H1 CRD 2 2021 12 21 23 H2 HERL 7840 35 1 4 ILRS H3 terrasarx 0702601 6201 31698 0 1 1 H4 0 2021 12 21 17 26 44 2021 12 21 17 29 36 0 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 0.000 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 62337.600000 1020.75 275.20 75.0 0 20 62700.480000 1020.73 275.10 74.9 0 20 63063.360000 1020.76 275.00 75.1 0 41 61162.560000 0 KS 3657 3657 122.977 104415.6 0.0 24.0 0.340 -0.260 -5.0 2 0 0 1 na 41 63201.600000 0 KS 7777 7777 122.977 104415.6 0.0 21.3 0.250 -0.300 -4.0 2 0 0 2 na 40 62890.560000 0 KS 11434 11434 122.977 104415.6 0.0 22.7 0.295 -0.280 -4.5 2 2 0 3 na 50 KS 32.8 0.016 -0.251 2.0 0 10 62804.082841001136 0.005137852087 KS 2 2 0 0 0 0 10 62804.088160006833 0.005137659747 KS 2 2 0 0 0 0 10 62804.098798004082 0.005137275003 KS 2 2 0 0 0 0 10 62804.100925595068 0.005137198023 KS 2 2 0 0 0 0 10 62804.110499796830 0.005136851831 KS 2 2 0 0 0 0 10 62804.112627401951 0.005136774887 KS 2 2 0 0 0 0 10 62804.113691197440 0.005136736407 KS 2 2 0 0 0 0 10 62804.114755007079 0.005136697963 KS 2 2 0 0 0 0 10 62804.116882598016 0.005136621070 KS 2 2 0 0 0 0 10 62804.121137794094 0.005136467149 KS 2 2 0 0 0 0 10 62804.125393004327 0.005136313289 KS 2 2 0 0 0 0 10 62804.131775805531 0.005136082470 KS 2 2 0 0 0 0 10 62804.134967206101 0.005135967055 KS 2 2 0 0 0 0 10 62804.140286197681 0.005135774760 KS 2 2 0 0 0 0 10 62804.141350007309 0.005135736345 KS 2 2 0 0 0 0 10 62804.142413802797 0.005135697827 KS 2 2 0 0 0 0 10 62804.143477598257 0.005135659420 KS 2 2 0 0 0 0 10 62804.150924194915 0.005135390239 KS 2 2 0 0 0 0 10 62804.157306996105 0.005135159440 KS 2 2 0 0 0 0 10 62804.159434601223 0.005135082484 KS 2 2 0 0 0 0 10 62804.161562206354 0.005135005557 KS 2 2 0 0 0 0 10 62804.165817402411 0.005134851785 KS 2 2 0 0 0 0 10 62804.167945007527 0.005134774859 KS 2 2 0 0 0 0 10 62804.178583004789 0.005134390310 KS 2 2 0 0 0 0 10 62804.180710595755 0.005134313403 KS 2 2 0 0 0 0 10 62804.181774405388 0.005134274921 KS 2 2 0 0 0 0 10 62804.183901996316 0.005134198021 KS 2 2 0 0 0 0 10 62804.184965805965 0.005134159598 KS 2 2 0 0 0 0 10 62804.186029601424 0.005134121187 KS 2 2 0 0 0 0 10 62804.190284797497 0.005133967377 KS 2 2 0 0 0 0 10 62804.191348607162 0.005133928926 KS 2 2 0 0 0 0 10 62804.193476198116 0.005133851994 KS 2 2 0 0 0 0 10 62804.195603803229 0.005133775125 KS 2 2 0 0 0 0 10 62804.199858999299 0.005133621379 KS 2 2 0 0 0 0 10 62804.204114195359 0.005133467493 KS 2 2 0 0 0 0 10 62804.206241800492 0.005133390582 KS 2 2 0 0 0 0 10 62804.209433201061 0.005133275213 KS 2 2 0 0 0 0 10 62804.213688397144 0.005133121486 KS 2 2 0 0 0 0 10 62804.219007402867 0.005132929315 KS 2 2 0 0 0 0 10 62804.221135007980 0.005132852408 KS 2 2 0 0 0 0 10 62804.223262598939 0.005132775491 KS 2 2 0 0 0 0 10 62804.224326394391 0.005132737016 KS 2 2 0 0 0 0 10 62804.226453999503 0.005132660175 KS 2 2 0 0 0 0 10 62804.227517795004 0.005132621729 KS 2 2 0 0 0 0 10 62804.229645400113 0.005132544796 KS 2 2 0 0 0 0 10 62804.231773005226 0.005132468010 KS 2 2 0 0 0 0 10 62804.232836800704 0.005132429533 KS 2 2 0 0 0 0 10 62804.233900596184 0.005132391085 KS 2 2 0 0 0 0 10 62804.234964405824 0.005132352661 KS 2 2 0 0 0 0 10 62804.238155806417 0.005132237291 KS 2 2 0 0 0 0 10 62804.241347207039 0.005132121917 KS 2 2 0 0 0 0 10 62804.245602403059 0.005131968225 KS 2 2 0 0 0 0 10 62804.246666198564 0.005131929800 KS 2 2 0 0 0 0 10 62804.247730008180 0.005131891402 KS 2 2 0 0 0 0 10 62804.249857599158 0.005131814429 KS 2 2 0 0 0 0 10 62804.250921394637 0.005131776053 KS 2 2 0 0 0 0 10 62804.253048999741 0.005131699207 KS 2 2 0 0 0 0 10 62804.254112795199 0.005131660777 KS 2 2 0 0 0 0 10 62804.257304195823 0.005131545396 KS 2 2 0 0 0 0 10 62804.263686997009 0.005131314837 KS 2 2 0 0 0 0 10 62804.264750806633 0.005131276429 KS 2 2 0 0 0 0 10 62804.269006002712 0.005131122670 KS 2 2 0 0 0 0 10 62804.270069798188 0.005131084255 KS 2 2 0 0 0 0 10 62804.273261198766 0.005130968918 KS 2 2 0 0 0 0 10 62804.275388803920 0.005130892086 KS 2 2 0 0 0 0 10 62804.277516394835 0.005130815175 KS 2 2 0 0 0 0 10 62804.278580204507 0.005130776827 KS 2 2 0 0 0 0 10 62804.282835400575 0.005130623056 KS 2 2 0 0 0 0 10 62804.287090596628 0.005130469414 KS 2 2 0 0 0 0 10 62804.288154406284 0.005130430941 KS 2 2 0 0 0 0 10 62804.289218201748 0.005130392460 KS 2 2 0 0 0 0 10 62804.293473397817 0.005130238789 KS 2 2 0 0 0 0 10 62804.296664798403 0.005130123524 KS 2 2 0 0 0 0 10 62804.300919994490 0.005129969798 KS 2 2 0 0 0 0 10 62804.304111395083 0.005129854534 KS 2 2 0 0 0 0 10 62804.305175204692 0.005129816163 KS 2 2 0 0 0 0 10 62804.311558005882 0.005129585613 KS 2 2 0 0 0 0 10 62804.322196003170 0.005129201310 KS 2 2 0 0 0 0 10 62804.323259798640 0.005129162918 KS 2 2 0 0 0 0 10 62804.324323594099 0.005129124544 KS 2 2 0 0 0 0 10 62804.325387403757 0.005129086088 KS 2 2 0 0 0 0 10 62804.330706395265 0.005128894044 KS 2 2 0 0 0 0 10 62804.331770204943 0.005128855589 KS 2 2 0 0 0 0 10 62804.333897795892 0.005128778759 KS 2 2 0 0 0 0 10 62804.336025400995 0.005128701983 KS 2 2 0 0 0 0 10 62804.339216801594 0.005128586746 KS 2 2 0 0 0 0 10 62804.342408202209 0.005128471495 KS 2 2 0 0 0 0 10 62804.343471997667 0.005128433012 KS 2 2 0 0 0 0 10 62804.346663398264 0.005128317772 KS 2 2 0 0 0 0 10 62804.347727207899 0.005128279425 KS 2 2 0 0 0 0 10 62804.350918594327 0.005128164108 KS 2 2 0 0 0 0 10 62804.356237600040 0.005127972039 KS 2 2 0 0 0 0 10 62804.361556605765 0.005127779993 KS 2 2 0 0 0 0 10 62804.364748006337 0.005127664765 KS 2 2 0 0 0 0 10 62804.373258398495 0.005127357481 KS 2 2 0 0 0 0 10 62804.375386003594 0.005127280666 KS 2 2 0 0 0 0 10 62804.376449799073 0.005127242305 KS 2 2 0 0 0 0 10 62804.378577404204 0.005127165472 KS 2 2 0 0 0 0 10 62804.398789603238 0.005126435761 KS 2 2 0 0 0 0 10 62804.400917194182 0.005126358950 KS 2 2 0 0 0 0 10 62804.403044799305 0.005126282134 KS 2 2 0 0 0 0 10 62804.406236199886 0.005126166968 KS 2 2 0 0 0 0 10 62804.409427600477 0.005126051785 KS 2 2 0 0 0 0 10 62804.410491395953 0.005126013343 KS 2 2 0 0 0 0 10 62804.411555205607 0.005125974975 KS 2 2 0 0 0 0 10 62804.412619001072 0.005125936569 KS 2 2 0 0 0 0 10 62804.414746606211 0.005125859743 KS 2 2 0 0 0 0 10 62804.415810401655 0.005125821415 KS 2 2 0 0 0 0 10 62804.417938006791 0.005125744560 KS 2 2 0 0 0 0 10 62804.422193202850 0.005125590989 KS 2 2 0 0 0 0 10 62804.424320807958 0.005125514206 KS 2 2 0 0 0 0 10 62804.425384603459 0.005125475784 KS 2 2 0 0 0 0 10 62804.426448398920 0.005125437449 KS 2 2 0 0 0 0 10 62804.430703594984 0.005125283791 KS 2 2 0 0 0 0 10 62804.439214001304 0.005124976607 KS 2 2 0 0 0 0 10 62804.442405401887 0.005124861464 KS 2 2 0 0 0 0 10 62804.443469197360 0.005124823110 KS 2 2 0 0 0 0 10 62804.448788203085 0.005124631141 KS 2 2 0 0 0 0 10 62804.455171004276 0.005124400814 KS 2 2 0 0 0 0 10 62804.458362404861 0.005124285609 KS 2 2 0 0 0 0 10 62804.464745206019 0.005124055319 KS 2 2 0 0 0 0 10 62804.470064197582 0.005123863394 KS 2 2 0 0 0 0 10 62804.471128007223 0.005123824938 KS 2 2 0 0 0 0 10 62804.473255598163 0.005123748245 KS 2 2 0 0 0 0 10 62804.474319407839 0.005123709820 KS 2 2 0 0 0 0 10 62804.477510794241 0.005123594696 KS 2 2 0 0 0 0 10 62804.481766004481 0.005123441138 KS 2 2 0 0 0 0 10 62804.482829799976 0.005123402736 KS 2 2 0 0 0 0 10 62804.486021200544 0.005123287644 KS 2 2 0 0 0 0 10 62804.489212601151 0.005123172462 KS 2 2 0 0 0 0 10 62804.496659197799 0.005122903800 KS 2 2 0 0 0 0 10 62804.503041998999 0.005122673489 KS 2 2 0 0 0 0 10 62804.506233399592 0.005122558415 KS 2 2 0 0 0 0 10 62804.511552405276 0.005122366477 KS 2 2 0 0 0 0 10 62804.512616200775 0.005122328138 KS 2 2 0 0 0 0 10 62804.517935206478 0.005122136251 KS 2 2 0 0 0 0 10 62804.518999001959 0.005122097904 KS 2 2 0 0 0 0 10 62804.522190402557 0.005121982780 KS 2 2 0 0 0 0 10 62804.523254198042 0.005121944356 KS 2 2 0 0 0 0 10 62804.524318007671 0.005121905991 KS 2 2 0 0 0 0 10 62804.525381803144 0.005121867634 KS 2 2 0 0 0 0 10 62804.526445598607 0.005121829290 KS 2 2 0 0 0 0 10 62804.527509394087 0.005121790939 KS 2 2 0 0 0 0 10 62804.529636999219 0.005121714112 KS 2 2 0 0 0 0 10 62804.531764604337 0.005121637418 KS 2 2 0 0 0 0 10 62804.533892195260 0.005121560712 KS 2 2 0 0 0 0 10 62804.536019800410 0.005121483931 KS 2 2 0 0 0 0 10 62804.539211200984 0.005121368803 KS 2 2 0 0 0 0 10 62804.540274996467 0.005121330461 KS 2 2 0 0 0 0 10 62804.551976803368 0.005120908360 KS 2 2 0 0 0 0 10 62804.554104394309 0.005120831693 KS 2 2 0 0 0 0 10 62804.558359604548 0.005120678140 KS 2 2 0 0 0 0 10 62804.559423400039 0.005120639771 KS 2 2 0 0 0 0 10 62804.560487195522 0.005120601467 KS 2 2 0 0 0 0 10 62804.561551005157 0.005120563101 KS 2 2 0 0 0 0 10 62804.570061397288 0.005120256208 KS 2 2 0 0 0 0 10 62804.571125206922 0.005120217844 KS 2 2 0 0 0 0 10 62804.574316607511 0.005120102728 KS 2 2 0 0 0 0 10 62804.575380402971 0.005120064421 KS 2 2 0 0 0 0 10 62804.581763204185 0.005119834191 KS 2 2 0 0 0 0 10 62804.583890795117 0.005119757540 KS 2 2 0 0 0 0 10 62804.588146005339 0.005119604122 KS 2 2 0 0 0 0 10 62804.594528806533 0.005119373928 KS 2 2 0 0 0 0 10 62804.595592602028 0.005119335554 KS 2 2 0 0 0 0 10 62804.597720207146 0.005119258854 KS 2 2 0 0 0 0 10 62804.598784002627 0.005119220465 KS 2 2 0 0 0 0 10 62804.601975403219 0.005119105416 KS 2 2 0 0 0 0 10 62804.603039198667 0.005119067073 KS 2 2 0 0 0 0 10 62804.607294394746 0.005118913630 KS 2 2 0 0 0 0 10 62804.608358204404 0.005118875295 KS 2 2 0 0 0 0 10 62804.609421999839 0.005118836982 KS 2 2 0 0 0 0 10 62804.610485795336 0.005118798640 KS 2 2 0 0 0 0 10 62804.614741005593 0.005118645181 KS 2 2 0 0 0 0 10 62804.621123806775 0.005118415023 KS 2 2 0 0 0 0 10 62804.622187602225 0.005118376693 KS 2 2 0 0 0 0 10 62804.624315207353 0.005118300023 KS 2 2 0 0 0 0 10 62804.626442798295 0.005118223352 KS 2 2 0 0 0 0 10 62804.628570403425 0.005118146613 KS 2 2 0 0 0 0 10 62804.630697994366 0.005118069912 KS 2 2 0 0 0 0 10 62804.633889394972 0.005117954904 KS 2 2 0 0 0 0 10 62804.634953204602 0.005117916563 KS 2 2 0 0 0 0 10 62804.636017000078 0.005117878216 KS 2 2 0 0 0 0 10 62804.639208400670 0.005117763128 KS 2 2 0 0 0 0 10 62804.640272196166 0.005117724775 KS 2 2 0 0 0 0 10 62804.641336005808 0.005117686403 KS 2 2 0 0 0 0 10 62804.645591201840 0.005117533088 KS 2 2 0 0 0 0 10 62804.646654997334 0.005117494708 KS 2 2 0 0 0 0 10 62804.647718806971 0.005117456398 KS 2 2 0 0 0 0 10 62804.648782602462 0.005117418111 KS 2 2 0 0 0 0 10 62804.653037798529 0.005117264682 KS 2 2 0 0 0 0 10 62804.654101593990 0.005117226313 KS 2 2 0 0 0 0 10 62804.657292994597 0.005117111379 KS 2 2 0 0 0 0 10 62804.659420599707 0.005117034619 KS 2 2 0 0 0 0 10 62804.665803400891 0.005116804583 KS 2 2 0 0 0 0 10 62804.668994801459 0.005116689514 KS 2 2 0 0 0 0 10 62804.672186202078 0.005116574495 KS 2 2 0 0 0 0 10 62804.673249997539 0.005116536157 KS 2 2 0 0 0 0 10 62804.675377602676 0.005116459471 KS 2 2 0 0 0 0 10 62804.678569003274 0.005116344508 KS 2 2 0 0 0 0 10 62804.679632798737 0.005116306162 KS 2 2 0 0 0 0 10 62804.680696594225 0.005116267841 KS 2 2 0 0 0 0 10 62804.686015599895 0.005116076166 KS 2 2 0 0 0 0 10 62804.688143205038 0.005115999450 KS 2 2 0 0 0 0 10 62804.690270795975 0.005115922744 KS 2 2 0 0 0 0 10 62804.694526006213 0.005115769482 KS 2 2 0 0 0 0 10 62804.696653597186 0.005115692806 KS 2 2 0 0 0 0 10 62804.699844997797 0.005115577769 KS 2 2 0 0 0 0 10 62804.706227798943 0.005115347900 KS 2 2 0 0 0 0 10 62804.708355404076 0.005115271138 KS 2 2 0 0 0 0 10 62804.709419199523 0.005115232846 KS 2 2 0 0 0 0 10 62804.714738205232 0.005115041210 KS 2 2 0 0 0 0 10 62804.716865796199 0.005114964549 KS 2 2 0 0 0 0 10 62804.717929605836 0.005114926203 KS 2 2 0 0 0 0 10 62804.718993401324 0.005114887893 KS 2 2 0 0 0 0 10 62804.726439997970 0.005114619592 KS 2 2 0 0 0 0 10 62804.732822799152 0.005114389605 KS 2 2 0 0 0 0 10 62804.739205600349 0.005114159761 KS 2 2 0 0 0 0 10 62804.740269395826 0.005114121309 KS 2 2 0 0 0 0 10 62804.742397000944 0.005114044724 KS 2 2 0 0 0 0 10 62804.746652197002 0.005113891439 KS 2 2 0 0 0 0 10 62804.756226398771 0.005113546569 KS 2 2 0 0 0 0 10 62804.762609199963 0.005113316641 KS 2 2 0 0 0 0 10 62804.771119606266 0.005113010135 KS 2 2 0 0 0 0 10 62804.789204200174 0.005112358785 KS 2 2 0 0 0 0 10 62804.798778401945 0.005112013979 KS 2 2 0 0 0 0 10 62804.801969802543 0.005111899088 KS 2 2 0 0 0 0 10 62804.808352603732 0.005111669178 KS 2 2 0 0 0 0 10 62804.812607799801 0.005111515976 KS 2 2 0 0 0 0 10 62804.813671595240 0.005111477686 KS 2 2 0 0 0 0 10 62804.824309606685 0.005111094710 KS 2 2 0 0 0 0 10 62804.831756203359 0.005110826501 KS 2 2 0 0 0 0 10 62804.832819998838 0.005110788199 KS 2 2 0 0 0 0 10 62804.837075194879 0.005110635025 KS 2 2 0 0 0 0 10 62804.841330405134 0.005110481817 KS 2 2 0 0 0 0 10 62804.848777001796 0.005110213708 KS 2 2 0 0 0 0 10 62804.854096007495 0.005110022309 KS 2 2 0 0 0 0 10 62804.857287408109 0.005109907309 KS 2 2 0 0 0 0 10 62804.861542604181 0.005109754154 KS 2 2 0 0 0 0 10 62804.876435797478 0.005109218073 KS 2 2 0 0 0 0 10 62804.887073794742 0.005108835167 KS 2 2 0 0 0 0 10 62804.889201399842 0.005108758613 KS 2 2 0 0 0 0 10 62804.904094607356 0.005108222574 KS 2 2 0 0 0 0 10 62804.913668794950 0.005107878048 KS 2 2 0 0 0 0 10 62804.918987800658 0.005107686694 KS 2 2 0 0 0 0 10 62804.920051596138 0.005107648323 KS 2 2 0 0 0 0 10 62804.923242996732 0.005107533529 KS 2 2 0 0 0 0 10 62804.932817198497 0.005107188977 KS 2 2 0 0 0 0 10 62804.938136204233 0.005106997585 KS 2 2 0 0 0 0 10 62804.939199999700 0.005106959290 KS 2 2 0 0 0 0 10 62804.944519005392 0.005106768007 KS 2 2 0 0 0 0 10 62804.948774201461 0.005106614888 KS 2 2 0 0 0 0 10 62804.950901806595 0.005106538294 KS 2 2 0 0 0 0 10 62804.954093207172 0.005106423480 KS 2 2 0 0 0 0 10 62804.959412198733 0.005106232100 KS 2 2 0 0 0 0 10 62804.961539803844 0.005106155544 KS 2 2 0 0 0 0 10 62804.967922605039 0.005105925938 KS 2 2 0 0 0 0 10 62804.979624397751 0.005105504982 KS 2 2 0 0 0 0 10 62804.982815798346 0.005105390208 KS 2 2 0 0 0 0 10 62804.983879607958 0.005105351994 KS 2 2 0 0 0 0 10 62804.986007198932 0.005105275425 KS 2 2 0 0 0 0 10 62804.989198599528 0.005105160655 KS 2 2 0 0 0 0 10 62804.997709005830 0.005104854450 KS 2 2 0 0 0 0 10 62804.998772801313 0.005104816177 KS 2 2 0 0 0 0 10 62804.999836596781 0.005104777974 KS 2 2 0 0 0 0 10 62805.011538403656 0.005104357123 KS 2 2 0 0 0 0 10 62805.018985000320 0.005104089291 KS 2 2 0 0 0 0 10 62805.036005798768 0.005103477208 KS 2 2 0 0 0 0 10 62805.041324804481 0.005103285936 KS 2 2 0 0 0 0 10 62805.045580000535 0.005103132967 KS 2 2 0 0 0 0 10 62805.047707605631 0.005103056459 KS 2 2 0 0 0 0 10 62805.050899006257 0.005102941654 KS 2 2 0 0 0 0 10 62805.056217997784 0.005102750461 KS 2 2 0 0 0 0 10 62805.057281807447 0.005102712206 KS 2 2 0 0 0 0 10 62805.068983600138 0.005102291490 KS 2 2 0 0 0 0 10 62805.080685407065 0.005101870781 KS 2 2 0 0 0 0 10 62805.086004398567 0.005101679597 KS 2 2 0 0 0 0 10 62805.087068194049 0.005101641350 KS 2 2 0 0 0 0 10 62805.093450995227 0.005101411904 KS 2 2 0 0 0 0 10 62805.094514804868 0.005101373648 KS 2 2 0 0 0 0 10 62805.100897606057 0.005101144222 KS 2 2 0 0 0 0 10 62805.101961401547 0.005101105965 KS 2 2 0 0 0 0 10 62805.112599398798 0.005100723582 KS 2 2 0 0 0 0 10 62805.121109805102 0.005100417714 KS 2 2 0 0 0 0 10 62805.123237396035 0.005100341282 KS 2 2 0 0 0 0 10 62805.137066808053 0.005099844248 KS 2 2 0 0 0 0 10 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