H1 CRD 2 2022 3 14 8 H2 HERL 7840 35 1 4 ILRS H3 hy2d 2104301 2211 48621 0 1 1 H4 0 2022 3 14 5 33 4 2022 3 14 5 35 48 1 0 0 0 1 0 2 0 C0 0 532.080 KS kHz SPD5 HMas HxF HxMet Hxtr C1 0 kHz Nd-Yag 1064.16 1000.00 1.10 10.0 20.00 1 C2 0 SPD5 SPAD5 532.080 20.00 0.0 200.0 +0.7V 0.0 0.15 90.0 0.0 Single_fot 0.0 0.0 0 C3 0 HMas iMaser_3000 iMaser_3000 HxET_=_3x_dassault 55 0.278 C5 0 HxF kgate,dplay 0.1,0.1 solve,gauss 0.1,0.1 C6 0 HxMet Druck DPI141 (700/99-06)&(449/97-1) Rotronics MP103A-T7-W4W 46174001 Rotronics MP103A-T7-W4W 46174001 C7 0 Hxtr watertower2 122.89940 2.00 na 1.10 tr,gauss4 0.1,0.1 20 19802.880000 1017.49 278.60 99.7 0 20 20157.120000 1017.62 278.50 99.7 0 41 17798.400000 0 KS 3642 3642 122.977 104404.2 0.0 23.3 0.160 -0.270 -4.0 2 0 0 1 na 41 20977.920000 0 KS 2927 2927 122.977 104410.9 0.0 21.3 0.240 -0.310 -6.0 2 0 0 2 na 40 20066.400000 0 KS 6569 6569 122.977 104409.0 -6.7 22.3 0.200 -0.290 -5.0 2 2 0 3 na 50 KS 36.2 0.266 -0.339 1.0 0 10 19988.015542109602 0.006607072825 KS 2 2 0 0 0 0 10 19988.063542103046 0.006607170843 KS 2 2 0 0 0 0 10 19988.260542108685 0.006607580273 KS 2 2 0 0 0 0 10 19988.317542102679 0.006607700949 KS 2 2 0 0 0 0 10 19988.867542114091 0.006608914809 KS 2 2 0 0 0 0 10 19988.927542113044 0.006609052651 KS 2 2 0 0 0 0 10 19988.994542113986 0.006609207900 KS 2 2 0 0 0 0 10 19989.195542102698 0.006609681561 KS 2 2 0 0 0 0 10 19989.215542102367 0.006609729305 KS 2 2 0 0 0 0 10 19989.866542104755 0.006611349872 KS 2 2 0 0 0 0 10 19989.867542111107 0.006611352455 KS 2 2 0 0 0 0 10 19989.926542103756 0.006611505608 KS 2 2 0 0 0 0 10 19989.954542111762 0.006611578641 KS 2 2 0 0 0 0 10 19989.960542107416 0.006611594344 KS 2 2 0 0 0 0 10 19989.982542105652 0.006611651902 KS 2 2 0 0 0 0 10 19990.066542101416 0.006611873180 KS 2 2 0 0 0 0 10 19990.312542107244 0.006612532902 KS 2 2 0 0 0 0 10 19990.459542106975 0.006612935743 KS 2 2 0 0 0 0 10 19990.575542107945 0.006613258241 KS 2 2 0 0 0 0 10 19990.603542101817 0.006613336630 KS 2 2 0 0 0 0 10 19990.667542112122 0.006613516824 KS 2 2 0 0 0 0 10 19990.734542113154 0.006613706607 KS 2 2 0 0 0 0 10 19990.746542104458 0.006613740794 KS 2 2 0 0 0 0 10 19990.818542108980 0.006613946571 KS 2 2 0 0 0 0 10 19990.921542112301 0.006614243663 KS 2 2 0 0 0 0 10 19990.927542107951 0.006614261097 KS 2 2 0 0 0 0 10 19991.035542100552 0.006614576198 KS 2 2 0 0 0 0 10 19991.300542114106 0.006615363953 KS 2 2 0 0 0 0 10 19991.404542109645 0.006615678844 KS 2 2 0 0 0 0 10 19991.421542104425 0.006615730584 KS 2 2 0 0 0 0 10 19991.432542103543 0.006615764145 KS 2 2 0 0 0 0 10 19991.500542110982 0.006615972345 KS 2 2 0 0 0 0 10 19991.516542113597 0.006616021573 KS 2 2 0 0 0 0 10 19991.552542101675 0.006616132542 KS 2 2 0 0 0 0 10 19991.648542103048 0.006616430140 KS 2 2 0 0 0 0 10 19991.767542109032 0.006616802942 KS 2 2 0 0 0 0 10 19991.881542111536 0.006617164071 KS 2 2 0 0 0 0 10 19991.894542109214 0.006617205512 KS 2 2 0 0 0 0 10 19991.912542110331 0.006617262948 KS 2 2 0 0 0 0 10 19992.147542103274 0.006618021683 KS 2 2 0 0 0 0 10 19992.234542104099 0.006618306692 KS 2 2 0 0 0 0 10 19992.271542112736 0.006618428622 KS 2 2 0 0 0 0 10 19992.332542104050 0.006618630468 KS 2 2 0 0 0 0 10 19992.372542103443 0.006618763406 KS 2 2 0 0 0 0 10 19992.414542101422 0.006618903576 KS 2 2 0 0 0 0 10 19992.506542105748 0.006619212283 KS 2 2 0 0 0 0 10 19992.507542112100 0.006619215668 KS 2 2 0 0 0 0 10 19992.842542103699 0.006620361299 KS 2 2 0 0 0 0 10 19992.920542103995 0.006620632763 KS 2 2 0 0 0 0 10 19992.940542103715 0.006620702676 KS 2 2 0 0 0 0 10 19993.076542104583 0.006621181215 KS 2 2 0 0 0 0 10 19993.077542110957 0.006621184738 KS 2 2 0 0 0 0 10 19993.104542112687 0.006621280431 KS 2 2 0 0 0 0 10 19993.133542112999 0.006621383436 KS 2 2 0 0 0 0 10 19993.154542104912 0.006621458102 KS 2 2 0 0 0 0 10 19993.359542105569 0.006622194449 KS 2 2 0 0 0 0 10 19993.513542107685 0.006622755926 KS 2 2 0 0 0 0 10 19993.634542112395 0.006623201790 KS 2 2 0 0 0 0 10 19993.698542108705 0.006623439415 KS 2 2 0 0 0 0 10 19993.785542109625 0.006623764533 KS 2 2 0 0 0 0 10 19994.036542105485 0.006624714587 KS 2 2 0 0 0 0 10 19994.159542108806 0.006625186941 KS 2 2 0 0 0 0 10 19994.281542105760 0.006625659936 KS 2 2 0 0 0 0 10 19994.585542113084 0.006626857687 KS 2 2 0 0 0 0 10 19994.644542105929 0.006627093260 KS 2 2 0 0 0 0 10 19994.691542107452 0.006627281700 KS 2 2 0 0 0 0 10 19995.152542107877 0.006629164395 KS 2 2 0 0 0 0 10 19995.159542109908 0.006629193465 KS 2 2 0 0 0 0 10 19995.168542110459 0.006629230914 KS 2 2 0 0 0 0 10 19995.174542106153 0.006629255834 KS 2 2 0 0 0 0 10 19995.201542107952 0.006629368166 KS 2 2 0 0 0 0 10 19995.355542110225 0.006630013440 KS 2 2 0 0 0 0 10 19995.357542108773 0.006630021764 KS 2 2 0 0 0 0 10 19995.379542107090 0.006630114518 KS 2 2 0 0 0 0 10 19995.407542101060 0.006630232735 KS 2 2 0 0 0 0 10 19995.478542113633 0.006630533610 KS 2 2 0 0 0 0 10 19995.491542111322 0.006630588885 KS 2 2 0 0 0 0 10 19995.530542104480 0.006630754935 KS 2 2 0 0 0 0 10 19995.590542103728 0.006631011370 KS 2 2 0 0 0 0 10 19995.820542107955 0.006632003810 KS 2 2 0 0 0 0 10 19995.843542112601 0.006632103803 KS 2 2 0 0 0 0 10 19995.870542100223 0.006632221529 KS 2 2 0 0 0 0 10 19995.941542112840 0.006632532028 KS 2 2 0 0 0 0 10 19996.009542106294 0.006632831004 KS 2 2 0 0 0 0 10 19996.103542109435 0.006633246227 KS 2 2 0 0 0 0 10 19996.216542105929 0.006633748967 KS 2 2 0 0 0 0 10 19996.238542104256 0.006633847261 KS 2 2 0 0 0 0 10 19996.379542108923 0.006634480790 KS 2 2 0 0 0 0 10 19996.381542107487 0.006634489745 KS 2 2 0 0 0 0 10 19996.530542106404 0.006635165588 KS 2 2 0 0 0 0 10 19996.571542112262 0.006635352741 KS 2 2 0 0 0 0 10 19996.573542110833 0.006635361950 KS 2 2 0 0 0 0 10 19996.635542108681 0.006635645824 KS 2 2 0 0 0 0 10 19996.973542106120 0.006637213591 KS 2 2 0 0 0 0 10 19997.124542103662 0.006637924880 KS 2 2 0 0 0 0 10 19997.150542113301 0.006638047989 KS 2 2 0 0 0 0 10 19997.158542107536 0.006638085932 KS 2 2 0 0 0 0 10 19997.168542100313 0.006638133383 KS 2 2 0 0 0 0 10 19997.178542107289 0.006638180846 KS 2 2 0 0 0 0 10 19997.184542102983 0.006638209314 KS 2 2 0 0 0 0 10 19997.282542103290 0.006638676270 KS 2 2 0 0 0 0 10 19997.348542112435 0.006638992314 KS 2 2 0 0 0 0 10 19997.430542110094 0.006639386731 KS 2 2 0 0 0 0 10 19997.506542112049 0.006639754096 KS 2 2 0 0 0 0 10 19997.508542110627 0.006639763779 KS 2 2 0 0 0 0 10 19997.571542100712 0.006640069661 KS 2 2 0 0 0 0 10 19997.590542108286 0.006640162078 KS 2 2 0 0 0 0 10 19997.691542113542 0.006640655394 KS 2 2 0 0 0 0 10 19997.692542105724 0.006640660365 KS 2 2 0 0 0 0 10 19997.699542107777 0.006640694539 KS 2 2 0 0 0 0 10 19997.725542103246 0.006640822113 KS 2 2 0 0 0 0 10 19997.771542112641 0.006641048227 KS 2 2 0 0 0 0 10 19997.778542100492 0.006641082770 KS 2 2 0 0 0 0 10 19997.801542105230 0.006641196053 KS 2 2 0 0 0 0 10 19997.802542111589 0.006641200962 KS 2 2 0 0 0 0 10 19997.891542111283 0.006641641010 KS 2 2 0 0 0 0 10 19997.900542111925 0.006641685738 KS 2 2 0 0 0 0 10 19997.933542109433 0.006641849449 KS 2 2 0 0 0 0 10 19997.942542110013 0.006641894209 KS 2 2 0 0 0 0 10 19997.945542100788 0.006641909145 KS 2 2 0 0 0 0 10 19997.995542107317 0.006642158156 KS 2 2 0 0 0 0 10 19998.030542103377 0.006642332913 KS 2 2 0 0 0 0 10 19998.050542103156 0.006642432970 KS 2 2 0 0 0 0 10 19998.071542109297 0.006642538077 KS 2 2 0 0 0 0 10 19998.072542101501 0.006642543144 KS 2 2 0 0 0 0 10 19998.151542108419 0.006642939880 KS 2 2 0 0 0 0 10 19998.167542111063 0.006643020466 KS 2 2 0 0 0 0 10 19998.195542105113 0.006643161606 KS 2 2 0 0 0 0 10 19998.208542102831 0.006643227281 KS 2 2 0 0 0 0 10 19998.242542106713 0.006643399163 KS 2 2 0 0 0 0 10 19998.266542103625 0.006643520749 KS 2 2 0 0 0 0 10 19998.269542108555 0.006643535959 KS 2 2 0 0 0 0 10 19998.287542109774 0.006643627283 KS 2 2 0 0 0 0 10 19998.288542101949 0.006643632242 KS 2 2 0 0 0 0 10 19998.327542109328 0.006643830341 KS 2 2 0 0 0 0 10 19998.340542107053 0.006643896499 KS 2 2 0 0 0 0 10 19998.379542100269 0.006644095282 KS 2 2 0 0 0 0 10 19998.395542102939 0.006644176797 KS 2 2 0 0 0 0 10 19998.400542106414 0.006644202466 KS 2 2 0 0 0 0 10 19998.429542106795 0.006644350586 KS 2 2 0 0 0 0 10 19998.433542103918 0.006644370997 KS 2 2 0 0 0 0 10 19998.450542112958 0.006644458058 KS 2 2 0 0 0 0 10 19998.472542111278 0.006644570846 KS 2 2 0 0 0 0 10 19998.487542107599 0.006644647758 KS 2 2 0 0 0 0 10 19998.507542107367 0.006644750586 KS 2 2 0 0 0 0 10 19998.510542112312 0.006644766004 KS 2 2 0 0 0 0 10 19998.521542111477 0.006644822414 KS 2 2 0 0 0 0 10 19998.539542112707 0.006644915158 KS 2 2 0 0 0 0 10 19998.540542104896 0.006644920204 KS 2 2 0 0 0 0 10 19998.548542113331 0.006644961337 KS 2 2 0 0 0 0 10 19998.571542103866 0.006645079915 KS 2 2 0 0 0 0 10 19998.593542102222 0.006645193461 KS 2 2 0 0 0 0 10 19998.601542110642 0.006645234734 KS 2 2 0 0 0 0 10 19998.602542102846 0.006645239898 KS 2 2 0 0 0 0 10 19998.617542113301 0.006645317541 KS 2 2 0 0 0 0 10 19998.665542107115 0.006645566038 KS 2 2 0 0 0 0 10 19998.684542100542 0.006645664483 KS 2 2 0 0 0 0 10 19998.695542113881 0.006645721601 KS 2 2 0 0 0 0 10 19998.697542112448 0.006645731988 KS 2 2 0 0 0 0 10 19998.713542100930 0.006645815231 KS 2 2 0 0 0 0 10 19998.738542104213 0.006645945170 KS 2 2 0 0 0 0 10 19998.813542114021 0.006646336543 KS 2 2 0 0 0 0 10 19998.834542106018 0.006646446381 KS 2 2 0 0 0 0 10 19998.962542113197 0.006647118683 KS 2 2 0 0 0 0 10 19998.973542112348 0.006647176589 KS 2 2 0 0 0 0 10 19999.072542104928 0.006647700269 KS 2 2 0 0 0 0 10 19999.108542107395 0.006647891353 KS 2 2 0 0 0 0 10 19999.202542110677 0.006648392129 KS 2 2 0 0 0 0 10 19999.225542101183 0.006648515087 KS 2 2 0 0 0 0 10 19999.228542106117 0.006648531075 KS 2 2 0 0 0 0 10 19999.229542112487 0.006648536443 KS 2 2 0 0 0 0 10 19999.288542105478 0.006648852608 KS 2 2 0 0 0 0 10 19999.323542101592 0.006649040599 KS 2 2 0 0 0 0 10 19999.325542100160 0.006649051324 KS 2 2 0 0 0 0 10 19999.336542113502 0.006649110511 KS 2 2 0 0 0 0 10 19999.503542113878 0.006650013175 KS 2 2 0 0 0 0 10 19999.601542100128 0.006650546613 KS 2 2 0 0 0 0 10 19999.660542107311 0.006650869263 KS 2 2 0 0 0 0 10 19999.923542109573 0.006652319253 KS 2 2 0 0 0 0 10 19999.932542110178 0.006652369247 KS 2 2 0 0 0 0 10 20000.050542110373 0.006653026822 KS 2 2 0 0 0 0 10 20000.055542113867 0.006653054754 KS 2 2 0 0 0 0 10 20000.098542104250 0.006653295372 KS 2 2 0 0 0 0 10 20000.114542106920 0.006653385094 KS 2 2 0 0 0 0 10 20000.130542109586 0.006653474759 KS 2 2 0 0 0 0 10 20000.287542103033 0.006654359499 KS 2 2 0 0 0 0 10 20000.317542109817 0.006654529423 KS 2 2 0 0 0 0 10 20000.369542100798 0.006654824538 KS 2 2 0 0 0 0 10 20000.451542112736 0.006655291394 KS 2 2 0 0 0 0 10 20000.747542112658 0.006656993177 KS 2 2 0 0 0 0 10 20000.758542111831 0.006657056882 KS 2 2 0 0 0 0 10 20000.890542102021 0.006657824419 KS 2 2 0 0 0 0 10 20001.019542101498 0.006658579352 KS 2 2 0 0 0 0 10 20001.038542109109 0.006658690984 KS 2 2 0 0 0 0 10 20001.247542107798 0.006659925600 KS 2 2 0 0 0 0 10 20001.268542113979 0.006660050369 KS 2 2 0 0 0 0 10 20001.464542100763 0.006661221064 KS 2 2 0 0 0 0 10 20001.475542114113 0.006661286976 KS 2 2 0 0 0 0 10 20001.916542102092 0.006663962967 KS 2 2 0 0 0 0 10 20001.926542109097 0.006664024323 KS 2 2 0 0 0 0 10 20001.930542106205 0.006664048844 KS 2 2 0 0 0 0 10 20002.156542113993 0.006665443090 KS 2 2 0 0 0 0 10 20002.326542105304 0.006666501515 KS 2 2 0 0 0 0 10 20002.353542107183 0.006666670444 KS 2 2 0 0 0 0 10 20002.482542106682 0.006667480229 KS 2 2 0 0 0 0 10 20002.549542108187 0.006667902820 KS 2 2 0 0 0 0 10 20002.569542107994 0.006668029167 KS 2 2 0 0 0 0 10 20002.591542106376 0.006668168363 KS 2 2 0 0 0 0 10 20002.593542104936 0.006668181032 KS 2 2 0 0 0 0 10 20002.607542109054 0.006668269659 KS 2 2 0 0 0 0 10 20002.644542103757 0.006668504135 KS 2 2 0 0 0 0 10 20002.692542111818 0.006668808816 KS 2 2 0 0 0 0 10 20002.703542111009 0.006668878782 KS 2 2 0 0 0 0 10 20002.704542103187 0.006668885125 KS 2 2 0 0 0 0 10 20002.707542108124 0.006668904327 KS 2 2 0 0 0 0 10 20002.803542110083 0.006669516287 KS 2 2 0 0 0 0 10 20002.813542102922 0.006669580180 KS 2 2 0 0 0 0 10 20002.827542107028 0.006669669711 KS 2 2 0 0 0 0 10 20002.851542103977 0.006669823277 KS 2 2 0 0 0 0 10 20002.916542106923 0.006670240102 KS 2 2 0 0 0 0 10 20002.926542113895 0.006670304346 KS 2 2 0 0 0 0 10 20002.995542113993 0.006670748328 KS 2 2 0 0 0 0 10 20003.007542105348 0.006670825733 KS 2 2 0 0 0 0 10 20003.023542108040 0.006670929037 KS 2 2 0 0 0 0 10 20003.040542102954 0.006671038636 KS 2 2 0 0 0 0 10 20003.045542106443 0.006671070926 KS 2 2 0 0 0 0 10 20003.073542100479 0.006671251996 KS 2 2 0 0 0 0 10 20003.210542108449 0.006672140665 KS 2 2 0 0 0 0 10 20003.221542107636 0.006672212283 KS 2 2 0 0 0 0 10 20003.280542100718 0.006672596946 KS 2 2 0 0 0 0 10 20003.285542104211 0.006672629583 KS 2 2 0 0 0 0 10 20003.297542109773 0.006672708002 KS 2 2 0 0 0 0 10 20003.523542103434 0.006674191532 KS 2 2 0 0 0 0 10 20003.528542106920 0.006674224633 KS 2 2 0 0 0 0 10 20003.539542106122 0.006674297151 KS 2 2 0 0 0 0 10 20003.550542105309 0.006674369849 KS 2 2 0 0 0 0 10 20003.657542106441 0.006675078317 KS 2 2 0 0 0 0 10 20003.678542112622 0.006675217576 KS 2 2 0 0 0 0 10 20003.696542113888 0.006675337228 KS 2 2 0 0 0 0 10 20003.700542111019 0.006675363887 KS 2 2 0 0 0 0 10 20003.728542105084 0.006675550094 KS 2 2 0 0 0 0 10 20003.843542100454 0.006676317560 KS 2 2 0 0 0 0 10 20003.845542113220 0.006676330912 KS 2 2 0 0 0 0 10 20003.872542100897 0.006676511755 KS 2 2 0 0 0 0 10 20003.873542107296 0.006676518417 KS 2 2 0 0 0 0 10 20003.912542100541 0.006676779921 KS 2 2 0 0 0 0 10 20003.942542107354 0.006676981349 KS 2 2 0 0 0 0 10 20003.974542112712 0.006677196410 KS 2 2 0 0 0 0 10 20004.046542103562 0.006677681606 KS 2 2 0 0 0 0 10 20004.172542112323 0.006678534222 KS 2 2 0 0 0 0 10 20004.311542104646 0.006679480101 KS 2 2 0 0 0 0 10 20004.353542102865 0.006679766991 KS 2 2 0 0 0 0 10 20004.415542100847 0.006680191381 KS 2 2 0 0 0 0 10 20004.525542106909 0.006680947162 KS 2 2 0 0 0 0 10 20004.711542100969 0.006682233128 KS 2 2 0 0 0 0 10 20004.758542102656 0.006682559567 KS 2 2 0 0 0 0 10 20004.939542107397 0.006683822997 KS 2 2 0 0 0 0 10 20004.977542108478 0.006684089363 KS 2 2 0 0 0 0 10 20004.991542112592 0.006684187564 KS 2 2 0 0 0 0 10 20005.029542113665 0.006684454649 KS 2 2 0 0 0 0 10 20005.039542106497 0.006684524892 KS 2 2 0 0 0 0 10 20005.052542104229 0.006684616354 KS 2 2 0 0 0 0 10 20005.087542100351 0.006684862990 KS 2 2 0 0 0 0 10 20005.093542110266 0.006684905153 KS 2 2 0 0 0 0 10 20005.116542100830 0.006685067394 KS 2 2 0 0 0 0 10 20005.167542113839 0.006685427648 KS 2 2 0 0 0 0 10 20005.189542112228 0.006685583379 KS 2 2 0 0 0 0 10 20005.192542102970 0.006685604545 KS 2 2 0 0 0 0 10 20005.202542109975 0.006685675348 KS 2 2 0 0 0 0 10 20005.222542109812 0.006685816990 KS 2 2 0 0 0 0 10 20005.233542108977 0.006685894975 KS 2 2 0 0 0 0 10 20005.239542104693 0.006685937621 KS 2 2 0 0 0 0 10 20005.240542111042 0.006685944611 KS 2 2 0 0 0 0 10 20005.280542110693 0.006686228527 KS 2 2 0 0 0 0 10 20005.327542112394 0.006686562760 KS 2 2 0 0 0 0 10 20005.340542110145 0.006686655319 KS 2 2 0 0 0 0 10 20005.341542102364 0.006686662491 KS 2 2 0 0 0 0 10 20005.346542105865 0.006686697997 KS 2 2 0 0 0 0 10 20005.401542101798 0.006687090236 KS 2 2 0 0 0 0 10 20005.421542101634 0.006687233041 KS 2 2 0 0 0 0 10 20005.447542111317 0.006687418991 KS 2 2 0 0 0 0 10 20005.464542106198 0.006687540640 KS 2 2 0 0 0 0 10 20005.500542108726 0.006687798466 KS 2 2 0 0 0 0 10 20005.513542106499 0.006687891581 KS 2 2 0 0 0 0 10 20005.515542105066 0.006687905893 KS 2 2 0 0 0 0 10 20005.519542102193 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