H1 CRD 2 2022 2 26 11 H2 HERL 7840 35 1 4 ILRS H3 gracefo1 1804701 0123 43476 0 1 1 H4 0 2022 2 26 5 41 51 2022 2 26 5 42 43 1 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 0.369 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 20338.560000 1028.31 275.90 99.1 0 20 20701.440000 1028.34 276.10 99.2 0 41 17936.640000 0 KS 3856 3856 122.977 104403.6 0.0 22.0 0.210 -0.340 -3.0 2 0 0 1 na 41 24373.440000 0 KS 2323 2323 122.977 104402.2 0.0 22.0 0.190 -0.420 -4.0 2 0 0 2 na 40 20537.280000 0 KS 6179 6179 122.977 104403.0 1.3 22.0 0.200 -0.380 -3.5 2 2 0 3 na 50 KS 25.6 0.124 -0.190 3.0 0 10 20510.006658199927 0.006161038742 KS 2 2 0 0 0 0 10 20510.010658196305 0.006160969850 KS 2 2 0 0 0 0 10 20510.014658192675 0.006160900921 KS 2 2 0 0 0 0 10 20510.017658197052 0.006160849259 KS 2 2 0 0 0 0 10 20510.026658195999 0.006160694250 KS 2 2 0 0 0 0 10 20510.034658202938 0.006160556468 KS 2 2 0 0 0 0 10 20510.035658194953 0.006160539186 KS 2 2 0 0 0 0 10 20510.040658197511 0.006160453188 KS 2 2 0 0 0 0 10 20510.055658191006 0.006160194943 KS 2 2 0 0 0 0 10 20510.057658203390 0.006160160470 KS 2 2 0 0 0 0 10 20510.082658202009 0.006159730336 KS 2 2 0 0 0 0 10 20510.087658204597 0.006159644282 KS 2 2 0 0 0 0 10 20510.108658192672 0.006159283151 KS 2 2 0 0 0 0 10 20510.109658198864 0.006159265951 KS 2 2 0 0 0 0 10 20510.124658192355 0.006159008111 KS 2 2 0 0 0 0 10 20510.126658204721 0.006158973708 KS 2 2 0 0 0 0 10 20510.129658194935 0.006158922150 KS 2 2 0 0 0 0 10 20510.140658192046 0.006158733151 KS 2 2 0 0 0 0 10 20510.142658204408 0.006158698769 KS 2 2 0 0 0 0 10 20510.145658194644 0.006158647172 KS 2 2 0 0 0 0 10 20510.153658201540 0.006158509766 KS 2 2 0 0 0 0 10 20510.168658195074 0.006158252112 KS 2 2 0 0 0 0 10 20510.178658200213 0.006158080448 KS 2 2 0 0 0 0 10 20510.185658200935 0.006157960246 KS 2 2 0 0 0 0 10 20510.187658199142 0.006157925852 KS 2 2 0 0 0 0 10 20510.188658191153 0.006157908662 KS 2 2 0 0 0 0 10 20510.195658191915 0.006157788550 KS 2 2 0 0 0 0 10 20510.219658198541 0.006157376719 KS 2 2 0 0 0 0 10 20510.229658203658 0.006157205154 KS 2 2 0 0 0 0 10 20510.232658193891 0.006157153703 KS 2 2 0 0 0 0 10 20510.241658192819 0.006156999348 KS 2 2 0 0 0 0 10 20510.246658195378 0.006156913600 KS 2 2 0 0 0 0 10 20510.249658199740 0.006156862222 KS 2 2 0 0 0 0 10 20510.261658203050 0.006156656488 KS 2 2 0 0 0 0 10 20510.265658199434 0.006156587875 KS 2 2 0 0 0 0 10 20510.292658196286 0.006156125237 KS 2 2 0 0 0 0 10 20510.309658202161 0.006155834107 KS 2 2 0 0 0 0 10 20510.317658194934 0.006155697002 KS 2 2 0 0 0 0 10 20510.319658193130 0.006155662873 KS 2 2 0 0 0 0 10 20510.342658193582 0.006155269143 KS 2 2 0 0 0 0 10 20510.362658203849 0.006154926872 KS 2 2 0 0 0 0 10 20510.409658196790 0.006154123256 KS 2 2 0 0 0 0 10 20510.422658192096 0.006153901104 KS 2 2 0 0 0 0 10 20510.432658197235 0.006153730282 KS 2 2 0 0 0 0 10 20510.437658199793 0.006153644843 KS 2 2 0 0 0 0 10 20510.438658191822 0.006153627785 KS 2 2 0 0 0 0 10 20510.443658194370 0.006153542382 KS 2 2 0 0 0 0 10 20510.447658190751 0.006153474069 KS 2 2 0 0 0 0 10 20510.467658201011 0.006153132583 KS 2 2 0 0 0 0 10 20510.482658194556 0.006152876585 KS 2 2 0 0 0 0 10 20510.485658198937 0.006152825332 KS 2 2 0 0 0 0 10 20510.497658202235 0.006152620597 KS 2 2 0 0 0 0 10 20510.508658199389 0.006152432981 KS 2 2 0 0 0 0 10 20510.535658196244 0.006151972536 KS 2 2 0 0 0 0 10 20510.540658198832 0.006151887323 KS 2 2 0 0 0 0 10 20510.552658202127 0.006151682735 KS 2 2 0 0 0 0 10 20510.559658202899 0.006151563509 KS 2 2 0 0 0 0 10 20510.561658201077 0.006151529445 KS 2 2 0 0 0 0 10 20510.567658195661 0.006151427204 KS 2 2 0 0 0 0 10 20510.579658198989 0.006151222759 KS 2 2 0 0 0 0 10 20510.583658195363 0.006151154674 KS 2 2 0 0 0 0 10 20510.591658202298 0.006151018489 KS 2 2 0 0 0 0 10 20510.606658195862 0.006150762990 KS 2 2 0 0 0 0 10 20510.612658204609 0.006150660890 KS 2 2 0 0 0 0 10 20510.613658196620 0.006150643903 KS 2 2 0 0 0 0 10 20510.625658199926 0.006150439701 KS 2 2 0 0 0 0 10 20510.642658191657 0.006150150469 KS 2 2 0 0 0 0 10 20510.656658193184 0.006149912321 KS 2 2 0 0 0 0 10 20510.665658192116 0.006149759336 KS 2 2 0 0 0 0 10 20510.679406392424 0.006149525578 KS 2 2 0 0 0 0 10 20510.687827201757 0.006149382456 KS 2 2 0 0 0 0 10 20510.693090200501 0.006149293028 KS 2 2 0 0 0 0 10 20510.700458401618 0.006149167830 KS 2 2 0 0 0 0 10 20510.701510995681 0.006149149926 KS 2 2 0 0 0 0 10 20510.723615598949 0.006148774470 KS 2 2 0 0 0 0 10 20510.727826003618 0.006148702962 KS 2 2 0 0 0 0 10 20510.749930592705 0.006148327729 KS 2 2 0 0 0 0 10 20510.754140997389 0.006148256173 KS 2 2 0 0 0 0 10 20510.755193591453 0.006148238361 KS 2 2 0 0 0 0 10 20510.758351402037 0.006148184781 KS 2 2 0 0 0 0 10 20510.780455991156 0.006147809796 KS 2 2 0 0 0 0 10 20510.782561193497 0.006147774043 KS 2 2 0 0 0 0 10 20510.786771598163 0.006147702576 KS 2 2 0 0 0 0 10 20510.792034596896 0.006147613356 KS 2 2 0 0 0 0 10 20510.813086591941 0.006147256415 KS 2 2 0 0 0 0 10 20510.815191794260 0.006147220690 KS 2 2 0 0 0 0 10 20510.817296996604 0.006147185047 KS 2 2 0 0 0 0 10 20510.833085992865 0.006146917465 KS 2 2 0 0 0 0 10 20510.838348991616 0.006146828245 KS 2 2 0 0 0 0 10 20510.839401599853 0.006146810454 KS 2 2 0 0 0 0 10 20510.843612004548 0.006146739098 KS 2 2 0 0 0 0 10 20510.845717192704 0.006146703386 KS 2 2 0 0 0 0 10 20510.859401000795 0.006146471701 KS 2 2 0 0 0 0 10 20510.861506203146 0.006146436046 KS 2 2 0 0 0 0 10 20510.870979592401 0.006146275590 KS 2 2 0 0 0 0 10 20510.887821196917 0.006145990487 KS 2 2 0 0 0 0 10 20510.899399802660 0.006145794551 KS 2 2 0 0 0 0 10 20510.900452396752 0.006145776754 KS 2 2 0 0 0 0 10 20510.903610193171 0.006145723322 KS 2 2 0 0 0 0 10 20510.916241393006 0.006145509600 KS 2 2 0 0 0 0 10 20510.926767404711 0.006145331560 KS 2 2 0 0 0 0 10 20510.929925201133 0.006145278141 KS 2 2 0 0 0 0 10 20510.930977795204 0.006145260357 KS 2 2 0 0 0 0 10 20510.933082997548 0.006145224735 KS 2 2 0 0 0 0 10 20510.934135591640 0.006145206939 KS 2 2 0 0 0 0 10 20510.936240793970 0.006145171349 KS 2 2 0 0 0 0 10 20510.944661603320 0.006145028957 KS 2 2 0 0 0 0 10 20510.947819399749 0.006144975579 KS 2 2 0 0 0 0 10 20510.960450599585 0.006144762088 KS 2 2 0 0 0 0 10 20510.961503193663 0.006144744280 KS 2 2 0 0 0 0 10 20510.962555801903 0.006144726526 KS 2 2 0 0 0 0 10 20510.973081799424 0.006144548664 KS 2 2 0 0 0 0 10 20510.974134393513 0.006144530861 KS 2 2 0 0 0 0 10 20510.988870795703 0.006144281901 KS 2 2 0 0 0 0 10 20510.994133794444 0.006144193025 KS 2 2 0 0 0 0 10 20510.999396793228 0.006144104069 KS 2 2 0 0 0 0 10 20511.001501995550 0.006144068560 KS 2 2 0 0 0 0 10 20511.003607197890 0.006144033011 KS 2 2 0 0 0 0 10 20511.006764994301 0.006143979704 KS 2 2 0 0 0 0 10 20511.016238397748 0.006143819748 KS 2 2 0 0 0 0 10 20511.019396194144 0.006143766455 KS 2 2 0 0 0 0 10 20511.029922191661 0.006143588830 KS 2 2 0 0 0 0 10 20511.033080002257 0.006143535502 KS 2 2 0 0 0 0 10 20511.034132596313 0.006143517738 KS 2 2 0 0 0 0 10 20511.043605999774 0.006143357901 KS 2 2 0 0 0 0 10 20511.054131997284 0.006143180266 KS 2 2 0 0 0 0 10 20511.057289793698 0.006143127096 KS 2 2 0 0 0 0 10 20511.069920993559 0.006142914014 KS 2 2 0 0 0 0 10 20511.076236600558 0.006142807549 KS 2 2 0 0 0 0 10 20511.077289194665 0.006142789722 KS 2 2 0 0 0 0 10 20511.082552193406 0.006142701056 KS 2 2 0 0 0 0 10 20511.092025596834 0.006142541370 KS 2 2 0 0 0 0 10 20511.103604202603 0.006142346271 KS 2 2 0 0 0 0 10 20511.108867201365 0.006142257550 KS 2 2 0 0 0 0 10 20511.113077591883 0.006142186564 KS 2 2 0 0 0 0 10 20511.116235402475 0.006142133440 KS 2 2 0 0 0 0 10 20511.130971804654 0.006141885149 KS 2 2 0 0 0 0 10 20511.139392599820 0.006141743397 KS 2 2 0 0 0 0 10 20511.143603004515 0.006141672461 KS 2 2 0 0 0 0 10 20511.149918597348 0.006141566138 KS 2 2 0 0 0 0 10 20511.152023799681 0.006141530731 KS 2 2 0 0 0 0 10 20511.192022601594 0.006140857647 KS 2 2 0 0 0 0 10 20511.197285600363 0.006140769062 KS 2 2 0 0 0 0 10 20511.202548599093 0.006140680569 KS 2 2 0 0 0 0 10 20511.204653801447 0.006140645185 KS 2 2 0 0 0 0 10 20511.208864191944 0.006140574390 KS 2 2 0 0 0 0 10 20511.214127190706 0.006140485844 KS 2 2 0 0 0 0 10 20511.228863592911 0.006140238164 KS 2 2 0 0 0 0 10 20511.232021403492 0.006140185071 KS 2 2 0 0 0 0 10 20511.236231793995 0.006140114352 KS 2 2 0 0 0 0 10 20511.240442198661 0.006140043636 KS 2 2 0 0 0 0 10 20511.243599995116 0.006139990493 KS 2 2 0 0 0 0 10 20511.244652603349 0.006139972821 KS 2 2 0 0 0 0 10 20511.252020804459 0.006139849021 KS 2 2 0 0 0 0 10 20511.254125992618 0.006139813642 KS 2 2 0 0 0 0 10 20511.256231194962 0.006139778299 KS 2 2 0 0 0 0 10 20511.257283803203 0.006139760631 KS 2 2 0 0 0 0 10 20511.260441599654 0.006139707569 KS 2 2 0 0 0 0 10 20511.261494193699 0.006139689937 KS 2 2 0 0 0 0 10 20511.272020191231 0.006139513114 KS 2 2 0 0 0 0 10 20511.273072799500 0.006139495432 KS 2 2 0 0 0 0 10 20511.281493594684 0.006139354016 KS 2 2 0 0 0 0 10 20511.282546202914 0.006139336432 KS 2 2 0 0 0 0 10 20511.285703999354 0.006139283325 KS 2 2 0 0 0 0 10 20511.288861795776 0.006139230368 KS 2 2 0 0 0 0 10 20511.289914404035 0.006139212730 KS 2 2 0 0 0 0 10 20511.294124794549 0.006139141942 KS 2 2 0 0 0 0 10 20511.297282590942 0.006139089013 KS 2 2 0 0 0 0 10 20511.319387194246 0.006138718079 KS 2 2 0 0 0 0 10 20511.322544990675 0.006138665105 KS 2 2 0 0 0 0 10 20511.323597598937 0.006138647437 KS 2 2 0 0 0 0 10 20511.325702801267 0.006138612132 KS 2 2 0 0 0 0 10 20511.327808003607 0.006138576830 KS 2 2 0 0 0 0 10 20511.333071002355 0.006138488554 KS 2 2 0 0 0 0 10 20511.338334001124 0.006138400293 KS 2 2 0 0 0 0 10 20511.340439203483 0.006138364967 KS 2 2 0 0 0 0 10 20511.342544391631 0.006138329699 KS 2 2 0 0 0 0 10 20511.345702202234 0.006138276753 KS 2 2 0 0 0 0 10 20511.346754796308 0.006138259027 KS 2 2 0 0 0 0 10 20511.350965200971 0.006138188495 KS 2 2 0 0 0 0 10 20511.352017795060 0.006138170860 KS 2 2 0 0 0 0 10 20511.355175591474 0.006138117909 KS 2 2 0 0 0 0 10 20511.360438604421 0.006138029656 KS 2 2 0 0 0 0 10 20511.361491198506 0.006138011974 KS 2 2 0 0 0 0 10 20511.362543792569 0.006137994398 KS 2 2 0 0 0 0 10 20511.365701603201 0.006137941425 KS 2 2 0 0 0 0 10 20511.366754197250 0.006137923806 KS 2 2 0 0 0 0 10 20511.367806791339 0.006137906201 KS 2 2 0 0 0 0 10 20511.368859399612 0.006137888526 KS 2 2 0 0 0 0 10 20511.375174992434 0.006137782700 KS 2 2 0 0 0 0 10 20511.381490599462 0.006137676890 KS 2 2 0 0 0 0 10 20511.383595801803 0.006137641577 KS 2 2 0 0 0 0 10 20511.385701004132 0.006137606337 KS 2 2 0 0 0 0 10 20511.386753598239 0.006137588662 KS 2 2 0 0 0 0 10 20511.395174393394 0.006137447636 KS 2 2 0 0 0 0 10 20511.396227001671 0.006137430056 KS 2 2 0 0 0 0 10 20511.401490000415 0.006137341857 KS 2 2 0 0 0 0 10 20511.404647796851 0.006137288953 KS 2 2 0 0 0 0 10 20511.407805593255 0.006137236078 KS 2 2 0 0 0 0 10 20511.409910795599 0.006137200827 KS 2 2 0 0 0 0 10 20511.414121200258 0.006137130347 KS 2 2 0 0 0 0 10 20511.423594603726 0.006136971735 KS 2 2 0 0 0 0 10 20511.425699791896 0.006136936475 KS 2 2 0 0 0 0 10 20511.427804994230 0.006136901250 KS 2 2 0 0 0 0 10 20511.429910196573 0.006136866032 KS 2 2 0 0 0 0 10 20511.432015398925 0.006136830739 KS 2 2 0 0 0 0 10 20511.452014799848 0.006136496112 KS 2 2 0 0 0 0 10 20511.453067393955 0.006136478535 KS 2 2 0 0 0 0 10 20511.464645999720 0.006136284810 KS 2 2 0 0 0 0 10 20511.467803796157 0.006136232003 KS 2 2 0 0 0 0 10 20511.481487604251 0.006136003167 KS 2 2 0 0 0 0 10 20511.484645400702 0.006135950359 KS 2 2 0 0 0 0 10 20511.494118804127 0.006135792038 KS 2 2 0 0 0 0 10 20511.509907800428 0.006135528119 KS 2 2 0 0 0 0 10 20511.633062002631 0.006133472864 KS 2 2 0 0 0 0 10 20511.648850998947 0.006133209734 KS 2 2 0 0 0 0 10 20511.682534193878 0.006132648625 KS 2 2 0 0 0 0 10 20511.684639396211 0.006132613579 KS 2 2 0 0 0 0 10 20511.696218001962 0.006132420843 KS 2 2 0 0 0 0 10 20511.704638797146 0.006132280695 KS 2 2 0 0 0 0 10 20511.757268798970 0.006131405215 KS 2 2 0 0 0 0 10 20511.759374001296 0.006131370321 KS 2 2 0 0 0 0 10 20511.778320794016 0.006131055379 KS 2 2 0 0 0 0 10 20511.809898800777 0.006130530800 KS 2 2 0 0 0 0 10 20511.810951394877 0.006130513322 KS 2 2 0 0 0 0 10 20511.815161799583 0.006130443389 KS 2 2 0 0 0 0 10 20511.833055998188 0.006130146317 KS 2 2 0 0 0 0 10 20511.846739792145 0.006129919247 KS 2 2 0 0 0 0 10 20511.857265803868 0.006129744589 KS 2 2 0 0 0 0 10 20511.913053602068 0.006128819677 KS 2 2 0 0 0 0 10 20511.915158804422 0.006128784817 KS 2 2 0 0 0 0 10 20511.921474397277 0.006128680133 KS 2 2 0 0 0 0 10 20511.930947800749 0.006128523186 KS 2 2 0 0 0 0 10 20512.013050592832 0.006127164439 KS 2 2 0 0 0 0 10 20512.026734400937 0.006126938224 KS 2 2 0 0 0 0 10 20512.059365001824 0.006126399007 KS 2 2 0 0 0 0 10 20512.066733202915 0.006126277287 KS 2 2 0 0 0 0 10 20512.091995602656 0.006125860169 KS 2 2 0 0 0 0 10 20512.093048196770 0.006125842785 KS 2 2 0 0 0 0 10 20512.103574194305 0.006125669035 KS 2 2 0 0 0 0 10 20512.168835396013 0.006124592770 KS 2 2 0 0 0 0 10 20512.180414001799 0.006124401979 KS 2 2 0 0 0 0 10 20512.286726599636 0.006122652211 KS 2 2 0 0 0 0 10 20512.325672793355 0.006122012198 KS 2 2 0 0 0 0 10 20512.331988400369 0.006121908476 KS 2 2 0 0 0 0 10 20512.347777396702 0.006121649195 KS 2 2 0 0 0 0 10 20512.358303394234 0.006121476422 KS 2 2 0 0 0 0 10 20512.370934594106 0.006121269099 KS 2 2 0 0 0 0 10 20512.386723604617 0.006121010028 KS 2 2 0 0 0 0 10 20512.440406200549 0.006120129900 KS 2 2 0 0 0 0 10 20512.495141404783 0.006119233610 KS 2 2 0 0 0 0 10 20512.499351795286 0.006119164639 KS 2 2 0 0 0 0 10 20512.518298602205 0.006118854589 KS 2 2 0 0 0 0 10 20512.565665591155 0.006118080155 KS 2 2 0 0 0 0 10 20512.587770194510 0.006117719005 KS 2 2 0 0 0 0 10 20512.610927391932 0.006117340785 KS 2 2 0 0 0 0 10 20512.616190390698 0.006117254901 KS 2 2 0 0 0 0 10 20512.617242998971 0.006117237735 KS 2 2 0 0 0 0 10 20512.627768996495 0.006117065967 KS 2 2 0 0 0 0 10 20512.656189192687 0.006116602250 KS 2 2 0 0 0 0 10 20512.700398399393 0.006115881502 KS 2 2 0 0 0 0 10 20512.711976991028 0.006115692871 KS 2 2 0 0 0 0 10 20512.720397800422 0.006115555672 KS 2 2 0 0 0 0 10 20512.727766001499 0.006115435709 KS 2 2 0 0 0 0 10 20512.739344593163 0.006115247158 KS 2 2 0 0 0 0 10 20512.754080995397 0.006115007266 KS 2 2 0 0 0 0 10 20512.762501790588 0.006114870276 KS 2 2 0 0 0 0 10 20512.804605794954 0.006114185373 KS 2 2 0 0 0 0 10 20512.823552601873 0.006113877436 KS 2 2 0 0 0 0 10 20512.898287192955 0.006112663799 KS 2 2 0 0 0 0 10 20512.949864600796 0.006111827432 KS 2 2 0 0 0 0 10 20512.968811393566 0.006111520412 KS 2 2 0 0 0 0 10 20513.019336193145 0.006110702338 KS 2 2 0 0 0 0 10 20513.069860992720 0.006109885120 KS 2 2 0 0 0 0 10 20513.115122793526 0.006109153888 KS 2 2 0 0 0 0 10 20513.122490994676 0.006109034842 KS 2 2 0 0 0 0 10 20513.213014596291 0.006107574644 KS 2 2 0 0 0 0 10 20513.220382797404 0.006107455939 KS 2 2 0 0 0 0 10 20513.259328991222 0.006106828692 KS 2 2 0 0 0 0 10 20513.307748602638 0.006106049643 KS 2 2 0 0 0 0 10 20513.319327194284 0.006105863454 KS 2 2 0 0 0 0 10 20513.338274001235 0.006105558893 KS 2 2 0 0 0 0 10 20513.367746791540 0.006105085403 KS 2 2 0 0 0 0 10 20513.456165190870 0.006103666785 KS 2 2 0 0 0 0 10 20513.483532793038 0.006103228234 KS 2 2 0 0 0 0 10 20513.507742598795 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