.198364814325 0.004951027883 KS 2 2 0 0 0 0 10 60810.202488818107 0.004950995468 KS 2 2 0 0 0 0 10 60810.207643812239 0.004950954838 KS 2 2 0 0 0 0 10 60810.209705807047 0.004950938702 KS 2 2 0 0 0 0 10 60810.212798806359 0.004950914393 KS 2 2 0 0 0 0 10 60810.220015809469 0.004950857607 KS 2 2 0 0 0 0 10 60810.221046813959 0.004950849499 KS 2 2 0 0 0 0 10 60810.223108808781 0.004950833382 KS 2 2 0 0 0 0 10 60810.224139813284 0.004950825248 KS 2 2 0 0 0 0 10 60810.225170817752 0.004950817183 KS 2 2 0 0 0 0 10 60810.226201808078 0.004950809044 KS 2 2 0 0 0 0 10 60810.228263817072 0.004950792850 KS 2 2 0 0 0 0 10 60810.231356816364 0.004950768622 KS 2 2 0 0 0 0 10 60810.238573805337 0.004950711901 KS 2 2 0 0 0 0 10 60810.250945816715 0.004950614851 KS 2 2 0 0 0 0 10 60810.266410813272 0.004950493658 KS 2 2 0 0 0 0 10 60810.268472808078 0.004950477529 KS 2 2 0 0 0 0 10 60810.276720815710 0.004950412895 KS 2 2 0 0 0 0 10 60810.281875809803 0.004950372592 KS 2 2 0 0 0 0 10 60810.289092812904 0.004950316113 KS 2 2 0 0 0 0 10 60810.291154807737 0.004950299977 KS 2 2 0 0 0 0 10 60810.293216816730 0.004950283852 KS 2 2 0 0 0 0 10 60810.315898816371 0.004950106506 KS 2 2 0 0 0 0 10 60810.321053810495 0.004950066285 KS 2 2 0 0 0 0 10 60810.323115805338 0.004950050172 KS 2 2 0 0 0 0 10 60810.324146809803 0.004950042075 KS 2 2 0 0 0 0 10 60810.335487816726 0.004949953621 KS 2 2 0 0 0 0 10 60810.345797804986 0.004949873232 KS 2 2 0 0 0 0 10 60810.350952813257 0.004949833057 KS 2 2 0 0 0 0 10 60810.367448814286 0.004949704514 KS 2 2 0 0 0 0 10 60810.368479804615 0.004949696577 KS 2 2 0 0 0 0 10 60810.371572818081 0.004949672471 KS 2 2 0 0 0 0 10 60810.373634812934 0.004949656357 KS 2 2 0 0 0 0 10 60810.382913810845 0.004949584194 KS 2 2 0 0 0 0 10 60810.384975805663 0.004949568118 KS 2 2 0 0 0 0 10 60810.400440816377 0.004949447910 KS 2 2 0 0 0 0 10 60810.404564806007 0.004949415932 KS 2 2 0 0 0 0 10 60810.421060807061 0.004949287786 KS 2 2 0 0 0 0 10 60810.427246805661 0.004949239821 KS 2 2 0 0 0 0 10 60810.431370809472 0.004949207801 KS 2 2 0 0 0 0 10 60810.438587812586 0.004949151802 KS 2 2 0 0 0 0 10 60810.441680811893 0.004949127936 KS 2 2 0 0 0 0 10 60810.448897814983 0.004949071917 KS 2 2 0 0 0 0 10 60810.449928805297 0.004949064031 KS 2 2 0 0 0 0 10 60810.465393816031 0.004948944243 KS 2 2 0 0 0 0 10 60810.471579814631 0.004948896363 KS 2 2 0 0 0 0 10 60810.475703804303 0.004948864456 KS 2 2 0 0 0 0 10 60810.488075815680 0.004948768840 KS 2 2 0 0 0 0 10 60810.499416808442 0.004948681191 KS 2 2 0 0 0 0 10 60810.507664816036 0.004948617528 KS 2 2 0 0 0 0 10 60810.516943813977 0.004948545859 KS 2 2 0 0 0 0 10 60810.536532814311 0.004948394890 KS 2 2 0 0 0 0 10 60810.538594809136 0.004948378987 KS 2 2 0 0 0 0 10 60810.562307813294 0.004948196436 KS 2 2 0 0 0 0 10 60810.564369808083 0.004948180583 KS 2 2 0 0 0 0 10 60810.566431817063 0.004948164760 KS 2 2 0 0 0 0 10 60810.573648806021 0.004948109240 KS 2 2 0 0 0 0 10 60810.592206816027 0.004947966673 KS 2 2 0 0 0 0 10 60810.604578813273 0.004947871833 KS 2 2 0 0 0 0 10 60810.613857811202 0.004947800577 KS 2 2 0 0 0 0 10 60810.614888815708 0.004947792691 KS 2 2 0 0 0 0 10 60810.621074814301 0.004947745262 KS 2 2 0 0 0 0 10 60810.639632810132 0.004947603132 KS 2 2 0 0 0 0 10 60810.666438813599 0.004947398046 KS 2 2 0 0 0 0 10 60810.675717811546 0.004947327159 KS 2 2 0 0 0 0 10 60810.695306811886 0.004947177664 KS 2 2 0 0 0 0 10 60810.706647804621 0.004947091180 KS 2 2 0 0 0 0 10 60810.722112815336 0.004946973382 KS 2 2 0 0 0 0 10 60810.723143805646 0.004946965529 KS 2 2 0 0 0 0 10 60810.740670811183 0.004946832150 KS 2 2 0 0 0 0 10 60810.757166812237 0.004946706718 KS 2 2 0 0 0 0 10 60810.781910806707 0.004946518925 KS 2 2 0 0 0 0 10 60810.895320804970 0.004945661574 KS 2 2 0 0 0 0 10 60810.969552816696 0.004945103856 KS 2 2 0 0 0 0 10 60810.972645816021 0.004945080590 KS 2 2 0 0 0 0 10 60810.978831814644 0.004945034240 KS 2 2 0 0 0 0 10 60811.104613810140 0.004944095776 KS 2 2 0 0 0 0 10 60811.105644814650 0.004944088195 KS 2 2 0 0 0 0 10 60811.127295809806 0.004943927354 KS 2 2 0 0 0 0 10 60811.160287811911 0.004943682777 KS 2 2 0 0 0 0 10 60811.172659809130 0.004943591237 KS 2 2 0 0 0 0 10 60811.174721818113 0.004943576037 KS 2 2 0 0 0 0 10 60811.175752808460 0.004943568397 KS 2 2 0 0 0 0 10 60811.207713805996 0.004943332228 KS 2 2 0 0 0 0 10 60811.271635815357 0.004942861426 KS 2 2 0 0 0 0 10 60811.310813816056 0.004942573815 KS 2 2 0 0 0 0 10 60811.337619805368 0.004942377413 KS 2 2 0 0 0 0 10 60811.398448815424 0.004941933168 KS 2 2 0 0 0 0 10 60811.508765814378 0.004941132025 KS 2 2 0 0 0 0 10 60811.537633812674 0.004940923381 KS 2 2 0 0 0 0 10 60811.595369809243 0.004940507163 KS 2 2 0 0 0 0 10 60811.604648807148 0.004940440494 KS 2 2 0 0 0 0 10 60811.605679811648 0.004940433094 KS 2 2 0 0 0 0 10 60811.606710816143 0.004940425665 KS 2 2 0 0 0 0 10 60811.608772810939 0.004940410909 KS 2 2 0 0 0 0 10 60811.641764813056 0.004940174036 KS 2 2 0 0 0 0 10 60811.706717812709 0.004939709207 KS 2 2 0 0 0 0 10 60811.726306813045 0.004939569492 KS 2 2 0 0 0 0 10 60811.755174811337 0.004939363848 KS 2 2 0 0 0 0 10 60811.767546808556 0.004939275812 KS 2 2 0 0 0 0 10 60811.817034811691 0.004938924523 KS 2 2 0 0 0 0 10 60811.907762810291 0.004938283581 KS 2 2 0 0 0 0 10 60811.949002805810 0.004937993614 KS 2 2 0 0 0 0 10 60811.961374817242 0.004937906669 KS 2 2 0 0 0 0 10 60811.988180806506 0.004937718826 KS 2 2 0 0 0 0 10 60812.002614812744 0.004937617790 KS 2 2 0 0 0 0 10 60812.010862806183 0.004937560086 KS 2 2 0 0 0 0 10 60812.013955805487 0.004937538405 KS 2 2 0 0 0 0 10 60812.172729817258 0.004936434594 KS 2 2 0 0 0 0 10 60812.206752809671 0.004936199626 KS 2 2 0 0 0 0 10 60812.242837811053 0.004935951037 KS 2 2 0 0 0 0 10 60812.265519810703 0.004935795124 KS 2 2 0 0 0 0 10 60812.308821815207 0.004935498132 KS 2 2 0 0 0 0 10 60812.379960813531 0.004935012269 KS 2 2 0 0 0 0 10 60812.424293808348 0.004934710648 KS 2 2 0 0 0 0 10 60812.458316814960 0.004934479786 KS 2 2 0 0 0 0 10 60812.463471809053 0.004934444960 KS 2 2 0 0 0 0 10 60812.488215817692 0.004934277479 KS 2 2 0 0 0 0 10 60812.492339807329 0.004934249581 KS 2 2 0 0 0 0 10 60812.539765815645 0.004933929569 KS 2 2 0 0 0 0 10 60812.556261816678 0.004933818500 KS 2 2 0 0 0 0 10 60812.577912811855 0.004933672961 KS 2 2 0 0 0 0 10 60812.598532816700 0.004933534532 KS 2 2 0 0 0 0 10 60812.611935804257 0.004933444719 KS 2 2 0 0 0 0 10 60812.615028817732 0.004933423969 KS 2 2 0 0 0 0 10 60812.634617818083 0.004933292805 KS 2 2 0 0 0 0 10 60812.644927806338 0.004933223909 KS 2 2 0 0 0 0 10 60812.661423807378 0.004933113740 KS 2 2 0 0 0 0 10 60812.691322810135 0.004932914290 KS 2 2 0 0 0 0 10 60812.696477804291 0.004932879938 KS 2 2 0 0 0 0 10 60812.706787806698 0.004932811325 KS 2 2 0 0 0 0 10 60812.737717813992 0.004932605762 KS 2 2 0 0 0 0 10 60812.739779808813 0.004932591968 KS 2 2 0 0 0 0 10 60812.756275809832 0.004932482574 KS 2 2 0 0 0 0 10 60812.774833805686 0.004932359589 KS 2 2 0 0 0 0 10 60812.891336817463 0.004931591435 KS 2 2 0 0 0 0 10 60812.963506806064 0.004931118908 KS 2 2 0 0 0 0 10 60812.964537810569 0.004931112160 KS 2 2 0 0 0 0 10 60812.972785818172 0.004931058344 KS 2 2 0 0 0 0 10 60812.991343814024 0.004930937374 KS 2 2 0 0 0 0 10 60813.025366806435 0.004930715948 KS 2 2 0 0 0 0 10 60813.033614814051 0.004930662298 KS 2 2 0 0 0 0 10 60813.039800812687 0.004930622132 KS 2 2 0 0 0 0 10 60813.067637806437 0.004930441651 KS 2 2 0 0 0 0 10 60813.075885814035 0.004930388166 KS 2 2 0 0 0 0 10 60813.076916804382 0.004930381513 KS 2 2 0 0 0 0 10 60813.110939810943 0.004930161487 KS 2 2 0 0 0 0 10 60813.114032810242 0.004930141527 KS 2 2 0 0 0 0 10 60813.131559815785 0.004930028459 KS 2 2 0 0 0 0 10 60813.161458804390 0.004929835888 KS 2 2 0 0 0 0 10 60813.171768806787 0.004929769577 KS 2 2 0 0 0 0 10 60813.172799811293 0.004929762923 KS 2 2 0 0 0 0 10 60813.191357807156 0.004929643759 KS 2 2 0 0 0 0 10 60813.194450806454 0.004929623874 KS 2 2 0 0 0 0 10 60813.237752810964 0.004929346424 KS 2 2 0 0 0 0 10 60813.247031808898 0.004929287092 KS 2 2 0 0 0 0 10 60813.251155812703 0.004929260756 KS 2 2 0 0 0 0 10 60813.287240814062 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